JPH0354736U - - Google Patents
Info
- Publication number
- JPH0354736U JPH0354736U JP10987789U JP10987789U JPH0354736U JP H0354736 U JPH0354736 U JP H0354736U JP 10987789 U JP10987789 U JP 10987789U JP 10987789 U JP10987789 U JP 10987789U JP H0354736 U JPH0354736 U JP H0354736U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- speed
- exhaust
- opening
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Details Of Valves (AREA)
- Lift Valve (AREA)
Description
第１図は本考案の実施例の排気速度調整装置の
構成図。第２図は第１図の装置を真空槽および真
空ポンプと接続した図。第３図は従来の真空槽排
気の系統図である。
１……ニユーマチツクバルブ、２……弁体、３
……ニードルバルブ、４……チエツクバルブ、５
……開閉用電磁弁、６……バイパス用電磁弁、７
……排気速度調整装置、８……真空槽、９……真
空ポンプ、１０……大流量弁、１１……小流量制
御弁。
FIG. 1 is a configuration diagram of an exhaust speed adjusting device according to an embodiment of the present invention. FIG. 2 is a diagram in which the apparatus shown in FIG. 1 is connected to a vacuum chamber and a vacuum pump. FIG. 3 is a system diagram of conventional vacuum chamber exhaust. 1...Pneumatic valve, 2...Valve body, 3
...Needle valve, 4...Check valve, 5
... Solenoid valve for opening and closing, 6 ... Solenoid valve for bypass, 7
...Exhaust speed adjustment device, 8...Vacuum chamber, 9...Vacuum pump, 10...Large flow valve, 11...Small flow control valve.
Claims (1)
御する装置を備えたことを特徴とする真空装置の
排気速度調整装置。 (2) 前記排気弁としてニユーマチツクバルブ、
その弁の開閉移動の速度を制御する装置として、
ニードルバルブとその開閉用電磁弁を使用したこ
とを特徴とする実用新案登録願請求の範囲第１項
記載の真空装置の排気速度調整装置。 (3) 前記排気弁として電動バルブ、その弁の開
閉移動の速度を制御する装置として速度機付きの
電気モーターを使用したことを特徴とする実用新
案登録願請求の範囲第１項記載の真空装置の排気
速度調整装置。[Claims for Utility Model Registration] (1) An exhaust speed adjusting device for a vacuum device, characterized in that the valve body of the exhaust valve is equipped with a device that controls the speed of its opening and closing movement. (2) a pneumatic valve as the exhaust valve;
As a device to control the speed of opening and closing of the valve,
An evacuation speed adjusting device for a vacuum device according to claim 1 of the utility model registration application, characterized in that the device uses a needle valve and a solenoid valve for opening and closing the needle valve. (3) The vacuum device according to claim 1 of the application for utility model registration, characterized in that an electric valve is used as the exhaust valve, and an electric motor with a speed machine is used as the device for controlling the opening and closing speed of the valve. Exhaust speed adjustment device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10987789U JPH0354736U (en) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10987789U JPH0354736U (en) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0354736U true JPH0354736U (en) | 1991-05-27 |
Family
ID=31658436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10987789U Pending JPH0354736U (en) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354736U (en) |
-
1989
- 1989-09-20 JP JP10987789U patent/JPH0354736U/ja active Pending