JPS62101258U - - Google Patents
Info
- Publication number
- JPS62101258U JPS62101258U JP19277685U JP19277685U JPS62101258U JP S62101258 U JPS62101258 U JP S62101258U JP 19277685 U JP19277685 U JP 19277685U JP 19277685 U JP19277685 U JP 19277685U JP S62101258 U JPS62101258 U JP S62101258U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- solenoid valve
- laser device
- vacuum pump
- stopped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Pipeline Systems (AREA)
- Lasers (AREA)
Description
第１図はこの実施例のレーザ装置の配管系統図
、第２図はその電気制御回路の概略図、第３図は
従来例のレーザ装置の配管系統図、第４図はその
電気制御回路の概略図である。
１…レーザ放電管、２…混合ガスボンベ、３…
真空ポンプ、４…電磁弁、５…流量調整弁、６…
電磁三方弁、７…リリーフ弁、１０…駆動電源、
１１…制御電源、１２…タイマー付きリレー回路
、１３…リレー回路。
Fig. 1 is a piping system diagram of the laser device of this embodiment, Fig. 2 is a schematic diagram of its electric control circuit, Fig. 3 is a piping system diagram of the conventional laser device, and Fig. 4 is a diagram of its electric control circuit. It is a schematic diagram. 1... Laser discharge tube, 2... Mixed gas cylinder, 3...
Vacuum pump, 4... Solenoid valve, 5... Flow rate adjustment valve, 6...
Electromagnetic three-way valve, 7... relief valve, 10... drive power supply,
11... Control power supply, 12... Relay circuit with timer, 13... Relay circuit.
Claims (1)
ガス供給してレーザ発振せしめ、このガスを真空
ポンプにより大気中へ放出するガスレーザ装置に
おいて、前記電磁弁の電気制御回路に時間遅れタ
イマー素子を設け、このガスレーザ装置を停止さ
せる際に真空ポンプが停止した後一定時間遅れて
前記電磁弁を閉鎖するようにしたことを特徴とす
るガスレーザ装置。 In a gas laser device that supplies gas from a gas supply source to a laser discharge tube via a solenoid valve to cause laser oscillation, and releases this gas into the atmosphere by a vacuum pump, a time delay timer element is provided in the electric control circuit of the solenoid valve. . A gas laser device, characterized in that when the gas laser device is stopped, the solenoid valve is closed after a certain time delay after the vacuum pump is stopped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19277685U JPS62101258U (en) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19277685U JPS62101258U (en) | 1985-12-12 | 1985-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101258U true JPS62101258U (en) | 1987-06-27 |
Family
ID=31148178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19277685U Pending JPS62101258U (en) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101258U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251765A (en) * | 1988-03-31 | 1989-10-06 | Komatsu Ltd | Excimer laser apparatus |
-
1985
- 1985-12-12 JP JP19277685U patent/JPS62101258U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251765A (en) * | 1988-03-31 | 1989-10-06 | Komatsu Ltd | Excimer laser apparatus |