JPS61151340U - - Google Patents
Info
- Publication number
- JPS61151340U JPS61151340U JP1633885U JP1633885U JPS61151340U JP S61151340 U JPS61151340 U JP S61151340U JP 1633885 U JP1633885 U JP 1633885U JP 1633885 U JP1633885 U JP 1633885U JP S61151340 U JPS61151340 U JP S61151340U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- detector
- utility
- inspection device
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 230000005856 abnormality Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 13
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Feeding Of Articles To Conveyors (AREA)
- Registering Or Overturning Sheets (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985016338U JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-02-07 | 1985-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985016338U JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-02-07 | 1985-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61151340U true JPS61151340U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-18 |
| JPH0530362Y2 JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-03 |
Family
ID=30503017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985016338U Expired - Lifetime JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-02-07 | 1985-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001237306A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 基板ハンド、搬送装置、検査装置および平面基板収納装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5993140U (ja) * | 1982-12-15 | 1984-06-25 | 株式会社日立国際電気 | ウエ−ハ移し替え装置 |
| JPS59195051U (ja) * | 1983-06-14 | 1984-12-25 | 日本ケ−ブル株式会社 | 握索機の不良握索検出器 |
| JPS59195741U (ja) * | 1983-06-13 | 1984-12-26 | 日本電気株式会社 | ウエ−ハ移し替え装置 |
-
1985
- 1985-02-07 JP JP1985016338U patent/JPH0530362Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5993140U (ja) * | 1982-12-15 | 1984-06-25 | 株式会社日立国際電気 | ウエ−ハ移し替え装置 |
| JPS59195741U (ja) * | 1983-06-13 | 1984-12-26 | 日本電気株式会社 | ウエ−ハ移し替え装置 |
| JPS59195051U (ja) * | 1983-06-14 | 1984-12-25 | 日本ケ−ブル株式会社 | 握索機の不良握索検出器 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001237306A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 基板ハンド、搬送装置、検査装置および平面基板収納装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530362Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-03 |