JPS6115101A - 塩化カリウム用反射防止膜 - Google Patents

塩化カリウム用反射防止膜

Info

Publication number
JPS6115101A
JPS6115101A JP59135311A JP13531184A JPS6115101A JP S6115101 A JPS6115101 A JP S6115101A JP 59135311 A JP59135311 A JP 59135311A JP 13531184 A JP13531184 A JP 13531184A JP S6115101 A JPS6115101 A JP S6115101A
Authority
JP
Japan
Prior art keywords
film
layer
potassium chloride
substrate
antireflection film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59135311A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161642B2 (enrdf_load_stackoverflow
Inventor
Takeo Miyata
宮田　威男
Takuhiro Ono
小野　拓弘
Takashi Iwabuchi
岩淵　俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59135311A priority Critical patent/JPS6115101A/ja
Publication of JPS6115101A publication Critical patent/JPS6115101A/ja
Publication of JPS6161642B2 publication Critical patent/JPS6161642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP59135311A 1984-07-02 1984-07-02 塩化カリウム用反射防止膜 Granted JPS6115101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59135311A JPS6115101A (ja) 1984-07-02 1984-07-02 塩化カリウム用反射防止膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59135311A JPS6115101A (ja) 1984-07-02 1984-07-02 塩化カリウム用反射防止膜

Publications (2)

Publication Number Publication Date
JPS6115101A true JPS6115101A (ja) 1986-01-23
JPS6161642B2 JPS6161642B2 (enrdf_load_stackoverflow) 1986-12-26

Family

ID=15148761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59135311A Granted JPS6115101A (ja) 1984-07-02 1984-07-02 塩化カリウム用反射防止膜

Country Status (1)

Country Link
JP (1) JPS6115101A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339197A (en) * 1989-03-31 1994-08-16 Yen Yung Tsai Optical pellicle with controlled transmission peaking
US5741576A (en) * 1995-09-06 1998-04-21 Inko Industrial Corporation Optical pellicle with controlled transmission peaks and anti-reflective coatings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339197A (en) * 1989-03-31 1994-08-16 Yen Yung Tsai Optical pellicle with controlled transmission peaking
US5741576A (en) * 1995-09-06 1998-04-21 Inko Industrial Corporation Optical pellicle with controlled transmission peaks and anti-reflective coatings

Also Published As

Publication number Publication date
JPS6161642B2 (enrdf_load_stackoverflow) 1986-12-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term