JPS61150327A - 可変成形ビ−ム制御方法 - Google Patents
可変成形ビ−ム制御方法Info
- Publication number
- JPS61150327A JPS61150327A JP27180584A JP27180584A JPS61150327A JP S61150327 A JPS61150327 A JP S61150327A JP 27180584 A JP27180584 A JP 27180584A JP 27180584 A JP27180584 A JP 27180584A JP S61150327 A JPS61150327 A JP S61150327A
- Authority
- JP
- Japan
- Prior art keywords
- data
- origin
- control method
- aperture
- shaping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27180584A JPS61150327A (ja) | 1984-12-25 | 1984-12-25 | 可変成形ビ−ム制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27180584A JPS61150327A (ja) | 1984-12-25 | 1984-12-25 | 可変成形ビ−ム制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61150327A true JPS61150327A (ja) | 1986-07-09 |
| JPH0435896B2 JPH0435896B2 (enrdf_load_stackoverflow) | 1992-06-12 |
Family
ID=17505093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27180584A Granted JPS61150327A (ja) | 1984-12-25 | 1984-12-25 | 可変成形ビ−ム制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150327A (enrdf_load_stackoverflow) |
-
1984
- 1984-12-25 JP JP27180584A patent/JPS61150327A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435896B2 (enrdf_load_stackoverflow) | 1992-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |