JPS61149268U - - Google Patents
Info
- Publication number
- JPS61149268U JPS61149268U JP3320185U JP3320185U JPS61149268U JP S61149268 U JPS61149268 U JP S61149268U JP 3320185 U JP3320185 U JP 3320185U JP 3320185 U JP3320185 U JP 3320185U JP S61149268 U JPS61149268 U JP S61149268U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- arranged opposite
- exit port
- charged particle
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 3
- 239000006185 dispersion Substances 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320185U JPH0323654Y2 (https=) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320185U JPH0323654Y2 (https=) | 1985-03-08 | 1985-03-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149268U true JPS61149268U (https=) | 1986-09-13 |
| JPH0323654Y2 JPH0323654Y2 (https=) | 1991-05-23 |
Family
ID=30535430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3320185U Expired JPH0323654Y2 (https=) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323654Y2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8569894B2 (en) | 2010-01-13 | 2013-10-29 | Advanced Semiconductor Engineering, Inc. | Semiconductor package with single sided substrate design and manufacturing methods thereof |
| TWI411075B (zh) | 2010-03-22 | 2013-10-01 | 日月光半導體製造股份有限公司 | 半導體封裝件及其製造方法 |
| US9406658B2 (en) | 2010-12-17 | 2016-08-02 | Advanced Semiconductor Engineering, Inc. | Embedded component device and manufacturing methods thereof |
-
1985
- 1985-03-08 JP JP3320185U patent/JPH0323654Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323654Y2 (https=) | 1991-05-23 |
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