JPS6114855A - ポリシング装置 - Google Patents

ポリシング装置

Info

Publication number
JPS6114855A
JPS6114855A JP59133966A JP13396684A JPS6114855A JP S6114855 A JPS6114855 A JP S6114855A JP 59133966 A JP59133966 A JP 59133966A JP 13396684 A JP13396684 A JP 13396684A JP S6114855 A JPS6114855 A JP S6114855A
Authority
JP
Japan
Prior art keywords
workpiece
surface plate
polishing
work
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59133966A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457467B2 (enExample
Inventor
Hideo Kawakami
川上　英雄
Shinichi Tazawa
田澤　進一
Masami Endo
正美 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP59133966A priority Critical patent/JPS6114855A/ja
Publication of JPS6114855A publication Critical patent/JPS6114855A/ja
Publication of JPH0457467B2 publication Critical patent/JPH0457467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP59133966A 1984-06-28 1984-06-28 ポリシング装置 Granted JPS6114855A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59133966A JPS6114855A (ja) 1984-06-28 1984-06-28 ポリシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59133966A JPS6114855A (ja) 1984-06-28 1984-06-28 ポリシング装置

Publications (2)

Publication Number Publication Date
JPS6114855A true JPS6114855A (ja) 1986-01-23
JPH0457467B2 JPH0457467B2 (enExample) 1992-09-11

Family

ID=15117243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59133966A Granted JPS6114855A (ja) 1984-06-28 1984-06-28 ポリシング装置

Country Status (1)

Country Link
JP (1) JPS6114855A (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63200965A (ja) * 1987-02-12 1988-08-19 Fujitsu Ltd ウエ−ハ研磨装置
JPH09120528A (ja) * 1996-09-02 1997-05-06 Hitachi Ltd 磁気ディスクの製造方法及び製造装置
JP2000317812A (ja) * 1999-03-26 2000-11-21 Applied Materials Inc ポリシングスラリーを供給するキャリヤヘッド
KR100370245B1 (ko) * 1997-06-19 2003-04-07 인터내셔널 비지네스 머신즈 코포레이션 연마패드세정조립체및화학기계적연마어셈블리
JP2006224233A (ja) * 2005-02-17 2006-08-31 Hoya Corp マスクブランクス用ガラス基板の製造方法及びマスクブランクスの製造方法
JP2010231854A (ja) * 2009-03-27 2010-10-14 Hoya Corp 磁気ディスク用基板の製造方法
JP2012148360A (ja) * 2011-01-18 2012-08-09 Fujikoshi Mach Corp 両面研磨装置
JP2016000444A (ja) * 2014-06-12 2016-01-07 信越半導体株式会社 研磨パッドの洗浄方法及びウェーハの研磨方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122733A (ja) * 1982-01-18 1983-07-21 Toshiba Corp 半導体ウエハの研摩装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122733A (ja) * 1982-01-18 1983-07-21 Toshiba Corp 半導体ウエハの研摩装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63200965A (ja) * 1987-02-12 1988-08-19 Fujitsu Ltd ウエ−ハ研磨装置
JPH09120528A (ja) * 1996-09-02 1997-05-06 Hitachi Ltd 磁気ディスクの製造方法及び製造装置
KR100370245B1 (ko) * 1997-06-19 2003-04-07 인터내셔널 비지네스 머신즈 코포레이션 연마패드세정조립체및화학기계적연마어셈블리
JP2000317812A (ja) * 1999-03-26 2000-11-21 Applied Materials Inc ポリシングスラリーを供給するキャリヤヘッド
JP2006224233A (ja) * 2005-02-17 2006-08-31 Hoya Corp マスクブランクス用ガラス基板の製造方法及びマスクブランクスの製造方法
JP2010231854A (ja) * 2009-03-27 2010-10-14 Hoya Corp 磁気ディスク用基板の製造方法
JP2012148360A (ja) * 2011-01-18 2012-08-09 Fujikoshi Mach Corp 両面研磨装置
KR101832495B1 (ko) * 2011-01-18 2018-02-26 후지코시 기카이 고교 가부시키가이샤 양면 연마 장치
JP2016000444A (ja) * 2014-06-12 2016-01-07 信越半導体株式会社 研磨パッドの洗浄方法及びウェーハの研磨方法

Also Published As

Publication number Publication date
JPH0457467B2 (enExample) 1992-09-11

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