JPS61145938U - - Google Patents
Info
- Publication number
- JPS61145938U JPS61145938U JP2852085U JP2852085U JPS61145938U JP S61145938 U JPS61145938 U JP S61145938U JP 2852085 U JP2852085 U JP 2852085U JP 2852085 U JP2852085 U JP 2852085U JP S61145938 U JPS61145938 U JP S61145938U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- stage means
- exposure apparatus
- view
- axis table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Projection-Type Copiers In General (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028520U JPH0232359Y2 (https=) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028520U JPH0232359Y2 (https=) | 1985-02-28 | 1985-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61145938U true JPS61145938U (https=) | 1986-09-09 |
| JPH0232359Y2 JPH0232359Y2 (https=) | 1990-09-03 |
Family
ID=30526470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985028520U Expired JPH0232359Y2 (https=) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0232359Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61219543A (ja) * | 1985-03-26 | 1986-09-29 | Koshin Seisakusho:Kk | 移動加工装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911074A (https=) * | 1972-05-26 | 1974-01-31 | ||
| JPS60147737A (ja) * | 1984-01-13 | 1985-08-03 | Hitachi Ltd | ペリクルホルダ |
-
1985
- 1985-02-28 JP JP1985028520U patent/JPH0232359Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911074A (https=) * | 1972-05-26 | 1974-01-31 | ||
| JPS60147737A (ja) * | 1984-01-13 | 1985-08-03 | Hitachi Ltd | ペリクルホルダ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61219543A (ja) * | 1985-03-26 | 1986-09-29 | Koshin Seisakusho:Kk | 移動加工装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0232359Y2 (https=) | 1990-09-03 |