JPS61142406A - 光学式変位測定装置 - Google Patents
光学式変位測定装置Info
- Publication number
- JPS61142406A JPS61142406A JP26583184A JP26583184A JPS61142406A JP S61142406 A JPS61142406 A JP S61142406A JP 26583184 A JP26583184 A JP 26583184A JP 26583184 A JP26583184 A JP 26583184A JP S61142406 A JPS61142406 A JP S61142406A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- unit
- units
- light
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 180
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 22
- 230000000694 effects Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26583184A JPS61142406A (ja) | 1984-12-17 | 1984-12-17 | 光学式変位測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26583184A JPS61142406A (ja) | 1984-12-17 | 1984-12-17 | 光学式変位測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61142406A true JPS61142406A (ja) | 1986-06-30 |
| JPH0315127B2 JPH0315127B2 (enExample) | 1991-02-28 |
Family
ID=17422657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26583184A Granted JPS61142406A (ja) | 1984-12-17 | 1984-12-17 | 光学式変位測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142406A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212800A (ja) * | 2006-02-10 | 2007-08-23 | Pilot Ink Co Ltd | 可逆変色性表示体及びそれを用いた可逆変色性表示体セット |
| CN117146678B (zh) * | 2023-10-27 | 2024-01-23 | 四川华体照明科技股份有限公司 | 一种led光源模组透镜检测设备 |
-
1984
- 1984-12-17 JP JP26583184A patent/JPS61142406A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212800A (ja) * | 2006-02-10 | 2007-08-23 | Pilot Ink Co Ltd | 可逆変色性表示体及びそれを用いた可逆変色性表示体セット |
| CN117146678B (zh) * | 2023-10-27 | 2024-01-23 | 四川华体照明科技股份有限公司 | 一种led光源模组透镜检测设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315127B2 (enExample) | 1991-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0956518B1 (en) | Interferometer system and lithographic apparatus comprising such a system | |
| KR100554886B1 (ko) | 2파장을 갖는 간섭계 시스템 및 그 시스템을 구비한 전사장치 | |
| JP2000275027A (ja) | スリット共焦点顕微鏡とそれを用いた表面形状計測装置 | |
| KR920009800B1 (ko) | 곡률반경 측정장치 및 방법 | |
| JPH0455243B2 (enExample) | ||
| JPS63144206A (ja) | 物体位置の測定方法 | |
| JPS61142406A (ja) | 光学式変位測定装置 | |
| CN109443210A (zh) | 光学位置检测装置和方法 | |
| KR100295477B1 (ko) | 물체의치수를측정하는장치 | |
| US3347130A (en) | Optical measuring instruments | |
| JPS61142407A (ja) | 光学式変位測定装置 | |
| US3832063A (en) | Lens axis detection using an interferometer | |
| JPH0447222A (ja) | 高精度位置比較装置 | |
| JPH0315126B2 (enExample) | ||
| JP2672718B2 (ja) | 屈折率測定方法及び装置 | |
| JP2005003667A (ja) | 基準軸設定光学系、並びにこれを用いた偏心量測定機及び偏心測定方法 | |
| JPS6242327Y2 (enExample) | ||
| JP2544389B2 (ja) | レンズ中心厚測定装置 | |
| JPH01123102A (ja) | トレンチ深さ測定装置 | |
| US3535042A (en) | Optical gage | |
| JPH08304721A (ja) | 走査光学装置 | |
| JPS6052371B2 (ja) | 焦点位置測定装置 | |
| JPS6117907A (ja) | 3次元形状測定装置 | |
| JPH0118369B2 (enExample) | ||
| RU1783293C (ru) | Двухкоординатное оптическое измерительное устройство |