JPS6114130Y2 - - Google Patents

Info

Publication number
JPS6114130Y2
JPS6114130Y2 JP15977681U JP15977681U JPS6114130Y2 JP S6114130 Y2 JPS6114130 Y2 JP S6114130Y2 JP 15977681 U JP15977681 U JP 15977681U JP 15977681 U JP15977681 U JP 15977681U JP S6114130 Y2 JPS6114130 Y2 JP S6114130Y2
Authority
JP
Japan
Prior art keywords
sample
stage
axis
chuck
spindle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15977681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5864062U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15977681U priority Critical patent/JPS5864062U/ja
Publication of JPS5864062U publication Critical patent/JPS5864062U/ja
Application granted granted Critical
Publication of JPS6114130Y2 publication Critical patent/JPS6114130Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP15977681U 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置 Granted JPS5864062U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15977681U JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15977681U JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Publications (2)

Publication Number Publication Date
JPS5864062U JPS5864062U (ja) 1983-04-30
JPS6114130Y2 true JPS6114130Y2 (enExample) 1986-05-01

Family

ID=29952221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15977681U Granted JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Country Status (1)

Country Link
JP (1) JPS5864062U (enExample)

Also Published As

Publication number Publication date
JPS5864062U (ja) 1983-04-30

Similar Documents

Publication Publication Date Title
JP3957750B2 (ja) 電子顕微鏡法のためのイオンビーム準備装置
US10629409B2 (en) Specimen preparation and inspection in a dual-beam charged particle microscope
JP2007129214A (ja) ステージ組立体、そのようなステージ組立体を含む粒子光学装置、及び、そのような装置において試料を処理する方法
KR20170108805A (ko) 집속 이온 빔 장치
JP2004093353A (ja) 試料作製装置
JP6140298B2 (ja) 試料ホルダ及び真空分析装置
JP2001066231A (ja) 試料作成装置および試料作成方法
JPS6114130Y2 (enExample)
US9947506B2 (en) Sample holder and focused ion beam apparatus
JP2001066231A5 (enExample)
AU2020326891B2 (en) Electron microscope imaging adaptor
Roussel et al. Extreme high resolution scanning electron microscopy (XHR SEM) and beyond
CN107202803A (zh) 一种用于计算机分层扫描成像的载物台
WO2014195998A1 (ja) 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法
GB1398513A (en) Electron probe instruments
JP2004087214A (ja) 荷電粒子線装置用試料ホールダ
JP2021082586A (ja) 電子顕微鏡ステージ
JP2580352B2 (ja) ラスター電子顕微鏡
EP4318544A1 (en) Clamping mechanism
JP2002365182A (ja) 試料作製装置
US10741360B2 (en) Method for producing a TEM sample
JPH08138599A (ja) 荷電ビーム装置および絞り機構
JP6063755B2 (ja) 荷電粒子線装置、および円盤状試料観察モジュール
JP4887049B2 (ja) 荷電粒子線装置の試料台
JP2002319365A (ja) ステージ及びｆｉｂ試料作成装置