JPS5864062U - 電子線等を用いる分析装置の試料装置 - Google Patents

電子線等を用いる分析装置の試料装置

Info

Publication number
JPS5864062U
JPS5864062U JP15977681U JP15977681U JPS5864062U JP S5864062 U JPS5864062 U JP S5864062U JP 15977681 U JP15977681 U JP 15977681U JP 15977681 U JP15977681 U JP 15977681U JP S5864062 U JPS5864062 U JP S5864062U
Authority
JP
Japan
Prior art keywords
electron beams
sample device
analysis equipment
uses electron
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15977681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6114130Y2 (enExample
Inventor
平居 暉士
河合 政夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15977681U priority Critical patent/JPS5864062U/ja
Publication of JPS5864062U publication Critical patent/JPS5864062U/ja
Application granted granted Critical
Publication of JPS6114130Y2 publication Critical patent/JPS6114130Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP15977681U 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置 Granted JPS5864062U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15977681U JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15977681U JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Publications (2)

Publication Number Publication Date
JPS5864062U true JPS5864062U (ja) 1983-04-30
JPS6114130Y2 JPS6114130Y2 (enExample) 1986-05-01

Family

ID=29952221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15977681U Granted JPS5864062U (ja) 1981-10-26 1981-10-26 電子線等を用いる分析装置の試料装置

Country Status (1)

Country Link
JP (1) JPS5864062U (enExample)

Also Published As

Publication number Publication date
JPS6114130Y2 (enExample) 1986-05-01

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