JPS61140047A - 閉塞半球状陽極電子衝撃型イオン源 - Google Patents

閉塞半球状陽極電子衝撃型イオン源

Info

Publication number
JPS61140047A
JPS61140047A JP59262184A JP26218484A JPS61140047A JP S61140047 A JPS61140047 A JP S61140047A JP 59262184 A JP59262184 A JP 59262184A JP 26218484 A JP26218484 A JP 26218484A JP S61140047 A JPS61140047 A JP S61140047A
Authority
JP
Japan
Prior art keywords
anode
electrons
ion source
ions
hemispherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59262184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235416B2 (enrdf_load_stackoverflow
Inventor
Fumio Watanabe
文夫 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP59262184A priority Critical patent/JPS61140047A/ja
Publication of JPS61140047A publication Critical patent/JPS61140047A/ja
Publication of JPH0235416B2 publication Critical patent/JPH0235416B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP59262184A 1984-12-12 1984-12-12 閉塞半球状陽極電子衝撃型イオン源 Granted JPS61140047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59262184A JPS61140047A (ja) 1984-12-12 1984-12-12 閉塞半球状陽極電子衝撃型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59262184A JPS61140047A (ja) 1984-12-12 1984-12-12 閉塞半球状陽極電子衝撃型イオン源

Publications (2)

Publication Number Publication Date
JPS61140047A true JPS61140047A (ja) 1986-06-27
JPH0235416B2 JPH0235416B2 (enrdf_load_stackoverflow) 1990-08-10

Family

ID=17372232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59262184A Granted JPS61140047A (ja) 1984-12-12 1984-12-12 閉塞半球状陽極電子衝撃型イオン源

Country Status (1)

Country Link
JP (1) JPS61140047A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012003976A (ja) * 2010-06-17 2012-01-05 Ulvac Japan Ltd 四重極型質量分析計
US20120025072A1 (en) * 2009-03-27 2012-02-02 Msi. Tokyo, Inc. Ion Source, And Mass Spectroscope Provided With Same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120025072A1 (en) * 2009-03-27 2012-02-02 Msi. Tokyo, Inc. Ion Source, And Mass Spectroscope Provided With Same
US9373474B2 (en) * 2009-03-27 2016-06-21 Osaka University Ion source, and mass spectroscope provided with same
JP2012003976A (ja) * 2010-06-17 2012-01-05 Ulvac Japan Ltd 四重極型質量分析計

Also Published As

Publication number Publication date
JPH0235416B2 (enrdf_load_stackoverflow) 1990-08-10

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