JPH0378741B2 - - Google Patents

Info

Publication number
JPH0378741B2
JPH0378741B2 JP58126091A JP12609183A JPH0378741B2 JP H0378741 B2 JPH0378741 B2 JP H0378741B2 JP 58126091 A JP58126091 A JP 58126091A JP 12609183 A JP12609183 A JP 12609183A JP H0378741 B2 JPH0378741 B2 JP H0378741B2
Authority
JP
Japan
Prior art keywords
anode
hot cathode
ion
electrons
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58126091A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6020442A (ja
Inventor
Fumio Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP58126091A priority Critical patent/JPS6020442A/ja
Publication of JPS6020442A publication Critical patent/JPS6020442A/ja
Publication of JPH0378741B2 publication Critical patent/JPH0378741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP58126091A 1983-07-13 1983-07-13 質量分析計用熱陰極電子衝撃型イオン源 Granted JPS6020442A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126091A JPS6020442A (ja) 1983-07-13 1983-07-13 質量分析計用熱陰極電子衝撃型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126091A JPS6020442A (ja) 1983-07-13 1983-07-13 質量分析計用熱陰極電子衝撃型イオン源

Publications (2)

Publication Number Publication Date
JPS6020442A JPS6020442A (ja) 1985-02-01
JPH0378741B2 true JPH0378741B2 (enrdf_load_stackoverflow) 1991-12-16

Family

ID=14926376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126091A Granted JPS6020442A (ja) 1983-07-13 1983-07-13 質量分析計用熱陰極電子衝撃型イオン源

Country Status (1)

Country Link
JP (1) JPS6020442A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172651A (ja) * 1986-01-23 1987-07-29 Shimadzu Corp イオン源
US4988869A (en) * 1989-08-21 1991-01-29 The Regents Of The University Of California Method and apparatus for electron-induced dissociation of molecular species
JP2784148B2 (ja) * 1994-08-31 1998-08-06 浜松ホトニクス株式会社 ガス放電管
US6037587A (en) * 1997-10-17 2000-03-14 Hewlett-Packard Company Chemical ionization source for mass spectrometry
CH698896B1 (de) * 2006-08-29 2009-11-30 Inficon Gmbh Massenspektrometer.
KR101420244B1 (ko) * 2008-05-20 2014-07-21 재단법인서울대학교산학협력재단 전자빔 집속 전극 및 이를 이용한 전자총
KR101134022B1 (ko) * 2009-10-01 2012-04-05 한국표준과학연구원 코일 애노드가 형성된 이온 소스기 및 이를 이용하는 잔류가스 분석장치
US9799504B2 (en) * 2015-12-11 2017-10-24 Horiba Stec, Co., Ltd. Ion source, quadrupole mass spectrometer and residual gas analyzing method

Also Published As

Publication number Publication date
JPS6020442A (ja) 1985-02-01

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