JPS61136544U - - Google Patents
Info
- Publication number
- JPS61136544U JPS61136544U JP1985019958U JP1995885U JPS61136544U JP S61136544 U JPS61136544 U JP S61136544U JP 1985019958 U JP1985019958 U JP 1985019958U JP 1995885 U JP1995885 U JP 1995885U JP S61136544 U JPS61136544 U JP S61136544U
- Authority
- JP
- Japan
- Prior art keywords
- ion etching
- airtight container
- semiconductor wafer
- chuck mechanism
- transfer plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985019958U JPS61136544U (enExample) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985019958U JPS61136544U (enExample) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136544U true JPS61136544U (enExample) | 1986-08-25 |
Family
ID=30510009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985019958U Pending JPS61136544U (enExample) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136544U (enExample) |
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1985
- 1985-02-13 JP JP1985019958U patent/JPS61136544U/ja active Pending