JPS61133560U - - Google Patents

Info

Publication number
JPS61133560U
JPS61133560U JP1523285U JP1523285U JPS61133560U JP S61133560 U JPS61133560 U JP S61133560U JP 1523285 U JP1523285 U JP 1523285U JP 1523285 U JP1523285 U JP 1523285U JP S61133560 U JPS61133560 U JP S61133560U
Authority
JP
Japan
Prior art keywords
electrode
sputter target
vacuum container
substrate
target electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1523285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342037Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1523285U priority Critical patent/JPH0342037Y2/ja
Publication of JPS61133560U publication Critical patent/JPS61133560U/ja
Application granted granted Critical
Publication of JPH0342037Y2 publication Critical patent/JPH0342037Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1523285U 1985-02-04 1985-02-04 Expired JPH0342037Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1523285U JPH0342037Y2 (enExample) 1985-02-04 1985-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1523285U JPH0342037Y2 (enExample) 1985-02-04 1985-02-04

Publications (2)

Publication Number Publication Date
JPS61133560U true JPS61133560U (enExample) 1986-08-20
JPH0342037Y2 JPH0342037Y2 (enExample) 1991-09-03

Family

ID=30500891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1523285U Expired JPH0342037Y2 (enExample) 1985-02-04 1985-02-04

Country Status (1)

Country Link
JP (1) JPH0342037Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7229715B2 (en) 2003-06-17 2007-06-12 The Gillette Company Anode for battery
US7247407B2 (en) 1997-08-01 2007-07-24 The Gillette Company Electrode having modal distribution of zinc-based particles
JP5651693B2 (ja) * 2010-06-23 2015-01-14 株式会社アルバック 基板ホルダ及び成膜装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7247407B2 (en) 1997-08-01 2007-07-24 The Gillette Company Electrode having modal distribution of zinc-based particles
US7579113B2 (en) 1997-08-01 2009-08-25 The Gillette Company Electrode having modal distribution of zinc-based particles
US7229715B2 (en) 2003-06-17 2007-06-12 The Gillette Company Anode for battery
JP5651693B2 (ja) * 2010-06-23 2015-01-14 株式会社アルバック 基板ホルダ及び成膜装置

Also Published As

Publication number Publication date
JPH0342037Y2 (enExample) 1991-09-03

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