JPS61132812A - 変位検出装置 - Google Patents
変位検出装置Info
- Publication number
- JPS61132812A JPS61132812A JP25467184A JP25467184A JPS61132812A JP S61132812 A JPS61132812 A JP S61132812A JP 25467184 A JP25467184 A JP 25467184A JP 25467184 A JP25467184 A JP 25467184A JP S61132812 A JPS61132812 A JP S61132812A
- Authority
- JP
- Japan
- Prior art keywords
- light
- slit
- displacement
- slit plate
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000007772 electrode material Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000000379 polymerizing effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25467184A JPS61132812A (ja) | 1984-11-30 | 1984-11-30 | 変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25467184A JPS61132812A (ja) | 1984-11-30 | 1984-11-30 | 変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61132812A true JPS61132812A (ja) | 1986-06-20 |
| JPH0467601B2 JPH0467601B2 (enExample) | 1992-10-28 |
Family
ID=17268241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25467184A Granted JPS61132812A (ja) | 1984-11-30 | 1984-11-30 | 変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61132812A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332305A (ja) * | 1986-07-25 | 1988-02-12 | Komatsu Ltd | 光位置検出素子 |
| JPS63180817A (ja) * | 1987-01-22 | 1988-07-25 | Sankyo Seiki Mfg Co Ltd | 光エンコ−ダ |
| WO2001096816A1 (en) * | 2000-06-15 | 2001-12-20 | Scanlab Ag | A position detector for a scanning device |
| EP1071929B2 (en) † | 1998-04-17 | 2011-10-26 | Cambridge Technology, Inc. | Axial led position detector for determining the angular position of a rotatable element |
-
1984
- 1984-11-30 JP JP25467184A patent/JPS61132812A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332305A (ja) * | 1986-07-25 | 1988-02-12 | Komatsu Ltd | 光位置検出素子 |
| JPS63180817A (ja) * | 1987-01-22 | 1988-07-25 | Sankyo Seiki Mfg Co Ltd | 光エンコ−ダ |
| EP1071929B2 (en) † | 1998-04-17 | 2011-10-26 | Cambridge Technology, Inc. | Axial led position detector for determining the angular position of a rotatable element |
| WO2001096816A1 (en) * | 2000-06-15 | 2001-12-20 | Scanlab Ag | A position detector for a scanning device |
| US6921893B1 (en) | 2000-06-15 | 2005-07-26 | Scanlab Ag | Position detector for a scanning device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0467601B2 (enExample) | 1992-10-28 |
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