JPS61132509U - - Google Patents
Info
- Publication number
- JPS61132509U JPS61132509U JP1435685U JP1435685U JPS61132509U JP S61132509 U JPS61132509 U JP S61132509U JP 1435685 U JP1435685 U JP 1435685U JP 1435685 U JP1435685 U JP 1435685U JP S61132509 U JPS61132509 U JP S61132509U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- head
- coil conductor
- conductive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Description
第１図Ａ乃至第１図Ｃは本考案の一実施例を示
すものであり、第１図Ａは本考案を適用した薄膜
磁気ヘツドの要部平面図、第１図Ｂは第１図Ａの
ａ―ａ線における断面図、第１図Ｃは第１図Ａの
ｂ―ｂ線における断面図である。第２図ないし第
４図は第１図に示す薄膜磁気ヘツドの製造工程を
その工程順序に従つて示すものであり、第２図Ａ
は第１のコイル導体形成工程を示す要部平面図、
第２図Ｂは第２図Ａのｃ―ｃ線における断面図、
第３図Ａは第２のコイル導体形成工程を示す要部
平面図、第３図Ｂは第３図Ａのｄ―ｄ線における
断面図、第４図は上部磁性体形成工程を示す要部
断面図である。第５図は従来の多トラツク型の薄
膜磁気ヘツドのバツクギヤツプ部における副走査
方向の要部断面図である。
１，２１……下部磁性基板、２，４，７，２２
，３１，４５……絶縁層、３，２３……第１のコ
イル導体、５，３２……第２のコイル導体、３ａ
，２４……第１のダミー膜、５ａ，５ｂ，５ｃ，
３３，３４，３５……第２のダミー膜、９，４６
……上部磁性体。
1A to 1C show an embodiment of the present invention. FIG. 1A is a plan view of the main part of a thin film magnetic head to which the present invention is applied, and FIG. FIG. 1C is a sectional view taken along line bb of FIG. 1A. 2 to 4 show the manufacturing process of the thin film magnetic head shown in FIG. 1 in the order of the steps, and FIG.
is a main part plan view showing the first coil conductor forming step,
FIG. 2B is a sectional view taken along line cc of FIG. 2A,
FIG. 3A is a plan view of the main part showing the second coil conductor forming step, FIG. 3B is a sectional view taken along the dd line of FIG. 3A, and FIG. 4 is the main part showing the upper magnetic body forming step. FIG. FIG. 5 is a sectional view of a main part in the sub-scanning direction of the backgap portion of a conventional multi-track thin film magnetic head. 1, 21...lower magnetic substrate, 2, 4, 7, 22
, 31, 45... Insulating layer, 3, 23... First coil conductor, 5, 32... Second coil conductor, 3a
, 24...first dummy film, 5a, 5b, 5c,
33, 34, 35... second dummy film, 9, 46
...Top magnetic body.
Claims (1)
とにより形成されるコイル導体及び上部磁性体が
絶縁層を介して積層形成されてなる薄膜ヘツド素
子が複数設けられ、これら各薄膜ヘツド素子間に
上記導体薄膜をダミー膜として残存してなる薄膜
磁気ヘツド。 A plurality of thin film head elements are provided in which a coil conductor formed by etching a conductive thin film on a lower magnetic substrate and an upper magnetic body are laminated with an insulating layer interposed therebetween, and the conductive thin film is placed between each thin film head element. A thin-film magnetic head with the remaining dummy film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1435685U JPS61132509U (en) | 1985-02-04 | 1985-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1435685U JPS61132509U (en) | 1985-02-04 | 1985-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61132509U true JPS61132509U (en) | 1986-08-19 |
Family
ID=30499202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1435685U Pending JPS61132509U (en) | 1985-02-04 | 1985-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61132509U (en) |
-
1985
- 1985-02-04 JP JP1435685U patent/JPS61132509U/ja active Pending
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