JPS6429852U - - Google Patents
Info
- Publication number
- JPS6429852U JPS6429852U JP12454987U JP12454987U JPS6429852U JP S6429852 U JPS6429852 U JP S6429852U JP 12454987 U JP12454987 U JP 12454987U JP 12454987 U JP12454987 U JP 12454987U JP S6429852 U JPS6429852 U JP S6429852U
- Authority
- JP
- Japan
- Prior art keywords
- film
- conductive
- films
- thin film
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 6
- 229910052688 Gadolinium Inorganic materials 0.000 claims 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Description
第１図から第３図はこの考案の一実施例を示し
、第１図はその要部拡大平面図、第２図はその断
面図、第３図ａはその等価回路を示す図、第３図
ｂはインダクタンスの微調整方法を示す図、第４
図ａ〜ｃは薄膜インダクタンスの変形例を示す図
である。
１……基板、２……第１金属膜、３，５……絶
縁膜、４……磁性体薄膜、６……第２金属膜、７
……コンタクトホール。
Figures 1 to 3 show an embodiment of this invention, with Figure 1 being an enlarged plan view of its essential parts, Figure 2 being a cross-sectional view, Figure 3a showing its equivalent circuit, and Figure 3a showing its equivalent circuit. Figure b is a diagram showing the method of fine-tuning the inductance.
Figures a to c are diagrams showing modified examples of thin film inductance. DESCRIPTION OF SYMBOLS 1... Substrate, 2... First metal film, 3, 5... Insulating film, 4... Magnetic thin film, 6... Second metal film, 7
...Contact hole.
Claims (1)
切るように絶縁膜を介して積層されたガドリニウ
ムを主成分とする薄膜と、この薄膜に絶縁膜を介
して積層され、かつ前記薄膜と交差するように配
列形成された複数の第２の導電膜とを有し、前記
第１の導電膜と前記第２の導電膜の各両端をそれ
ぞれ隣接した異なる導電膜と順次電気的に接続し
たことを特徴とする薄膜インダクタンス。 a plurality of first conductive films, a thin film mainly composed of gadolinium laminated across the first conductive films with an insulating film interposed therebetween, and a thin film laminated on the thin films with an insulating film interposed therebetween; and a plurality of second conductive films arranged to intersect with each other, and each end of the first conductive film and the second conductive film is sequentially electrically connected to a different adjacent conductive film. A thin film inductance characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12454987U JPS6429852U (en) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12454987U JPS6429852U (en) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429852U true JPS6429852U (en) | 1989-02-22 |
Family
ID=31374380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12454987U Pending JPS6429852U (en) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429852U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58188115A (en) * | 1982-04-27 | 1983-11-02 | Sanyo Electric Co Ltd | Forming method of inductive element |
| JPS59202614A (en) * | 1983-05-04 | 1984-11-16 | Showa Denko Kk | Magnetic element |
-
1987
- 1987-08-17 JP JP12454987U patent/JPS6429852U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58188115A (en) * | 1982-04-27 | 1983-11-02 | Sanyo Electric Co Ltd | Forming method of inductive element |
| JPS59202614A (en) * | 1983-05-04 | 1984-11-16 | Showa Denko Kk | Magnetic element |
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