JPS6113115B2 - - Google Patents

Info

Publication number
JPS6113115B2
JPS6113115B2 JP54137946A JP13794679A JPS6113115B2 JP S6113115 B2 JPS6113115 B2 JP S6113115B2 JP 54137946 A JP54137946 A JP 54137946A JP 13794679 A JP13794679 A JP 13794679A JP S6113115 B2 JPS6113115 B2 JP S6113115B2
Authority
JP
Japan
Prior art keywords
molecular pump
mirror body
bellows
exhaust pipe
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54137946A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5664195A (en
Inventor
Hiroyuki Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP13794679A priority Critical patent/JPS5664195A/ja
Publication of JPS5664195A publication Critical patent/JPS5664195A/ja
Publication of JPS6113115B2 publication Critical patent/JPS6113115B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13794679A 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like Granted JPS5664195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS5664195A JPS5664195A (en) 1981-06-01
JPS6113115B2 true JPS6113115B2 (enExample) 1986-04-11

Family

ID=15210394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13794679A Granted JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5664195A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221482A (ja) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd 真空装置排気系の防振装置
JPS608490U (ja) * 1983-06-30 1985-01-21 アルバツク・クライオ株式会社 防振装置を備えたクライオポンプの固定装置
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JPH0462441U (enExample) * 1990-10-01 1992-05-28
JP4190918B2 (ja) 2003-03-11 2008-12-03 シャープ株式会社 真空処理装置
GB0402625D0 (en) * 2004-02-06 2004-03-10 Boc Group Plc Vibration damper
JP2006077714A (ja) * 2004-09-10 2006-03-23 Boc Edwards Kk ダンパ及び真空ポンプ

Also Published As

Publication number Publication date
JPS5664195A (en) 1981-06-01

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