JPS61129336U - - Google Patents

Info

Publication number
JPS61129336U
JPS61129336U JP1379085U JP1379085U JPS61129336U JP S61129336 U JPS61129336 U JP S61129336U JP 1379085 U JP1379085 U JP 1379085U JP 1379085 U JP1379085 U JP 1379085U JP S61129336 U JPS61129336 U JP S61129336U
Authority
JP
Japan
Prior art keywords
semiconductor element
semiconductor
semiconductor wafer
element regions
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1379085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1379085U priority Critical patent/JPS61129336U/ja
Publication of JPS61129336U publication Critical patent/JPS61129336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1379085U 1985-02-01 1985-02-01 Pending JPS61129336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1379085U JPS61129336U (enrdf_load_stackoverflow) 1985-02-01 1985-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1379085U JPS61129336U (enrdf_load_stackoverflow) 1985-02-01 1985-02-01

Publications (1)

Publication Number Publication Date
JPS61129336U true JPS61129336U (enrdf_load_stackoverflow) 1986-08-13

Family

ID=30498120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1379085U Pending JPS61129336U (enrdf_load_stackoverflow) 1985-02-01 1985-02-01

Country Status (1)

Country Link
JP (1) JPS61129336U (enrdf_load_stackoverflow)

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