JPS61127142A - ウエハ−の剥離装置 - Google Patents

ウエハ−の剥離装置

Info

Publication number
JPS61127142A
JPS61127142A JP24796684A JP24796684A JPS61127142A JP S61127142 A JPS61127142 A JP S61127142A JP 24796684 A JP24796684 A JP 24796684A JP 24796684 A JP24796684 A JP 24796684A JP S61127142 A JPS61127142 A JP S61127142A
Authority
JP
Japan
Prior art keywords
wafer
reference plate
plate
peeling
ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24796684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473612B2 (enrdf_load_stackoverflow
Inventor
Kazuhito Yasukawa
員仁 安川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to JP24796684A priority Critical patent/JPS61127142A/ja
Publication of JPS61127142A publication Critical patent/JPS61127142A/ja
Publication of JPH0473612B2 publication Critical patent/JPH0473612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Special Conveying (AREA)
  • Control Of Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
JP24796684A 1984-11-26 1984-11-26 ウエハ−の剥離装置 Granted JPS61127142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24796684A JPS61127142A (ja) 1984-11-26 1984-11-26 ウエハ−の剥離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24796684A JPS61127142A (ja) 1984-11-26 1984-11-26 ウエハ−の剥離装置

Publications (2)

Publication Number Publication Date
JPS61127142A true JPS61127142A (ja) 1986-06-14
JPH0473612B2 JPH0473612B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=17171201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24796684A Granted JPS61127142A (ja) 1984-11-26 1984-11-26 ウエハ−の剥離装置

Country Status (1)

Country Link
JP (1) JPS61127142A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0258223A (ja) * 1988-08-23 1990-02-27 Mitsubishi Electric Corp 半導体装置の製造装置
JPH038432U (enrdf_load_stackoverflow) * 1989-06-12 1991-01-28
CN103935731A (zh) * 2014-04-09 2014-07-23 珠海格力电器股份有限公司 应用于流水线生产的检测装置及方法
CN111392380A (zh) * 2020-04-23 2020-07-10 王后磊 一种仓储自动化配货装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CL2008003900A1 (es) 2008-12-24 2009-03-13 Crystal Lagoons Curacao Bv Proceso de filtracion del agua de un estanque, sin filtrar la totalidad del agua, que comprende a) emitir ondas ultrasonicas en el estanque; b) adicionar un floculante, c) succionar los floculos con un aparato aspirador hacia una linea recolectora de efluente; d) filtrar dicho efluente y retornar el caudal filtrado al estanque.
US8465651B2 (en) 2011-03-30 2013-06-18 Crystal Lagoons (Curacao) B.V. Sustainable method and system for treating water bodies affected by bacteria and microalgae at low cost
US8454838B2 (en) 2011-03-30 2013-06-04 Crystal Lagoons (Curacao) B.V. Method and system for the sustainable cooling of industrial processes
US9470008B2 (en) 2013-12-12 2016-10-18 Crystal Lagoons (Curacao) B.V. System and method for maintaining water quality in large water bodies

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641166A (en) * 1979-09-12 1981-04-17 Denki Kagaku Kogyo Kk Manufacture of keepable food and its vessel
JPS58223561A (ja) * 1982-06-16 1983-12-26 Disco Abrasive Sys Ltd ポリツシングマシン

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641166A (en) * 1979-09-12 1981-04-17 Denki Kagaku Kogyo Kk Manufacture of keepable food and its vessel
JPS58223561A (ja) * 1982-06-16 1983-12-26 Disco Abrasive Sys Ltd ポリツシングマシン

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0258223A (ja) * 1988-08-23 1990-02-27 Mitsubishi Electric Corp 半導体装置の製造装置
JPH038432U (enrdf_load_stackoverflow) * 1989-06-12 1991-01-28
CN103935731A (zh) * 2014-04-09 2014-07-23 珠海格力电器股份有限公司 应用于流水线生产的检测装置及方法
CN111392380A (zh) * 2020-04-23 2020-07-10 王后磊 一种仓储自动化配货装置

Also Published As

Publication number Publication date
JPH0473612B2 (enrdf_load_stackoverflow) 1992-11-24

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