JPS61125043U - - Google Patents

Info

Publication number
JPS61125043U
JPS61125043U JP899085U JP899085U JPS61125043U JP S61125043 U JPS61125043 U JP S61125043U JP 899085 U JP899085 U JP 899085U JP 899085 U JP899085 U JP 899085U JP S61125043 U JPS61125043 U JP S61125043U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
holders
pairs
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP899085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543470Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985008990U priority Critical patent/JPH0543470Y2/ja
Publication of JPS61125043U publication Critical patent/JPS61125043U/ja
Application granted granted Critical
Publication of JPH0543470Y2 publication Critical patent/JPH0543470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1985008990U 1985-01-25 1985-01-25 Expired - Lifetime JPH0543470Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enrdf_load_html_response) 1985-01-25 1985-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enrdf_load_html_response) 1985-01-25 1985-01-25

Publications (2)

Publication Number Publication Date
JPS61125043U true JPS61125043U (enrdf_load_html_response) 1986-08-06
JPH0543470Y2 JPH0543470Y2 (enrdf_load_html_response) 1993-11-02

Family

ID=30488782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985008990U Expired - Lifetime JPH0543470Y2 (enrdf_load_html_response) 1985-01-25 1985-01-25

Country Status (1)

Country Link
JP (1) JPH0543470Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921020A (ja) * 1982-07-27 1984-02-02 Nippon Telegr & Teleph Corp <Ntt> 荷電ビ−ム露光装置用成形絞り

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921020A (ja) * 1982-07-27 1984-02-02 Nippon Telegr & Teleph Corp <Ntt> 荷電ビ−ム露光装置用成形絞り

Also Published As

Publication number Publication date
JPH0543470Y2 (enrdf_load_html_response) 1993-11-02

Similar Documents

Publication Publication Date Title
JPS61125043U (enrdf_load_html_response)
JPS6044194U (ja) イオン化式煙感知器の耐熱ケ−ス
JPS61199700U (enrdf_load_html_response)
JPS5833522U (ja) 方格材堰堤
JPS5894254U (ja) 電子線ホログラフイ−用光学装置
JPS58135855U (ja) 偏向ヨ−ク
JPS6136955U (ja) 電子顕微鏡等用ｘ線検出装置
JPS59129872U (ja) プラズマエツチング装置
JPS58142848U (ja) 螢光表示管
JPS58168064U (ja) 陰極線管用電子銃構体
JPS58105542U (ja) 光量分布補正装置
JPS581409U (ja) 超音波探触子
JPS63134446U (enrdf_load_html_response)
JPH01122254U (enrdf_load_html_response)
JPS5995627U (ja) 荷電粒子線装置用整形絞り
JPS58128547U (ja) 電子銃構体
JPS5985574U (ja) イオン源装置
JPS58180534U (ja) 光偏向素子
JPS5810368U (ja) 電子顕微鏡
JPS6230333U (enrdf_load_html_response)
JPS59188678U (ja) 燃料電池におけるガス分配装置
JPS6274329U (enrdf_load_html_response)
JPS59195584U (ja) 電離箱形放射線検出器
JPS5819356U (ja) 座標入力装置
JPS60192400U (ja) Ｘ線用ソ−ラ−スリツト