JPS6112395B2 - - Google Patents
Info
- Publication number
- JPS6112395B2 JPS6112395B2 JP52145260A JP14526077A JPS6112395B2 JP S6112395 B2 JPS6112395 B2 JP S6112395B2 JP 52145260 A JP52145260 A JP 52145260A JP 14526077 A JP14526077 A JP 14526077A JP S6112395 B2 JPS6112395 B2 JP S6112395B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- substrate
- oxide film
- etching
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
- H10D30/6759—Silicon-on-sapphire [SOS] substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6706—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing leakage current
Landscapes
- Drying Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14526077A JPS5477580A (en) | 1977-12-02 | 1977-12-02 | Semiconductor device and production of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14526077A JPS5477580A (en) | 1977-12-02 | 1977-12-02 | Semiconductor device and production of the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5477580A JPS5477580A (en) | 1979-06-21 |
| JPS6112395B2 true JPS6112395B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-08 |
Family
ID=15381007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14526077A Granted JPS5477580A (en) | 1977-12-02 | 1977-12-02 | Semiconductor device and production of the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5477580A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1977
- 1977-12-02 JP JP14526077A patent/JPS5477580A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5477580A (en) | 1979-06-21 |