JPS61122433A - クリ−ンドライベンチ - Google Patents

クリ−ンドライベンチ

Info

Publication number
JPS61122433A
JPS61122433A JP59242482A JP24248284A JPS61122433A JP S61122433 A JPS61122433 A JP S61122433A JP 59242482 A JP59242482 A JP 59242482A JP 24248284 A JP24248284 A JP 24248284A JP S61122433 A JPS61122433 A JP S61122433A
Authority
JP
Japan
Prior art keywords
air
clean
bench
circulation path
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59242482A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461251B2 (enrdf_load_html_response
Inventor
Takaki Yoshida
隆紀 吉田
Toshio Hayashi
利雄 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP59242482A priority Critical patent/JPS61122433A/ja
Publication of JPS61122433A publication Critical patent/JPS61122433A/ja
Publication of JPH0461251B2 publication Critical patent/JPH0461251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP59242482A 1984-11-19 1984-11-19 クリ−ンドライベンチ Granted JPS61122433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59242482A JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59242482A JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Publications (2)

Publication Number Publication Date
JPS61122433A true JPS61122433A (ja) 1986-06-10
JPH0461251B2 JPH0461251B2 (enrdf_load_html_response) 1992-09-30

Family

ID=17089741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59242482A Granted JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Country Status (1)

Country Link
JP (1) JPS61122433A (enrdf_load_html_response)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148040A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd クリ−ンベンチの清浄方法
FR2622960A1 (fr) * 1987-11-16 1989-05-12 Bardet Guy Unite de production de flux laminaire sterile a circulation verticale
JPH03106703A (ja) * 1989-09-18 1991-05-07 Daifuku Co Ltd 荷保管装置
EP1026450A4 (en) * 1997-09-24 2002-05-29 Daikin Ind Ltd APPARATUS FOR LOWERING MOISTURE
EP1269092A4 (en) * 1999-02-12 2003-06-25 Silicon Valley Group ROOM REGULATION SYSTEMS AND METHODS
JP2010007954A (ja) * 2008-06-26 2010-01-14 Toyo Eng Works Ltd 除湿空調装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477061U (enrdf_load_html_response) * 1977-11-11 1979-06-01
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
JPS5846U (ja) * 1981-06-26 1983-01-05 株式会社日立製作所 自動車電話機の照明制御装置
JPS5969919A (ja) * 1982-10-15 1984-04-20 Yamato Scient Co Ltd クリ−ンベンチの風速制御装置
JPS59135133U (ja) * 1983-02-26 1984-09-10 株式会社大氣社 隔離作業用キヤビネツト

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477061U (enrdf_load_html_response) * 1977-11-11 1979-06-01
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
JPS5846U (ja) * 1981-06-26 1983-01-05 株式会社日立製作所 自動車電話機の照明制御装置
JPS5969919A (ja) * 1982-10-15 1984-04-20 Yamato Scient Co Ltd クリ−ンベンチの風速制御装置
JPS59135133U (ja) * 1983-02-26 1984-09-10 株式会社大氣社 隔離作業用キヤビネツト

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148040A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd クリ−ンベンチの清浄方法
FR2622960A1 (fr) * 1987-11-16 1989-05-12 Bardet Guy Unite de production de flux laminaire sterile a circulation verticale
JPH03106703A (ja) * 1989-09-18 1991-05-07 Daifuku Co Ltd 荷保管装置
EP1026450A4 (en) * 1997-09-24 2002-05-29 Daikin Ind Ltd APPARATUS FOR LOWERING MOISTURE
EP1269092A4 (en) * 1999-02-12 2003-06-25 Silicon Valley Group ROOM REGULATION SYSTEMS AND METHODS
US6966364B1 (en) 1999-02-12 2005-11-22 Asml Holding N.V. Systems and methods for controlling local environment
US7389813B2 (en) 1999-02-12 2008-06-24 Asml Holding N.V. Systems and methods for controlling local environment
JP2010007954A (ja) * 2008-06-26 2010-01-14 Toyo Eng Works Ltd 除湿空調装置

Also Published As

Publication number Publication date
JPH0461251B2 (enrdf_load_html_response) 1992-09-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees