JPS6112016U - 格子干渉型変位検出装置 - Google Patents

格子干渉型変位検出装置

Info

Publication number
JPS6112016U
JPS6112016U JP9650484U JP9650484U JPS6112016U JP S6112016 U JPS6112016 U JP S6112016U JP 9650484 U JP9650484 U JP 9650484U JP 9650484 U JP9650484 U JP 9650484U JP S6112016 U JPS6112016 U JP S6112016U
Authority
JP
Japan
Prior art keywords
grating
interference type
order
type displacement
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9650484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044974Y2 (cs
Inventor
博雅 土井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP9650484U priority Critical patent/JPS6112016U/ja
Publication of JPS6112016U publication Critical patent/JPS6112016U/ja
Application granted granted Critical
Publication of JPH044974Y2 publication Critical patent/JPH044974Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP9650484U 1984-06-27 1984-06-27 格子干渉型変位検出装置 Granted JPS6112016U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9650484U JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9650484U JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Publications (2)

Publication Number Publication Date
JPS6112016U true JPS6112016U (ja) 1986-01-24
JPH044974Y2 JPH044974Y2 (cs) 1992-02-13

Family

ID=30655996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9650484U Granted JPS6112016U (ja) 1984-06-27 1984-06-27 格子干渉型変位検出装置

Country Status (1)

Country Link
JP (1) JPS6112016U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278126U (cs) * 1988-12-03 1990-06-15
JP2019515320A (ja) * 2016-05-03 2019-06-06 アルゲス ゲーエムベーハー 光学回転角測定システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5165958A (cs) * 1974-10-31 1976-06-08 Leitz Ernst Gmbh

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5165958A (cs) * 1974-10-31 1976-06-08 Leitz Ernst Gmbh

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278126U (cs) * 1988-12-03 1990-06-15
JP2019515320A (ja) * 2016-05-03 2019-06-06 アルゲス ゲーエムベーハー 光学回転角測定システム

Also Published As

Publication number Publication date
JPH044974Y2 (cs) 1992-02-13

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