JPS61119251U - - Google Patents

Info

Publication number
JPS61119251U
JPS61119251U JP189885U JP189885U JPS61119251U JP S61119251 U JPS61119251 U JP S61119251U JP 189885 U JP189885 U JP 189885U JP 189885 U JP189885 U JP 189885U JP S61119251 U JPS61119251 U JP S61119251U
Authority
JP
Japan
Prior art keywords
electrode
sample
electron beam
changing
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP189885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP189885U priority Critical patent/JPS61119251U/ja
Publication of JPS61119251U publication Critical patent/JPS61119251U/ja
Pending legal-status Critical Current

Links

JP189885U 1985-01-11 1985-01-11 Pending JPS61119251U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP189885U JPS61119251U (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP189885U JPS61119251U (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Publications (1)

Publication Number Publication Date
JPS61119251U true JPS61119251U (enrdf_load_stackoverflow) 1986-07-28

Family

ID=30475062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP189885U Pending JPS61119251U (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Country Status (1)

Country Link
JP (1) JPS61119251U (enrdf_load_stackoverflow)

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