JPS61112656U - - Google Patents
Info
- Publication number
- JPS61112656U JPS61112656U JP20010984U JP20010984U JPS61112656U JP S61112656 U JPS61112656 U JP S61112656U JP 20010984 U JP20010984 U JP 20010984U JP 20010984 U JP20010984 U JP 20010984U JP S61112656 U JPS61112656 U JP S61112656U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- utility
- cross
- section
- current density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第1図は本考案の一実施例を示す平面図、第2
図はそのZ―Z′線に沿つた断面図である。
1……ソース(主電流)電極、2……ゲート(
信号)電極、3……ボンデイングパツド部、4…
…層間絶縁膜、5……半導体基板、6……電流の
集中するAl電極部。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a sectional view taken along the Z-Z' line. 1... Source (main current) electrode, 2... Gate (
Signal) Electrode, 3... Bonding pad part, 4...
. . . interlayer insulating film, 5 . . . semiconductor substrate, 6 . . . Al electrode portion where current is concentrated.
Claims (1)
面の電流密度が1.3×105A/cm2以下にな
るように形成したことを特徴とする半導体装置。 A semiconductor device characterized in that an Al electrode on a surface of a semiconductor element is formed so that a current density in a cross section of the electrode is 1.3×10 5 A/cm 2 or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20010984U JPS61112656U (en) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20010984U JPS61112656U (en) | 1984-12-26 | 1984-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61112656U true JPS61112656U (en) | 1986-07-16 |
Family
ID=30760651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20010984U Pending JPS61112656U (en) | 1984-12-26 | 1984-12-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61112656U (en) |
-
1984
- 1984-12-26 JP JP20010984U patent/JPS61112656U/ja active Pending