JPS6111023Y2 - - Google Patents

Info

Publication number
JPS6111023Y2
JPS6111023Y2 JP14244980U JP14244980U JPS6111023Y2 JP S6111023 Y2 JPS6111023 Y2 JP S6111023Y2 JP 14244980 U JP14244980 U JP 14244980U JP 14244980 U JP14244980 U JP 14244980U JP S6111023 Y2 JPS6111023 Y2 JP S6111023Y2
Authority
JP
Japan
Prior art keywords
linear scale
scale
guide rail
dust removal
detection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14244980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5765890U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14244980U priority Critical patent/JPS6111023Y2/ja
Publication of JPS5765890U publication Critical patent/JPS5765890U/ja
Application granted granted Critical
Publication of JPS6111023Y2 publication Critical patent/JPS6111023Y2/ja
Expired legal-status Critical Current

Links

JP14244980U 1980-10-06 1980-10-06 Expired JPS6111023Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14244980U JPS6111023Y2 (ko) 1980-10-06 1980-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14244980U JPS6111023Y2 (ko) 1980-10-06 1980-10-06

Publications (2)

Publication Number Publication Date
JPS5765890U JPS5765890U (ko) 1982-04-20
JPS6111023Y2 true JPS6111023Y2 (ko) 1986-04-08

Family

ID=29502246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14244980U Expired JPS6111023Y2 (ko) 1980-10-06 1980-10-06

Country Status (1)

Country Link
JP (1) JPS6111023Y2 (ko)

Also Published As

Publication number Publication date
JPS5765890U (ko) 1982-04-20

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