JPS61105802A - サーミスタ素子の製造方法 - Google Patents
サーミスタ素子の製造方法Info
- Publication number
- JPS61105802A JPS61105802A JP22843784A JP22843784A JPS61105802A JP S61105802 A JPS61105802 A JP S61105802A JP 22843784 A JP22843784 A JP 22843784A JP 22843784 A JP22843784 A JP 22843784A JP S61105802 A JPS61105802 A JP S61105802A
- Authority
- JP
- Japan
- Prior art keywords
- thermistor
- thin film
- electrode
- thermistor element
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 14
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 229910052774 Proactinium Inorganic materials 0.000 claims 1
- 229910052770 Uranium Inorganic materials 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 239000003973 paint Substances 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 241001590997 Moolgarda engeli Species 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 229910021124 PdAg Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000012254 powdered material Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22843784A JPS61105802A (ja) | 1984-10-30 | 1984-10-30 | サーミスタ素子の製造方法 |
| US06/792,456 US4712085A (en) | 1984-10-30 | 1985-10-29 | Thermistor element and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22843784A JPS61105802A (ja) | 1984-10-30 | 1984-10-30 | サーミスタ素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61105802A true JPS61105802A (ja) | 1986-05-23 |
| JPH0344402B2 JPH0344402B2 (enrdf_load_stackoverflow) | 1991-07-05 |
Family
ID=16876473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22843784A Granted JPS61105802A (ja) | 1984-10-30 | 1984-10-30 | サーミスタ素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105802A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0291306U (enrdf_load_stackoverflow) * | 1989-01-06 | 1990-07-19 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913300A (enrdf_load_stackoverflow) * | 1972-05-17 | 1974-02-05 | ||
| JPS5228238A (en) * | 1975-08-29 | 1977-03-03 | Hitachi Ltd | Offering report circuit |
| JPS5443560A (en) * | 1977-09-12 | 1979-04-06 | Ishizuka Denshi Kk | Electrode drawing structure for thermistor |
| JPS5636102A (en) * | 1979-08-31 | 1981-04-09 | Tdk Electronics Co Ltd | Temperature detector and method of manufacturing same |
| JPS5911602A (ja) * | 1982-07-13 | 1984-01-21 | ティーディーケイ株式会社 | 負特性サ−ミスタ及びその製造方法 |
-
1984
- 1984-10-30 JP JP22843784A patent/JPS61105802A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913300A (enrdf_load_stackoverflow) * | 1972-05-17 | 1974-02-05 | ||
| JPS5228238A (en) * | 1975-08-29 | 1977-03-03 | Hitachi Ltd | Offering report circuit |
| JPS5443560A (en) * | 1977-09-12 | 1979-04-06 | Ishizuka Denshi Kk | Electrode drawing structure for thermistor |
| JPS5636102A (en) * | 1979-08-31 | 1981-04-09 | Tdk Electronics Co Ltd | Temperature detector and method of manufacturing same |
| JPS5911602A (ja) * | 1982-07-13 | 1984-01-21 | ティーディーケイ株式会社 | 負特性サ−ミスタ及びその製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0291306U (enrdf_load_stackoverflow) * | 1989-01-06 | 1990-07-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0344402B2 (enrdf_load_stackoverflow) | 1991-07-05 |
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