JPS61101467A - 窒化珪素焼結体およびその製造方法 - Google Patents

窒化珪素焼結体およびその製造方法

Info

Publication number
JPS61101467A
JPS61101467A JP59221575A JP22157584A JPS61101467A JP S61101467 A JPS61101467 A JP S61101467A JP 59221575 A JP59221575 A JP 59221575A JP 22157584 A JP22157584 A JP 22157584A JP S61101467 A JPS61101467 A JP S61101467A
Authority
JP
Japan
Prior art keywords
oxide
weight
silicon nitride
sintered body
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59221575A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343228B2 (enrdf_load_stackoverflow
Inventor
恒行 金井
竹田　幸男
飯島　史郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59221575A priority Critical patent/JPS61101467A/ja
Publication of JPS61101467A publication Critical patent/JPS61101467A/ja
Publication of JPH0343228B2 publication Critical patent/JPH0343228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP59221575A 1984-10-22 1984-10-22 窒化珪素焼結体およびその製造方法 Granted JPS61101467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221575A JPS61101467A (ja) 1984-10-22 1984-10-22 窒化珪素焼結体およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221575A JPS61101467A (ja) 1984-10-22 1984-10-22 窒化珪素焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
JPS61101467A true JPS61101467A (ja) 1986-05-20
JPH0343228B2 JPH0343228B2 (enrdf_load_stackoverflow) 1991-07-01

Family

ID=16768884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221575A Granted JPS61101467A (ja) 1984-10-22 1984-10-22 窒化珪素焼結体およびその製造方法

Country Status (1)

Country Link
JP (1) JPS61101467A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0343228B2 (enrdf_load_stackoverflow) 1991-07-01

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