JPS61100627A - 振動式歪センサ - Google Patents

振動式歪センサ

Info

Publication number
JPS61100627A
JPS61100627A JP22366684A JP22366684A JPS61100627A JP S61100627 A JPS61100627 A JP S61100627A JP 22366684 A JP22366684 A JP 22366684A JP 22366684 A JP22366684 A JP 22366684A JP S61100627 A JPS61100627 A JP S61100627A
Authority
JP
Japan
Prior art keywords
bridge
diffusion layer
strain sensor
force
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22366684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554706B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Ikeda
恭一 池田
Katsumi Isozaki
克巳 磯崎
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP22366684A priority Critical patent/JPS61100627A/ja
Publication of JPS61100627A publication Critical patent/JPS61100627A/ja
Publication of JPH0554706B2 publication Critical patent/JPH0554706B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP22366684A 1984-10-24 1984-10-24 振動式歪センサ Granted JPS61100627A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22366684A JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22366684A JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Publications (2)

Publication Number Publication Date
JPS61100627A true JPS61100627A (ja) 1986-05-19
JPH0554706B2 JPH0554706B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=16801745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22366684A Granted JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Country Status (1)

Country Link
JP (1) JPS61100627A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010008167A (ja) * 2008-06-25 2010-01-14 Toyota Motor Corp 歪み検出装置及び歪み検出方法
CN104934294A (zh) * 2014-03-18 2015-09-23 中国科学院上海微系统与信息技术研究所 一种绝缘体上应变薄膜结构及调节应变薄膜应力的方法
JPWO2021200569A1 (enrdf_load_stackoverflow) * 2020-03-31 2021-10-07

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526487A (en) * 1978-05-30 1980-02-25 Itt Pressure converter and producing same
JPS5944875A (ja) * 1982-09-06 1984-03-13 Nissan Motor Co Ltd 梁構造体を有する半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526487A (en) * 1978-05-30 1980-02-25 Itt Pressure converter and producing same
JPS5944875A (ja) * 1982-09-06 1984-03-13 Nissan Motor Co Ltd 梁構造体を有する半導体装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010008167A (ja) * 2008-06-25 2010-01-14 Toyota Motor Corp 歪み検出装置及び歪み検出方法
CN104934294A (zh) * 2014-03-18 2015-09-23 中国科学院上海微系统与信息技术研究所 一种绝缘体上应变薄膜结构及调节应变薄膜应力的方法
CN104934294B (zh) * 2014-03-18 2018-01-30 中国科学院上海微系统与信息技术研究所 一种绝缘体上应变薄膜结构及调节应变薄膜应力的方法
JPWO2021200569A1 (enrdf_load_stackoverflow) * 2020-03-31 2021-10-07

Also Published As

Publication number Publication date
JPH0554706B2 (enrdf_load_stackoverflow) 1993-08-13

Similar Documents

Publication Publication Date Title
JP3602611B2 (ja) 横型ホール素子
JPS61100627A (ja) 振動式歪センサ
US5417120A (en) Vibrating beam force transducer with automatic drive control
US6257058B1 (en) Silicon gyroscope and method of driving the same
JP2641104B2 (ja) 半導体応力センサ
JP3189259B2 (ja) 振動式トランスデューサとその製造方法
JP2789291B2 (ja) 圧力センサ
JP2871064B2 (ja) 半導体圧力センサ
JPH05187942A (ja) 振動式トランスデューサ
JPH05110368A (ja) 圧電セラミツクス矩形板の製造方法，その製造された圧電セラミツクス矩形板を用いた圧電トランス及びその圧電トランスを用いた発振回路
JPH0628662Y2 (ja) 振動形差圧センサ
JP2005090971A (ja) 磁気センサ
JP6531281B2 (ja) 加速度センサ
JPH0554705B2 (enrdf_load_stackoverflow)
JPH08162646A (ja) 力学量センサ
JPS60164367A (ja) 触覚センサ
JPS62160772A (ja) 半導体圧力センサ及び圧力測定装置
JP2748077B2 (ja) 圧力センサ
JPH06244438A (ja) シリコン半導体圧力計の製造方法
JPH0810169B2 (ja) 振動形差圧センサ
JPH0536737B2 (enrdf_load_stackoverflow)
JPS63168527A (ja) 半導体圧力変換装置
JPH0467899B2 (enrdf_load_stackoverflow)
JPH05322671A (ja) 静電駆動共振型歪検出素子及びその製造方法
JPS60113105A (ja) 振動式角速度計