JPWO2021200569A1 - - Google Patents

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Publication number
JPWO2021200569A1
JPWO2021200569A1 JP2022512078A JP2022512078A JPWO2021200569A1 JP WO2021200569 A1 JPWO2021200569 A1 JP WO2021200569A1 JP 2022512078 A JP2022512078 A JP 2022512078A JP 2022512078 A JP2022512078 A JP 2022512078A JP WO2021200569 A1 JPWO2021200569 A1 JP WO2021200569A1
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JP
Japan
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JP2022512078A
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Japanese (ja)
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JP7717052B2 (ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2022512078A 2020-03-31 2021-03-25 センサデバイスおよびその製造方法 Active JP7717052B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020063788 2020-03-31
JP2020063788 2020-03-31
PCT/JP2021/012619 WO2021200569A1 (ja) 2020-03-31 2021-03-25 センサデバイスおよびその製造方法

Publications (2)

Publication Number Publication Date
JPWO2021200569A1 true JPWO2021200569A1 (enrdf_load_stackoverflow) 2021-10-07
JP7717052B2 JP7717052B2 (ja) 2025-08-01

Family

ID=77928833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022512078A Active JP7717052B2 (ja) 2020-03-31 2021-03-25 センサデバイスおよびその製造方法

Country Status (2)

Country Link
JP (1) JP7717052B2 (enrdf_load_stackoverflow)
WO (1) WO2021200569A1 (enrdf_load_stackoverflow)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100627A (ja) * 1984-10-24 1986-05-19 Yokogawa Hokushin Electric Corp 振動式歪センサ
US20120206012A1 (en) * 2008-12-01 2012-08-16 The Trustees Of Columbia University In The City Of New York Electromechanical devices and methods for fabrication of the same
CN102862949A (zh) * 2012-09-07 2013-01-09 清华大学 基于倒置工艺的双臂梁mems器件及其形成方法
JP2013009144A (ja) * 2011-06-24 2013-01-10 Nippon Telegr & Teleph Corp <Ntt> 機械共振器
KR20130134538A (ko) * 2012-05-31 2013-12-10 연세대학교 산학협력단 성능조절이 가능한 초 고감도 그라핀 센서 및 그 제조방법
JP2015019142A (ja) * 2013-07-09 2015-01-29 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
WO2018180793A1 (ja) * 2017-03-28 2018-10-04 富士フイルム株式会社 ガス検知素子及びその製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100627A (ja) * 1984-10-24 1986-05-19 Yokogawa Hokushin Electric Corp 振動式歪センサ
US20120206012A1 (en) * 2008-12-01 2012-08-16 The Trustees Of Columbia University In The City Of New York Electromechanical devices and methods for fabrication of the same
JP2013009144A (ja) * 2011-06-24 2013-01-10 Nippon Telegr & Teleph Corp <Ntt> 機械共振器
KR20130134538A (ko) * 2012-05-31 2013-12-10 연세대학교 산학협력단 성능조절이 가능한 초 고감도 그라핀 센서 및 그 제조방법
CN102862949A (zh) * 2012-09-07 2013-01-09 清华大学 基于倒置工艺的双臂梁mems器件及其形成方法
JP2015019142A (ja) * 2013-07-09 2015-01-29 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
WO2018180793A1 (ja) * 2017-03-28 2018-10-04 富士フイルム株式会社 ガス検知素子及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ZHU ALEXANDER Y ET AL.: "Optoelectromechanical Multimodal Biosensor with Graphene active Region", NANO LETTERS, vol. 14, JPN6021017723, 2014, US, pages 5641 - 5649, XP055792254, ISSN: 0005552357, DOI: 10.1021/nl502279c *

Also Published As

Publication number Publication date
WO2021200569A1 (ja) 2021-10-07
JP7717052B2 (ja) 2025-08-01

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