JPS609709A - 薄型内周切断刃の洗浄装置および方法 - Google Patents
薄型内周切断刃の洗浄装置および方法Info
- Publication number
- JPS609709A JPS609709A JP11768383A JP11768383A JPS609709A JP S609709 A JPS609709 A JP S609709A JP 11768383 A JP11768383 A JP 11768383A JP 11768383 A JP11768383 A JP 11768383A JP S609709 A JPS609709 A JP S609709A
- Authority
- JP
- Japan
- Prior art keywords
- inner peripheral
- grinding fluid
- air
- cutting blade
- peripheral blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims 2
- 238000005406 washing Methods 0.000 title 1
- 230000002093 peripheral effect Effects 0.000 claims description 36
- 239000012530 fluid Substances 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11768383A JPS609709A (ja) | 1983-06-29 | 1983-06-29 | 薄型内周切断刃の洗浄装置および方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11768383A JPS609709A (ja) | 1983-06-29 | 1983-06-29 | 薄型内周切断刃の洗浄装置および方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS609709A true JPS609709A (ja) | 1985-01-18 |
| JPS6353928B2 JPS6353928B2 (enrdf_load_stackoverflow) | 1988-10-26 |
Family
ID=14717703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11768383A Granted JPS609709A (ja) | 1983-06-29 | 1983-06-29 | 薄型内周切断刃の洗浄装置および方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS609709A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62142613A (ja) * | 1985-12-18 | 1987-06-26 | 株式会社日立製作所 | 半導体ウェハ回収方法 |
| JPH0560809U (ja) * | 1992-01-30 | 1993-08-10 | 株式会社東京精密 | スライシングマシン |
-
1983
- 1983-06-29 JP JP11768383A patent/JPS609709A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62142613A (ja) * | 1985-12-18 | 1987-06-26 | 株式会社日立製作所 | 半導体ウェハ回収方法 |
| JPH0560809U (ja) * | 1992-01-30 | 1993-08-10 | 株式会社東京精密 | スライシングマシン |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6353928B2 (enrdf_load_stackoverflow) | 1988-10-26 |
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