JPS6095844A - イオンマイクロアナライザ - Google Patents

イオンマイクロアナライザ

Info

Publication number
JPS6095844A
JPS6095844A JP58202205A JP20220583A JPS6095844A JP S6095844 A JPS6095844 A JP S6095844A JP 58202205 A JP58202205 A JP 58202205A JP 20220583 A JP20220583 A JP 20220583A JP S6095844 A JPS6095844 A JP S6095844A
Authority
JP
Japan
Prior art keywords
sample
mesh electrode
sample holder
mesh
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58202205A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259580B2 (en, 2012
Inventor
Hiroshi Hirose
広瀬　博
Yoshio Arima
有馬　義雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58202205A priority Critical patent/JPS6095844A/ja
Publication of JPS6095844A publication Critical patent/JPS6095844A/ja
Publication of JPH0259580B2 publication Critical patent/JPH0259580B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58202205A 1983-10-28 1983-10-28 イオンマイクロアナライザ Granted JPS6095844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58202205A JPS6095844A (ja) 1983-10-28 1983-10-28 イオンマイクロアナライザ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58202205A JPS6095844A (ja) 1983-10-28 1983-10-28 イオンマイクロアナライザ

Publications (2)

Publication Number Publication Date
JPS6095844A true JPS6095844A (ja) 1985-05-29
JPH0259580B2 JPH0259580B2 (en, 2012) 1990-12-12

Family

ID=16453700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58202205A Granted JPS6095844A (ja) 1983-10-28 1983-10-28 イオンマイクロアナライザ

Country Status (1)

Country Link
JP (1) JPS6095844A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0455764U (en, 2012) * 1990-09-21 1992-05-13
JPH0650261U (ja) * 1992-01-23 1994-07-08 京セラエルコ株式会社 サーフェスマウント型ポストヘッダコネクタ

Also Published As

Publication number Publication date
JPH0259580B2 (en, 2012) 1990-12-12

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