JPS60943A - 真空連続処理装置 - Google Patents

真空連続処理装置

Info

Publication number
JPS60943A
JPS60943A JP10787283A JP10787283A JPS60943A JP S60943 A JPS60943 A JP S60943A JP 10787283 A JP10787283 A JP 10787283A JP 10787283 A JP10787283 A JP 10787283A JP S60943 A JPS60943 A JP S60943A
Authority
JP
Japan
Prior art keywords
ripple
vacuum
elastic body
preliminary
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10787283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455213B2 (enrdf_load_stackoverflow
Inventor
Susumu Ueno
進 上野
Koichi Kuroda
黒田　幸一
Hajime Kitamura
肇 北村
Masaya Tokai
東海　正家
Kenichi Kato
健一 加藤
Nobuyuki Hiraishi
平石　信行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP10787283A priority Critical patent/JPS60943A/ja
Publication of JPS60943A publication Critical patent/JPS60943A/ja
Publication of JPH0455213B2 publication Critical patent/JPH0455213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP10787283A 1983-06-17 1983-06-17 真空連続処理装置 Granted JPS60943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10787283A JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10787283A JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Publications (2)

Publication Number Publication Date
JPS60943A true JPS60943A (ja) 1985-01-07
JPH0455213B2 JPH0455213B2 (enrdf_load_stackoverflow) 1992-09-02

Family

ID=14470221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10787283A Granted JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Country Status (1)

Country Link
JP (1) JPS60943A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3339291A1 (de) * 1982-10-30 1984-05-03 Osaka Soda Co. Ltd., Osaka Diallylterephthalatcopolymeres

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57195740A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous vacuum treatment apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57195740A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous vacuum treatment apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3339291A1 (de) * 1982-10-30 1984-05-03 Osaka Soda Co. Ltd., Osaka Diallylterephthalatcopolymeres

Also Published As

Publication number Publication date
JPH0455213B2 (enrdf_load_stackoverflow) 1992-09-02

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