JPS6090893A - 単結晶性酸化物薄膜の製造方法 - Google Patents

単結晶性酸化物薄膜の製造方法

Info

Publication number
JPS6090893A
JPS6090893A JP58197517A JP19751783A JPS6090893A JP S6090893 A JPS6090893 A JP S6090893A JP 58197517 A JP58197517 A JP 58197517A JP 19751783 A JP19751783 A JP 19751783A JP S6090893 A JPS6090893 A JP S6090893A
Authority
JP
Japan
Prior art keywords
thin film
oxide
target
sputtering
single crystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58197517A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253480B2 (OSRAM
Inventor
Takashi Inukai
犬飼　隆
Yoshikazu Hidaka
日高　義和
Toshiaki Murakami
敏明 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP58197517A priority Critical patent/JPS6090893A/ja
Publication of JPS6090893A publication Critical patent/JPS6090893A/ja
Publication of JPS6253480B2 publication Critical patent/JPS6253480B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/32—Titanates; Germanates; Molybdates; Tungstates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58197517A 1983-10-24 1983-10-24 単結晶性酸化物薄膜の製造方法 Granted JPS6090893A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58197517A JPS6090893A (ja) 1983-10-24 1983-10-24 単結晶性酸化物薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58197517A JPS6090893A (ja) 1983-10-24 1983-10-24 単結晶性酸化物薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6090893A true JPS6090893A (ja) 1985-05-22
JPS6253480B2 JPS6253480B2 (OSRAM) 1987-11-10

Family

ID=16375777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58197517A Granted JPS6090893A (ja) 1983-10-24 1983-10-24 単結晶性酸化物薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6090893A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296001A (ja) * 1987-05-28 1988-12-02 Toshinori Takagi 光学結晶性膜
JP2003045527A (ja) * 2001-07-26 2003-02-14 Kyocera Elco Corp Ｆｐｃ／ｆｆｃ用コネクタ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296001A (ja) * 1987-05-28 1988-12-02 Toshinori Takagi 光学結晶性膜
JP2003045527A (ja) * 2001-07-26 2003-02-14 Kyocera Elco Corp Ｆｐｃ／ｆｆｃ用コネクタ

Also Published As

Publication number Publication date
JPS6253480B2 (OSRAM) 1987-11-10

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