JPS6089049A - 高電圧部材の着脱装置 - Google Patents

高電圧部材の着脱装置

Info

Publication number
JPS6089049A
JPS6089049A JP58197434A JP19743483A JPS6089049A JP S6089049 A JPS6089049 A JP S6089049A JP 58197434 A JP58197434 A JP 58197434A JP 19743483 A JP19743483 A JP 19743483A JP S6089049 A JPS6089049 A JP S6089049A
Authority
JP
Japan
Prior art keywords
bushing
insulating
electron gun
insulation
high voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58197434A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129303B2 (enrdf_load_stackoverflow
Inventor
Shoji Kato
正二 加藤
Tadao Koyama
小山　忠男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58197434A priority Critical patent/JPS6089049A/ja
Publication of JPS6089049A publication Critical patent/JPS6089049A/ja
Publication of JPH0129303B2 publication Critical patent/JPH0129303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Insulators (AREA)
JP58197434A 1983-10-21 1983-10-21 高電圧部材の着脱装置 Granted JPS6089049A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58197434A JPS6089049A (ja) 1983-10-21 1983-10-21 高電圧部材の着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58197434A JPS6089049A (ja) 1983-10-21 1983-10-21 高電圧部材の着脱装置

Publications (2)

Publication Number Publication Date
JPS6089049A true JPS6089049A (ja) 1985-05-18
JPH0129303B2 JPH0129303B2 (enrdf_load_stackoverflow) 1989-06-09

Family

ID=16374444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58197434A Granted JPS6089049A (ja) 1983-10-21 1983-10-21 高電圧部材の着脱装置

Country Status (1)

Country Link
JP (1) JPS6089049A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271861U (enrdf_load_stackoverflow) * 1985-10-25 1987-05-08
JP2011124041A (ja) * 2009-12-09 2011-06-23 Swcc Showa Cable Systems Co Ltd ブッシング及びブッシングの接続部
JP2018066700A (ja) * 2016-10-21 2018-04-26 岩崎電気株式会社 電子線照射装置
EP3817028A4 (en) * 2018-06-28 2022-01-19 Hitachi High-Tech Corporation Charged particle beam generation device and charged particle beam device
JP2023146659A (ja) * 2022-03-29 2023-10-12 日本電子株式会社 荷電粒子線源および荷電粒子線装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271861U (enrdf_load_stackoverflow) * 1985-10-25 1987-05-08
JP2011124041A (ja) * 2009-12-09 2011-06-23 Swcc Showa Cable Systems Co Ltd ブッシング及びブッシングの接続部
JP2018066700A (ja) * 2016-10-21 2018-04-26 岩崎電気株式会社 電子線照射装置
EP3817028A4 (en) * 2018-06-28 2022-01-19 Hitachi High-Tech Corporation Charged particle beam generation device and charged particle beam device
JP2023146659A (ja) * 2022-03-29 2023-10-12 日本電子株式会社 荷電粒子線源および荷電粒子線装置

Also Published As

Publication number Publication date
JPH0129303B2 (enrdf_load_stackoverflow) 1989-06-09

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