JPS6089049A - Device for attaching and detaching high voltage member - Google Patents
Device for attaching and detaching high voltage memberInfo
- Publication number
- JPS6089049A JPS6089049A JP58197434A JP19743483A JPS6089049A JP S6089049 A JPS6089049 A JP S6089049A JP 58197434 A JP58197434 A JP 58197434A JP 19743483 A JP19743483 A JP 19743483A JP S6089049 A JPS6089049 A JP S6089049A
- Authority
- JP
- Japan
- Prior art keywords
- bushing
- electron gun
- insulating
- epoxy resin
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims abstract description 6
- 230000005684 electric field Effects 0.000 claims description 15
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 239000003822 epoxy resin Substances 0.000 abstract description 14
- 229920000647 polyepoxide Polymers 0.000 abstract description 14
- 229920001971 elastomer Polymers 0.000 abstract description 10
- 239000002245 particle Substances 0.000 abstract description 5
- 229920005989 resin Polymers 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 238000009413 insulation Methods 0.000 description 23
- 230000001133 acceleration Effects 0.000 description 7
- 230000002040 relaxant effect Effects 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000004945 silicone rubber Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920005177 Duracon® POM Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Insulators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、荷電粒子線装置等の高電圧が印加される装置
における高電圧部材の着脱装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a device for attaching and detaching a high voltage member in a device to which a high voltage is applied, such as a charged particle beam device.
電子顕微鏡等の荷電粒子線装置においては、高電圧の印
加される電子銃やイオン源とその電源とを保守や輸送等
の便宜のために空間的に分離し、電子銃と電源との間を
着脱可能な可撓製の絶縁ケーブルで結ぶようにしている
。In charged particle beam devices such as electron microscopes, the electron gun or ion source to which high voltage is applied and its power source are spatially separated for convenience of maintenance and transportation, and the distance between the electron gun and the power source is separated. It is connected with a detachable flexible insulated cable.
第1図は、従来の電子顕微鏡における電子銃近傍を示す
断面図であり、図中1は鏡筒上端部に形成される電子銃
室を示す。電子銃室の下方中心には、電子線を加速する
ための多段加速電極を有する加速管2が配置され、その
上部開口には一200KV程度の高電圧が印加されるカ
ソードやグリッド等からなる電子銃電極部3が気密を保
って挿入されており、加速管2の内部は真空に保たれて
いる。加速管2と鏡筒側壁の間の空間には1.5気圧程
度のフレオンガスが充填されており、加速管2や電子銃
電極部3と接地電位に保たれる鏡筒側壁との絶縁を保つ
ようにしている。加速管2の上部には電子銃電極部3を
保持するための筒状の受け具4が取付けられており、そ
の側壁には鏡筒の側壁を貫通する絶縁交換棒5の先端の
高電圧部材、即ち絶縁ケーブル7の端子6と接続するソ
ケット(図示せず)が形成されている。絶縁交換棒5の
受け具として114状のブッシング8が受け具6と鏡筒
側壁との間に設けられており、ブッシング材としては比
較的剛性に富んだエポキシ樹脂等の絶縁材が用いられる
。ブッシング8の低電位側と高電位側には側壁に形成さ
れた電界緩和リング9と受【ノ具4の側面に取付けられ
た電界緩和リング10が接続する。電子銃電極部3の上
部は比較的剛性に富んだジュラコンからなる補強材11
によって蓋体12に取付られており、補強材11の周り
の比較的弾性に富んだシリコンゴムからなる絶縁部材1
3は絶縁交換棒として漏斗状のブッシング14と嵌合す
る。ブッシング14はエポキシ樹脂等の絶縁材からなり
その低電位側と高電位側の端面は夫々蓋体12の電界緩
和リング15と受け具4の電界緩和リング16に接して
いる。尚、蓋体12の下面及び電子銃電極部3の上部に
形成された突起17及び18は、電界緩和のためのもの
である。FIG. 1 is a cross-sectional view showing the vicinity of an electron gun in a conventional electron microscope, and 1 in the figure indicates an electron gun chamber formed at the upper end of the lens barrel. At the center of the lower part of the electron gun chamber, an acceleration tube 2 having multistage acceleration electrodes for accelerating the electron beam is arranged, and an electron beam consisting of a cathode, a grid, etc., to which a high voltage of about 200 KV is applied to the upper opening of the tube 2 is arranged. The gun electrode section 3 is inserted in an airtight manner, and the inside of the acceleration tube 2 is kept in a vacuum. The space between the acceleration tube 2 and the side wall of the lens barrel is filled with Freon gas at a pressure of about 1.5 atmospheres to maintain insulation between the acceleration tube 2 and the electron gun electrode section 3 and the side wall of the lens barrel, which is kept at ground potential. That's what I do. A cylindrical holder 4 for holding an electron gun electrode part 3 is attached to the top of the acceleration tube 2, and a high voltage member at the tip of an insulating exchange rod 5 that penetrates the side wall of the lens barrel is attached to the side wall of the cylindrical holder 4. That is, a socket (not shown) is formed to connect with the terminal 6 of the insulated cable 7. A 114-shaped bushing 8 is provided as a holder for the insulation exchange rod 5 between the holder 6 and the lens barrel side wall, and an insulating material such as epoxy resin, which is relatively rigid, is used as the bushing material. An electric field relaxation ring 9 formed on the side wall and an electric field relaxation ring 10 attached to the side surface of the socket 4 are connected to the low potential side and the high potential side of the bushing 8. The upper part of the electron gun electrode part 3 is made of a reinforcing material 11 made of Duracon, which has relatively high rigidity.
The insulating member 1 is attached to the lid body 12 by the insulating member 1 made of relatively elastic silicone rubber around the reinforcing member 11.
3 fits into a funnel-shaped bushing 14 as an insulation exchange rod. The bushing 14 is made of an insulating material such as epoxy resin, and its low potential side and high potential side end faces are in contact with the electric field relaxing ring 15 of the lid 12 and the electric field relaxing ring 16 of the receiver 4, respectively. Note that the protrusions 17 and 18 formed on the lower surface of the lid 12 and the upper part of the electron gun electrode section 3 are for relaxing the electric field.
このような構成の電子銃においては、絶縁交換棒5の押
え具(図示せず)を解除して絶縁交換棒5を鏡筒側壁か
ら引抜くことによって、きわめて簡単に電子銃とその電
源との結合を切離すことが可能であり、電子銃部3にお
けるフィラメントカソードの交換を行うためには、加速
管3内の真空をリークした後に、蓋体12を上部へ引き
上げることによって電子銃部3を容易に大気側に取出す
ことができる。しかし乍ら、電子銃部に印加する電圧を
一200KV程度から一400KV程度に増加させよう
とすると、以下のような問題が生じる。In an electron gun having such a configuration, the electron gun and its power source can be connected very easily by releasing the holding device (not shown) of the insulation replacement rod 5 and pulling out the insulation replacement rod 5 from the side wall of the lens barrel. It is possible to separate the bond, and in order to replace the filament cathode in the electron gun section 3, after leaking the vacuum inside the acceleration tube 3, the electron gun section 3 is removed by pulling the lid 12 upward. It can be easily taken out to the atmosphere. However, when attempting to increase the voltage applied to the electron gun section from about 1,200 KV to about 1,400 KV, the following problems arise.
(1)ブッシングと絶縁交換棒との嵌合部の密着を良く
するためには、テーパ一部の仕上げ精度を上げなければ
ならず、その製造が格段に難しくなる。(1) In order to improve the close contact between the fitting portion of the bushing and the insulation replacement rod, it is necessary to improve the finishing accuracy of the taper part, which makes manufacturing thereof much more difficult.
(2)ブッシング8や14と電界緩和リングとの接触面
に間隙ができると絶縁耐圧が著しく低下するので接触面
に導電性塗料等を塗布しているが、それでも完全に密着
させることは難しい。(2) If a gap is formed between the contact surface between the bushing 8 or 14 and the electric field relaxation ring, the dielectric strength will drop significantly, so conductive paint or the like is applied to the contact surface, but it is still difficult to achieve complete contact.
(3)絶縁交換棒としてEPゴムを使用した場合には、
EPゴムの経年変化による劣化が早いため3−
短期間に交換Jる必要が生じる。この交換は、絶縁ケー
ブルを含めて行なわなければならず、かなり面倒で費用
を要する作業となる。(3) When using EP rubber as the insulation replacement rod,
Because EP rubber deteriorates quickly over time, it becomes necessary to replace it within a short period of time. This replacement must include the insulated cable, which is a rather cumbersome and expensive operation.
(4)絶縁交換棒としてシリコンゴムを使用した場合に
は、ブッシングとの嵌合面に塗布するシリコングリース
とシリコンゴムとは親和性があるため経年変化による絶
縁交換棒の交換が必要となる。(4) If silicone rubber is used as the insulation replacement rod, the silicone grease applied to the fitting surface with the bushing has an affinity with the silicone rubber, so the insulation replacement rod will need to be replaced due to aging.
本発明は、このような欠点を解決して簡単な構造で高い
絶縁性を有する高電圧部材の着脱装置を提供することを
目的どするもので、低電位にある基体に取付けられた漏
ミI状の絶縁ブッシングに嵌合する絶縁挿入棒の先端に
高電圧部材を取付けた装置において、前記絶縁挿入棒と
ブッシングとの間に漏)i状に形成され比較的弾性に富
んだ絶縁スペーサを介して前記絶縁挿入棒とブッシング
とを嵌合させると共に、前記ブッシングの低電位側と高
電位側端面に接触する電界緩和リングを有する導電性部
材を前記ブッシングを構成する比較的剛性に富んだ絶縁
材で一体成形としたことを特徴とするものである。SUMMARY OF THE INVENTION The present invention aims to solve these drawbacks and provide a device for attaching and detaching high-voltage members with a simple structure and high insulation properties. In a device in which a high voltage member is attached to the tip of an insulating insertion rod that fits into a shaped insulating bushing, an insulating spacer formed in an i-shape and having relatively high elasticity is inserted between the insulating insertion rod and the bushing. The insulating insertion rod and the bushing are fitted together, and a conductive member having an electric field relaxation ring that contacts the low-potential side and high-potential side end surfaces of the bushing is connected to a relatively rigid insulating material constituting the bushing. It is characterized by being integrally molded.
4−
第2図は、本発明を電子銃電極部の着脱部分に適用した
もので、図面中箱1図と同一符号を付したものは同一構
成要素を示している。第2図の装置の大きな特徴は、ブ
ッシング19を構成するエポキシ樹脂によってブッシン
グ自体とその両端の電界緩和リング15及び16を有す
る導電性の部材20及び21とが一体成形されている点
である。4- In FIG. 2, the present invention is applied to the attachment/detachment part of the electron gun electrode section, and the same reference numerals as in the box 1 diagram in the drawing indicate the same components. A major feature of the device shown in FIG. 2 is that the bushing 19 is integrally formed with the epoxy resin and the conductive members 20 and 21 having electric field relaxation rings 15 and 16 at both ends thereof.
このように形成することによって、エポキシ樹脂と電界
緩和リングの間に間隙が成形されるようなことがなくな
るため、第1図の装置に比較して絶縁耐圧を高めること
ができる。又、蓋体12と電子銃電極部3もエポキシ樹
脂からなる絶縁交換棒22によって一体成形されている
ため、絶縁交換棒22と蓋体12及び電子銃電極部3と
の絶縁耐圧も高めることができる。しかし乍ら、このよ
うに絶縁交換棒22とブッシング19とを比較的剛性の
高いエポキシ樹脂で構成しているため両者をそのまま嵌
合させたときの密着度を高めることはできない。そこで
第2図の装置においては、ブッシング19と絶縁交換棒
22の間に漏斗状のEPゴムからなる絶縁スペーサ23
を介して両者を嵌合するようにしている。このように構
成することにより、絶縁交換棒22を蓋体12の上から
押圧するようにすれば、ブッシング19との間の間隙の
発生を容易に防ぐことができ高い絶縁耐圧を得ることが
可能となる。By forming the device in this manner, a gap is not formed between the epoxy resin and the electric field relaxation ring, so that the dielectric strength can be increased compared to the device shown in FIG. In addition, since the lid body 12 and the electron gun electrode part 3 are also integrally molded by the insulation replacement rod 22 made of epoxy resin, the dielectric strength voltage between the insulation replacement rod 22, the lid body 12, and the electron gun electrode part 3 can also be increased. can. However, since the insulation exchange rod 22 and the bushing 19 are made of a relatively rigid epoxy resin, it is not possible to increase the degree of adhesion when the two are fitted together as is. Therefore, in the device shown in FIG. 2, a funnel-shaped insulating spacer 23 made of EP rubber is placed between the bushing 19 and the insulation exchange rod 22.
The two are fitted together through. With this configuration, by pressing the insulation exchange rod 22 from above the lid 12, it is possible to easily prevent a gap from forming between the insulation exchange rod 22 and the bushing 19, and to obtain a high dielectric strength voltage. becomes.
第3図は本発明を電子銃と絶縁ケーブル端末との着脱部
分に適用した実施例を示すもので、第2図の場合と同様
に、第1図と同一符号を付したものは同一の構成要素を
表わしている。第3図の装置においては、ケーブル7の
端には取付は金具24を介してエポキシ樹脂からなる絶
縁交換棒25が取fJ4プられ、その中心部には導電性
パイプ26が埋め込まれている。導電性パイプ26の内
部にはケーブル7の芯線と接続された導線が通っており
交換棒の先端に取付けられた端末端子26の各端子を介
して電子銃電極部の各電極に接続される。FIG. 3 shows an embodiment in which the present invention is applied to the attachment/detachment part between an electron gun and an insulated cable terminal. As in the case of FIG. 2, the same reference numerals as in FIG. 1 have the same structure. represents an element. In the apparatus shown in FIG. 3, an insulation replacement rod 25 made of epoxy resin is attached to the end of the cable 7 via a metal fitting 24, and a conductive pipe 26 is embedded in the center thereof. Conductive wires connected to the core wire of the cable 7 run inside the conductive pipe 26, and are connected to the respective electrodes of the electron gun electrode section through the respective terminals of the terminal terminal 26 attached to the tip of the exchange rod.
これらエポキシ樹脂と接触する各部材は全てエポキシ樹
脂によって一体に成形されており、従来のようにEPゴ
ムを使用していた場合に比較して経年変化は極めて少な
い。絶縁交換棒25を受ける側のブッシング27はエポ
キシ樹脂によって形成され、該エポキシ樹脂によってそ
の低圧側に設けられる電界緩和リング9を有する部材2
8と高圧側に設けられる電界緩和リング10を有するケ
ーブル受は金具29と一体に成形されている。又、絶縁
交換棒25とブッシング27との間には漏斗状のEPゴ
ム製の絶縁スペーサ30が挿入されており、絶縁交換棒
25とブッシング27との嵌合部分に間隙が発生しない
ようにしている。All of the members that come into contact with the epoxy resin are integrally molded from the epoxy resin, and their deterioration over time is extremely small compared to when EP rubber is used as in the past. The bushing 27 on the side receiving the insulation exchange rod 25 is made of epoxy resin, and the member 2 has an electric field relaxation ring 9 provided on its low voltage side by the epoxy resin.
8 and an electric field relaxation ring 10 provided on the high voltage side, the cable receiver is integrally molded with the metal fitting 29. Furthermore, a funnel-shaped insulating spacer 30 made of EP rubber is inserted between the insulation exchange rod 25 and the bushing 27 to prevent a gap from occurring at the fitting portion of the insulation exchange rod 25 and the bushing 27. There is.
以上のように本発明装置においては、絶縁交換棒とブッ
シングのテーパ一部分の工作情痕が多少低くても高い密
着度で両者を嵌合させることが可能となり高電圧部材の
交換機構における絶縁耐圧を高めて前述した欠点(1)
を解決することができる。又、電界緩和リングと接触す
る絶縁材と電界緩和リングとは一体成形されるため微小
間隙が発生することはなく、前述した欠点(2)は解決
される。所で、上述した実施例装置においては絶縁交換
棒とブッシングとの間に挿入する弾性に富7−
んだE l)ゴムを使用しており、このEPゴムは経年
変化によって劣化するが、劣化した場合にはFPゴムの
スペーりのみを交換すればよいので、交換に要する手間
も費用も殆んど問題となることはない。As described above, in the device of the present invention, it is possible to fit the insulation exchange rod and the bushing with a high degree of adhesion even if the machining pattern of the tapered part of the bushing is somewhat low, thereby increasing the dielectric strength in the high voltage member exchange mechanism. Disadvantages mentioned above (1)
can be solved. Further, since the insulating material that contacts the electric field relaxation ring and the electric field relaxation ring are integrally molded, no minute gaps are generated, and the above-mentioned drawback (2) is solved. By the way, in the above-mentioned embodiment device, a highly elastic EP rubber is used which is inserted between the insulation exchange rod and the bushing, and this EP rubber deteriorates over time, but the In such a case, only the FP rubber spacer needs to be replaced, so the time and cost required for replacement will hardly be a problem.
以上のように本発明により、簡単な構成で高電圧部材の
交換機構に、おける絶縁耐圧を高めることが可能となる
ので、電子顕微鏡等の粒子線装置の性能向上に大きな効
果が発揮される。As described above, the present invention makes it possible to increase the dielectric strength of the high-voltage member exchange mechanism with a simple configuration, and therefore has a great effect on improving the performance of particle beam devices such as electron microscopes.
第1図は従来の電子顕微鏡における電子銃の断面図、第
2図及び第3図は本発明に基づ〈実施例装置を示す略図
である。
1:電子銃室、2:加速管、3:電子銃電極部、4:受
は部、5,13.22.26:絶縁交換棒、6:端子、
7:絶縁ケーブル、8.14.19゜27:ブッシング
、9.10.15,16:電界緩和リング、23,30
:絶縁スペー9゜8−
第1図FIG. 1 is a sectional view of an electron gun in a conventional electron microscope, and FIGS. 2 and 3 are schematic diagrams showing an embodiment of the apparatus according to the present invention. 1: Electron gun chamber, 2: Accelerator tube, 3: Electron gun electrode section, 4: Receiving section, 5, 13.22.26: Insulation exchange rod, 6: Terminal,
7: Insulated cable, 8.14.19° 27: Bushing, 9.10.15, 16: Electric field relaxation ring, 23, 30
: Insulating space 9゜8- Figure 1
Claims (1)
グに嵌合する絶縁挿入棒の先端に高電圧部材を取付けた
装置において、前記絶縁挿入棒とブッシングとの間に漏
斗状に形成され比較的弾性に富んだ絶縁スペーサを介し
て前記絶縁挿入棒とブッシングとを嵌合させると共に、
前記ブッシングの低電位側と高電位側端面に接触する電
界緩和リングを有する導電性部材を前記ブッシングを構
成する比較的剛性に富んだ絶縁材で一体成形としたこと
を特徴とする高電圧部材の着脱装置。In a device in which a high voltage member is attached to the tip of an insulating insertion rod that fits into a funnel-shaped insulating bushing attached to a base at a low potential, a funnel-shaped member is formed between the insulating insertion rod and the bushing and a relatively Fitting the insulating insertion rod and the bushing via a highly elastic insulating spacer,
A high-voltage member characterized in that a conductive member having an electric field relaxation ring that contacts the low-potential side and high-potential side end faces of the bushing is integrally molded with a relatively rigid insulating material that constitutes the bushing. Attachment and detachment device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197434A JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197434A JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6089049A true JPS6089049A (en) | 1985-05-18 |
JPH0129303B2 JPH0129303B2 (en) | 1989-06-09 |
Family
ID=16374444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58197434A Granted JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6089049A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6271861U (en) * | 1985-10-25 | 1987-05-08 | ||
JP2011124041A (en) * | 2009-12-09 | 2011-06-23 | Swcc Showa Cable Systems Co Ltd | Bushing, and connection part of bushing |
JP2018066700A (en) * | 2016-10-21 | 2018-04-26 | 岩崎電気株式会社 | Electron beam irradiation device |
EP3817028A4 (en) * | 2018-06-28 | 2022-01-19 | Hitachi High-Tech Corporation | Charged particle beam generation device and charged particle beam device |
-
1983
- 1983-10-21 JP JP58197434A patent/JPS6089049A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6271861U (en) * | 1985-10-25 | 1987-05-08 | ||
JP2011124041A (en) * | 2009-12-09 | 2011-06-23 | Swcc Showa Cable Systems Co Ltd | Bushing, and connection part of bushing |
JP2018066700A (en) * | 2016-10-21 | 2018-04-26 | 岩崎電気株式会社 | Electron beam irradiation device |
EP3817028A4 (en) * | 2018-06-28 | 2022-01-19 | Hitachi High-Tech Corporation | Charged particle beam generation device and charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
JPH0129303B2 (en) | 1989-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2011087461A (en) | Open-air cable sealing end | |
JPS6089049A (en) | Device for attaching and detaching high voltage member | |
JP2898658B2 (en) | Multi-stage charged particle beam accelerator | |
CN108631083B (en) | Socket for receiving a plug of a high-voltage cable of a micro-focusing roentgen tube | |
US4703234A (en) | Charged-particle accelerator | |
EP0487025A1 (en) | Power electrical cable plug | |
US5059859A (en) | Charged particle beam generating apparatus of multi-stage acceleration type | |
US3911306A (en) | High-voltage vacuum tube, notably an X-ray tube, comprising a metal sleeve | |
JPH0754775B2 (en) | Device for connecting high voltage lead-out cables to high voltage transformers without high voltage lead-out cables | |
JP2003016987A (en) | Schottky electron gun and electron beam device | |
GB1562513A (en) | X-ray generator | |
US2847595A (en) | Spring contact high voltage connector | |
JP2744818B2 (en) | Electron beam generator | |
US3870393A (en) | Corona-free top cap terminal assembly for electron discharge devices | |
US2141387A (en) | Electron discharge device | |
US5134339A (en) | High-voltage lead-through for particle-beam apparatus | |
JP2889872B1 (en) | electronic microscope | |
JPS6240495Y2 (en) | ||
US2017647A (en) | Electron discharge device | |
US2857589A (en) | Adaptor device for image tubes | |
JPS6328517Y2 (en) | ||
SU904054A1 (en) | Gas-filled discharger | |
JP2020024839A (en) | Vacuum switch and manufacturing method therefor | |
GB2119291A (en) | Insulator for an electrostatic precipitator | |
JP3481129B2 (en) | Socket mounting structure to oil tank |