JPH0129303B2 - - Google Patents
Info
- Publication number
- JPH0129303B2 JPH0129303B2 JP58197434A JP19743483A JPH0129303B2 JP H0129303 B2 JPH0129303 B2 JP H0129303B2 JP 58197434 A JP58197434 A JP 58197434A JP 19743483 A JP19743483 A JP 19743483A JP H0129303 B2 JPH0129303 B2 JP H0129303B2
- Authority
- JP
- Japan
- Prior art keywords
- bushing
- insulating
- insulation
- electron gun
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 description 24
- 239000003822 epoxy resin Substances 0.000 description 11
- 229920000647 polyepoxide Polymers 0.000 description 11
- 229920001971 elastomer Polymers 0.000 description 8
- 230000001133 acceleration Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 3
- 230000002040 relaxant effect Effects 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000004945 silicone rubber Substances 0.000 description 3
- 239000012779 reinforcing material Substances 0.000 description 2
- 229920005177 Duracon® POM Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Insulators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】
本発明は、荷電粒子線装置等の高電圧が印加さ
れる装置における高電圧部材の着脱装置の改良に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a device for attaching and detaching a high voltage member in a device to which a high voltage is applied, such as a charged particle beam device.
電子顕微鏡等の荷電粒子線装置においては、高
電圧の印加される電子銃やイオン源とその電源と
を保守や輸送等の便宜のために空間的に分離し、
電子銃と電源との間を着脱可能な可撓製の絶縁ケ
ーブルで結ぶようにしている。 In charged particle beam devices such as electron microscopes, the electron gun or ion source to which high voltage is applied and its power source are spatially separated for convenience of maintenance and transportation.
The electron gun and the power source are connected by a detachable flexible insulated cable.
第１図は、従来の電子顕微鏡における電子銃近
傍を示す断面図であり、図中１は鏡筒上端部に形
成される電子銃室を示す。電子銃室の下方中心に
は、電子線を加速するための多段加速電極を有す
る加速管２が配置され、その上部開口には−
200KV程度の高電圧が印加されるカソードやグ
リツド等からなる電子銃電極部３が気密を保つて
挿入されており、加速管２の内部は真空に保たれ
ている。加速管２と鏡筒側壁の間の空間には1.5
気圧程度のフレオンガスが充填されており、加速
管２や電子銃電極部３と接地電位に保たれる鏡筒
側壁との絶縁を保つようにしている。加速管２の
上部には電子銃電極部３を保持するための筒状の
受け具４が取付けられており、その側壁には鏡筒
の側壁を貫通する絶縁交換棒５の先端の高電圧部
材、即ち絶縁ケーブル７の端子６と接続するソケ
ツト（図示せず）が形成されている。絶縁交換棒
５の受け具として漏斗状のブツシング８が受け具
６と鏡筒側壁との間に設けられており、ブツシン
グ材としては比較的剛性に富んだエポキシ樹脂等
の絶縁材が用いられる。ブツシング８の低電位側
と高電位側には側壁に形成された電界緩和リング
９と受け具４の側面に取付けられた電界緩和リン
グ１０が接続する。電子銃電極部３の上部は比較
的剛性に富んだジユラコンからなる補強材１１に
よつて蓋体１２に取付られており、補強材１１の
周りの比較的弾性に富んだシリコンゴムからなる
絶縁部材１３は絶縁交換棒として漏斗状のブツシ
ング１４と嵌合する。ブツシング１４はエポキシ
樹脂等の絶縁材からなりその低電位側と高電位側
の端面は夫々蓋体１２の電界緩和リング１５と受
け具４の電界緩和リング１６に接している。尚、
蓋体１２の下面及び電子銃電極部３の上部に形成
された突起１７及び１８は、電界緩和のためのも
のである。 FIG. 1 is a cross-sectional view showing the vicinity of an electron gun in a conventional electron microscope, and 1 in the figure indicates an electron gun chamber formed at the upper end of the lens barrel. At the center of the lower part of the electron gun chamber, an acceleration tube 2 having multi-stage acceleration electrodes for accelerating the electron beam is arranged, and its upper opening is -
An electron gun electrode section 3 consisting of a cathode, grid, etc. to which a high voltage of about 200 KV is applied is inserted in an airtight manner, and the inside of the accelerating tube 2 is kept in a vacuum. 1.5 in the space between the acceleration tube 2 and the lens barrel side wall.
It is filled with Freon gas at about atmospheric pressure to maintain insulation between the accelerator tube 2 and the electron gun electrode section 3 and the side wall of the lens barrel, which is kept at ground potential. A cylindrical holder 4 for holding an electron gun electrode part 3 is attached to the top of the acceleration tube 2, and a high voltage member at the tip of an insulating exchange rod 5 that penetrates the side wall of the lens barrel is attached to the side wall of the cylindrical holder 4. That is, a socket (not shown) is formed to connect with the terminal 6 of the insulated cable 7. A funnel-shaped bushing 8 is provided as a holder for the insulation exchange rod 5 between the holder 6 and the lens barrel side wall, and an insulating material such as epoxy resin, which is relatively rigid, is used as the bushing material. An electric field relaxation ring 9 formed on the side wall and an electric field relaxation ring 10 attached to the side surface of the receiver 4 are connected to the low potential side and the high potential side of the bushing 8. The upper part of the electron gun electrode section 3 is attached to the lid body 12 by a reinforcing material 11 made of relatively rigid DURACON, and an insulating member made of relatively elastic silicone rubber around the reinforcing material 11. 13 is fitted with a funnel-shaped bushing 14 as an insulation exchange rod. The bushing 14 is made of an insulating material such as epoxy resin, and its low potential side and high potential side end faces are in contact with the electric field relaxing ring 15 of the lid 12 and the electric field relaxing ring 16 of the receiver 4, respectively. still,
Protrusions 17 and 18 formed on the lower surface of the lid 12 and the upper part of the electron gun electrode section 3 are for relaxing the electric field.
このような構成の電子銃においては、絶縁交換
棒５の押え具（図示せず）を解除して絶縁交換棒
５を鏡筒側壁から引抜くことによつて、きわめて
簡単に電子銃とその電源との結合を切離すことが
可能であり、電子銃部３におけるフイラメントカ
ソードの交換を行うためには、加速管３内の真空
をリークした後に、蓋体１２を上部へ引き上げる
ことによつて電子銃部３を容易に大気側に取出す
ことができる。しかし乍ら、電子銃部に印加する
電圧を−200KV程度から−400KV程度に増加さ
せようとすると、以下のような問題が生じる。 In an electron gun having such a configuration, the electron gun and its power supply can be removed very easily by releasing the holding device (not shown) of the insulation replacement rod 5 and pulling the insulation replacement rod 5 out of the side wall of the lens barrel. In order to replace the filament cathode in the electron gun section 3, after leaking the vacuum inside the acceleration tube 3, the electron The gun section 3 can be easily taken out to the atmosphere. However, when attempting to increase the voltage applied to the electron gun section from about -200 KV to about -400 KV, the following problems arise.
(1) ブツシングと絶縁交換棒との嵌合部の密着を
良くするためには、テーパー部の仕上げ精度を
上げなければならず、その製造が格段に難しく
なる。(1) In order to improve the adhesion of the fitting part between the bushing and the insulation replacement rod, the finishing accuracy of the tapered part must be improved, which makes manufacturing it much more difficult.
(2) ブツシング８や１４と電界緩和リングとの接
触面に間隙ができると絶縁耐圧が著しく低下す
るので接触面に導電性塗料等を塗布している
が、それでも完全に密着させることは難しい。(2) If there is a gap between the contact surfaces between the bushings 8 and 14 and the electric field relaxation ring, the dielectric strength will drop significantly, so conductive paint or the like is applied to the contact surfaces, but it is still difficult to achieve complete contact.
(3) 絶縁交換棒としてEPゴムを使用した場合に
は、EPゴムの経年変化による劣化が早いため、
短期間に交換する必要が生じる。この交換は、
絶縁ケーブルを含めて行なわなければならず、
かなり面倒で費用を要する作業となる。(3) When using EP rubber as an insulation replacement rod, EP rubber deteriorates quickly over time.
It will be necessary to replace it in a short period of time. This exchange is
must be carried out including insulated cables,
This is quite a tedious and expensive task.
(4) 絶縁交換棒としてシリコンゴムを使用した場
合には、ブツシングとの嵌合面に塗布するシリ
コングリースとシリコンゴムとは親和性がある
ため経年変化による絶縁交換棒の交換が必要と
なる。(4) If silicone rubber is used as the insulation replacement rod, the silicone grease applied to the mating surface with the bushing has an affinity with the silicone rubber, so the insulation replacement rod will need to be replaced due to aging.
本発明は、このような欠点を解決して簡単な構
造で高い絶縁性を有する高電圧部材の着脱装置を
提供することを目的とするもので、低電位にある
基体に取付けられた漏斗状の絶縁ブツシングに嵌
合する絶縁挿入棒の先端に高電圧部材を取付けた
装置において、前記絶縁挿入棒とブツシングとの
間に漏斗状に形成され比較的弾性に富んだ絶縁ス
ペーサを介して前記絶縁挿入棒とブツシングとを
嵌合させると共に、前記ブツシングの低電位側と
高電位側端面に接触する電界緩和リングを有する
導電性部材を前記ブツシングを構成する比較的剛
性に富んだ絶縁材で一体成形としたことを特徴と
するものである。 The present invention aims to solve these drawbacks and provide a high voltage member attachment/detachment device having a simple structure and high insulation properties. In a device in which a high voltage member is attached to the tip of an insulating insertion rod that fits into an insulating bushing, the insulation is inserted through an insulating spacer formed in a funnel shape and having relatively high elasticity between the insulating insertion rod and the bushing. The rod and the bushing are fitted together, and a conductive member having an electric field relaxation ring that contacts the end faces of the low potential side and the high potential side of the bushing is integrally molded with the relatively rigid insulating material that constitutes the bushing. It is characterized by the fact that
第２図は、本発明を電子銃電極部の着脱部分に
適用したもので、図面中第１図と同一符号を付し
たものは同一構成要素を示している。第２図の装
置の大きな特徴は、ブツシング１９を構成するエ
ポキシ樹脂によつてブツシング自体とその両端の
電界緩和リング１５及び１６を有する導電性の部
材２０及び２１とが一体成形されている点であ
る。このように形成することによつて、エポキシ
樹脂と電界緩和リングの間に間隙が成形されるよ
うなことがなくなるため、第１図の装置に比較し
て絶縁耐圧を高めることができる。又、蓋体１２
と電子銃電極部３もエポキシ樹脂からなる絶縁交
換棒２２によつて一体成形されているため、絶縁
交換棒２２と蓋体１２及び電子銃電極部３との絶
縁耐圧も高めることができる。しかし乍ら、この
ように絶縁交換棒２２とブツシング１９とを比較
的剛性の高いエポキシ樹脂で構成しているため両
者をそのまま嵌合させたときの密着度を高めるこ
とはできない。そこで第２図の装置においては、
ブツシング１９と絶縁交換棒２２の間に漏斗状の
EPゴムからなる絶縁スペーサ２３を介して両者
を嵌合するようにしている。このように構成する
ことにより、絶縁交換棒２２を蓋体１２の上から
押圧するようにすれば、ブツシング１９との間の
間隙の発生を容易に防ぐことができ高い絶縁耐圧
を得ることが可能となる。 FIG. 2 shows the present invention applied to the attachment/detachment part of the electron gun electrode section, and the same reference numerals as in FIG. 1 indicate the same components. A major feature of the device shown in FIG. 2 is that the bushing 19 is integrally formed with the epoxy resin and the conductive members 20 and 21 having electric field relaxation rings 15 and 16 at both ends thereof. be. By forming the ring in this manner, no gap is formed between the epoxy resin and the electric field relaxation ring, so that the dielectric strength can be increased compared to the device shown in FIG. Moreover, the lid body 12
Since the electron gun electrode section 3 is also integrally molded with the insulation exchange rod 22 made of epoxy resin, the dielectric strength between the insulation exchange rod 22, the lid body 12, and the electron gun electrode section 3 can also be increased. However, since the insulation exchange rod 22 and the bushing 19 are made of a relatively rigid epoxy resin, it is not possible to increase the degree of adhesion when the two are fitted together as is. Therefore, in the device shown in Figure 2,
A funnel-shaped hole is inserted between the bushing 19 and the insulation exchange rod 22.
Both are fitted through an insulating spacer 23 made of EP rubber. With this configuration, by pressing the insulation exchange rod 22 from above the lid 12, it is possible to easily prevent a gap from forming between the insulation exchange rod 22 and the bushing 19, and to obtain a high dielectric strength voltage. becomes.
第３図は本発明を電子銃と絶縁ケーブル端末と
の着脱部分に適用した実施例を示すもので、第２
図の場合と同様に、第１図と同一符号を付したも
のは同一の構成要素を表わしている。第３図の装
置においては、ケーブル７の端には取付け金具２
４を介してエポキシ樹脂からなる絶縁交換棒２５
が取付けられ、その中心部には導電性パイプ２６
が埋め込まれている。導電性パイプ２６の内部に
はケーブル７の芯線と接続された導線が通つてお
り交換棒の先端に取付けられた端末端子２６の各
端子を介して電子銃電極部の各電極に接続され
る。これらエポキシ樹脂と接触する各部材は全て
エポキシ樹脂によつて一体に成形されており、従
来のようにEPゴムを使用していた場合に比較し
て経年変化は極めて少ない。絶縁交換棒２５を受
ける側のブツシング２７はエポキシ樹脂によつて
形成され、該エポキシ樹脂によつてその低圧側に
設けられる電界緩和リング９を有する部材２８と
高圧側に設けられる電界緩和リング１０を有する
ケーブル受け金具２９と一体に成形されている。
又、絶縁交換棒２５とブツシング２７との間には
漏斗状のEPゴム製の絶縁スペーサ３０が挿入さ
れており、絶縁交換棒２５とブツシング２７との
嵌合部分に間隙が発生しないようにしている。 FIG. 3 shows an embodiment in which the present invention is applied to the attachment/detachment part between an electron gun and an insulated cable terminal.
As in the case of the figures, the same reference numerals as in FIG. 1 represent the same components. In the device shown in FIG. 3, the end of the cable 7 has a mounting bracket 2
Insulation exchange rod 25 made of epoxy resin through 4
is attached, and a conductive pipe 26 is attached to its center.
is embedded. Conductive wires connected to the core wire of the cable 7 run inside the conductive pipe 26, and are connected to the respective electrodes of the electron gun electrode section through the respective terminals of the terminal terminal 26 attached to the tip of the exchange rod. All of these parts that come into contact with the epoxy resin are integrally molded from the epoxy resin, and their deterioration over time is extremely small compared to when EP rubber is used as in the past. The bushing 27 on the side that receives the insulation exchange rod 25 is made of epoxy resin, and the epoxy resin is used to form a member 28 having an electric field relaxation ring 9 provided on the low voltage side and an electric field relaxation ring 10 provided on the high voltage side. It is molded integrally with the cable receiving fitting 29.
Further, a funnel-shaped insulating spacer 30 made of EP rubber is inserted between the insulation exchange rod 25 and the bushing 27 to prevent a gap from occurring at the fitting portion of the insulation exchange rod 25 and the bushing 27. There is.
以上のように本発明装置においては、絶縁交換
棒とブツシングのテーパー部分の工作精度が多少
低くても高い密着度で両者を嵌合させることが可
能となり高電圧部材の交換機構における絶縁耐圧
を高めて前述した欠点(1)を解決することができ
る。又、電界緩和リングと接触する絶縁材と電界
緩和リングとは一体成形されるため微小間隙が発
生することはなく、前述した欠点(2)は解決され
る。所で、上述した実施例装置においては絶縁交
換棒とブツシングとの間に挿入する弾性に富んだ
EPゴムを使用しており、このEPゴムは経年変化
によつて劣化するが、劣化した場合にはEPゴム
のスペーサのみを交換すればよいので、交換に要
する手間も費用も殆んど問題となることはない。 As described above, in the device of the present invention, even if the machining accuracy of the tapered part of the insulation exchange rod and the bushing is somewhat low, it is possible to fit them together with a high degree of adhesion, thereby increasing the dielectric strength of the high voltage member exchange mechanism. Thus, the above-mentioned drawback (1) can be solved. Further, since the insulating material that contacts the electric field relaxation ring and the electric field relaxation ring are integrally molded, no minute gaps are generated, and the above-mentioned drawback (2) is solved. By the way, in the above-described embodiment device, a highly elastic material inserted between the insulation exchange rod and the bushing is
EP rubber is used, and this EP rubber deteriorates over time, but when it deteriorates, only the EP rubber spacer needs to be replaced, so the time and cost required for replacement are almost non-existent. It won't happen.
以上のように本発明により、簡単な構成で高電
圧部材の交換機構における絶縁耐圧を高めること
が可能となるので、電子顕微鏡等の粒子線装置の
性能向上に大きな効果が発揮される。 As described above, the present invention makes it possible to increase the dielectric strength of the high-voltage member exchange mechanism with a simple configuration, and therefore has a great effect on improving the performance of particle beam devices such as electron microscopes.
第１図は従来の電子顕微鏡における電子銃の断
面図、第２図及び第３図は本発明に基づく実施例
装置を示す略図である。
１：電子銃室、２：加速管、３：電子銃電極
部、４：受け部、５，１３，２２，２６：絶縁交
換棒、６：端子、７：絶縁ケーブル、８，１４，
１９，２７：ブツシング、９，１０，１５，１
６：電界緩和リング、２３，３０：絶縁スペー
サ。
FIG. 1 is a sectional view of an electron gun in a conventional electron microscope, and FIGS. 2 and 3 are schematic diagrams showing an embodiment of the apparatus according to the present invention. 1: Electron gun chamber, 2: Accelerator tube, 3: Electron gun electrode section, 4: Receiving section, 5, 13, 22, 26: Insulation exchange rod, 6: Terminal, 7: Insulated cable, 8, 14,
19,27: Bushing, 9,10,15,1
6: Electric field relaxation ring, 23, 30: Insulating spacer.
Claims (1)
縁ブツシングに嵌合する絶縁挿入棒の先端に高電
圧部材を取付けた装置において、前記絶縁挿入棒
とブツシングとの間に漏斗状に形成され比較的弾
性に富んだ絶縁スペーサを介して前記絶縁挿入棒
とブツシングとを嵌合させると共に、前記ブツシ
ングの低電位側と高電位側端面に接触する電界緩
和リングを有する導電性部材を前記ブツシングを
構成する比較的剛性に富んだ絶縁材で一体成形と
したことを特徴とする高電圧部材の着脱装置。1 In a device in which a high voltage member is attached to the tip of an insulating insertion rod that fits into a funnel-shaped insulating bushing attached to a base at a low potential, a funnel-shaped member is formed between the insulating insertion rod and the bushing. The insulating insertion rod and the bushing are fitted through an insulating spacer with high elasticity, and the bushing is configured with a conductive member having an electric field relaxation ring that contacts the end faces of the low potential side and the high potential side of the bushing. A high voltage member attachment/detachment device characterized by being integrally molded with a relatively rigid insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58197434A JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58197434A JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6089049A JPS6089049A (en) | 1985-05-18 |
| JPH0129303B2 true JPH0129303B2 (en) | 1989-06-09 |
Family
ID=16374444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58197434A Granted JPS6089049A (en) | 1983-10-21 | 1983-10-21 | Device for attaching and detaching high voltage member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6089049A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6271861U (en) * | 1985-10-25 | 1987-05-08 | ||
| JP5191474B2 (en) * | 2009-12-09 | 2013-05-08 | 昭和電線ケーブルシステム株式会社 | Bushing and bushing connection |
| JP6451716B2 (en) * | 2016-10-21 | 2019-01-16 | 岩崎電気株式会社 | Electron beam irradiation device |
| WO2020003428A1 (en) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | Charged particle beam generation device and charged particle beam device |
-
1983
- 1983-10-21 JP JP58197434A patent/JPS6089049A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6089049A (en) | 1985-05-18 |
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