JPH0129303B2 - - Google Patents
Info
- Publication number
- JPH0129303B2 JPH0129303B2 JP58197434A JP19743483A JPH0129303B2 JP H0129303 B2 JPH0129303 B2 JP H0129303B2 JP 58197434 A JP58197434 A JP 58197434A JP 19743483 A JP19743483 A JP 19743483A JP H0129303 B2 JPH0129303 B2 JP H0129303B2
- Authority
- JP
- Japan
- Prior art keywords
- bushing
- insulating
- insulation
- electron gun
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 description 24
- 239000003822 epoxy resin Substances 0.000 description 11
- 229920000647 polyepoxide Polymers 0.000 description 11
- 229920001971 elastomer Polymers 0.000 description 8
- 230000001133 acceleration Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 3
- 230000002040 relaxant effect Effects 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000004945 silicone rubber Substances 0.000 description 3
- 239000012779 reinforcing material Substances 0.000 description 2
- 229920005177 Duracon® POM Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Insulators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197434A JPS6089049A (ja) | 1983-10-21 | 1983-10-21 | 高電圧部材の着脱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197434A JPS6089049A (ja) | 1983-10-21 | 1983-10-21 | 高電圧部材の着脱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6089049A JPS6089049A (ja) | 1985-05-18 |
JPH0129303B2 true JPH0129303B2 (enrdf_load_stackoverflow) | 1989-06-09 |
Family
ID=16374444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58197434A Granted JPS6089049A (ja) | 1983-10-21 | 1983-10-21 | 高電圧部材の着脱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6089049A (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6271861U (enrdf_load_stackoverflow) * | 1985-10-25 | 1987-05-08 | ||
JP5191474B2 (ja) * | 2009-12-09 | 2013-05-08 | 昭和電線ケーブルシステム株式会社 | ブッシング及びブッシングの接続部 |
JP6451716B2 (ja) * | 2016-10-21 | 2019-01-16 | 岩崎電気株式会社 | 電子線照射装置 |
US11139139B2 (en) * | 2018-06-28 | 2021-10-05 | Hitaclii High-Tech Corporation | Charged particle beam generator and charged particle beam apparatus |
JP7502359B2 (ja) * | 2022-03-29 | 2024-06-18 | 日本電子株式会社 | 荷電粒子線源および荷電粒子線装置 |
-
1983
- 1983-10-21 JP JP58197434A patent/JPS6089049A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6089049A (ja) | 1985-05-18 |
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