JPS6088955A - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS6088955A
JPS6088955A JP58196117A JP19611783A JPS6088955A JP S6088955 A JPS6088955 A JP S6088955A JP 58196117 A JP58196117 A JP 58196117A JP 19611783 A JP19611783 A JP 19611783A JP S6088955 A JPS6088955 A JP S6088955A
Authority
JP
Japan
Prior art keywords
plasma cvd
mandrel
drum
mandrels
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58196117A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114998B2 (enrdf_load_stackoverflow
Inventor
Ko Yasui
安井　甲
Kazuaki Hokota
和晃 鉾田
Minoru Koyama
稔 小山
Kiju Mori
森　喜重
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP58196117A priority Critical patent/JPS6088955A/ja
Publication of JPS6088955A publication Critical patent/JPS6088955A/ja
Publication of JPH0114998B2 publication Critical patent/JPH0114998B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08278—Depositing methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP58196117A 1983-10-21 1983-10-21 プラズマｃｖｄ装置 Granted JPS6088955A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58196117A JPS6088955A (ja) 1983-10-21 1983-10-21 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58196117A JPS6088955A (ja) 1983-10-21 1983-10-21 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6088955A true JPS6088955A (ja) 1985-05-18
JPH0114998B2 JPH0114998B2 (enrdf_load_stackoverflow) 1989-03-15

Family

ID=16352520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58196117A Granted JPS6088955A (ja) 1983-10-21 1983-10-21 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6088955A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242424A (ja) * 2010-05-14 2011-12-01 Canon Inc 電子写真感光体の製造装置
CN104607343A (zh) * 2014-12-31 2015-05-13 湖州中科天宏新材料科技有限公司 电热膜板的反应釜式生产方法及反应釜

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52122471A (en) * 1976-03-22 1977-10-14 Rca Corp Schottky barier semiconductor device
JPS5328871A (en) * 1976-08-30 1978-03-17 Komatsu Ltd Device for transmitting rotary drive of tool for machine tool
JPS57185971A (en) * 1981-05-11 1982-11-16 Oki Electric Ind Co Ltd Formation of glow discharge film
JPS5852648A (ja) * 1981-09-24 1983-03-28 Fuji Electric Co Ltd 電子写真用感光体
JPS5889943A (ja) * 1981-11-26 1983-05-28 Canon Inc プラズマｃｖｄ法
JPS58101735A (ja) * 1981-12-11 1983-06-17 Canon Inc プラズマｃｖｄ装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52122471A (en) * 1976-03-22 1977-10-14 Rca Corp Schottky barier semiconductor device
JPS5328871A (en) * 1976-08-30 1978-03-17 Komatsu Ltd Device for transmitting rotary drive of tool for machine tool
JPS57185971A (en) * 1981-05-11 1982-11-16 Oki Electric Ind Co Ltd Formation of glow discharge film
JPS5852648A (ja) * 1981-09-24 1983-03-28 Fuji Electric Co Ltd 電子写真用感光体
JPS5889943A (ja) * 1981-11-26 1983-05-28 Canon Inc プラズマｃｖｄ法
JPS58101735A (ja) * 1981-12-11 1983-06-17 Canon Inc プラズマｃｖｄ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242424A (ja) * 2010-05-14 2011-12-01 Canon Inc 電子写真感光体の製造装置
CN104607343A (zh) * 2014-12-31 2015-05-13 湖州中科天宏新材料科技有限公司 电热膜板的反应釜式生产方法及反应釜

Also Published As

Publication number Publication date
JPH0114998B2 (enrdf_load_stackoverflow) 1989-03-15

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