JPS608801A - ブレ−ズド格子の形成方法 - Google Patents

ブレ−ズド格子の形成方法

Info

Publication number
JPS608801A
JPS608801A JP11613983A JP11613983A JPS608801A JP S608801 A JPS608801 A JP S608801A JP 11613983 A JP11613983 A JP 11613983A JP 11613983 A JP11613983 A JP 11613983A JP S608801 A JPS608801 A JP S608801A
Authority
JP
Japan
Prior art keywords
substrate
grating
mask
ion
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11613983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318681B2 (enExample
Inventor
Kazuhiro Kosuge
小菅　和弘
Nobuo Nishida
西田　信夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP11613983A priority Critical patent/JPS608801A/ja
Publication of JPS608801A publication Critical patent/JPS608801A/ja
Publication of JPH0318681B2 publication Critical patent/JPH0318681B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP11613983A 1983-06-29 1983-06-29 ブレ−ズド格子の形成方法 Granted JPS608801A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11613983A JPS608801A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11613983A JPS608801A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の形成方法

Publications (2)

Publication Number Publication Date
JPS608801A true JPS608801A (ja) 1985-01-17
JPH0318681B2 JPH0318681B2 (enExample) 1991-03-13

Family

ID=14679697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11613983A Granted JPS608801A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の形成方法

Country Status (1)

Country Link
JP (1) JPS608801A (enExample)

Also Published As

Publication number Publication date
JPH0318681B2 (enExample) 1991-03-13

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