JPS6085700A - Ultrasonic probe and its manufacturing method - Google Patents
Ultrasonic probe and its manufacturing methodInfo
- Publication number
- JPS6085700A JPS6085700A JP58192415A JP19241583A JPS6085700A JP S6085700 A JPS6085700 A JP S6085700A JP 58192415 A JP58192415 A JP 58192415A JP 19241583 A JP19241583 A JP 19241583A JP S6085700 A JPS6085700 A JP S6085700A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- composite material
- electrode
- composite
- sphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000002131 composite material Substances 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000007493 shaping process Methods 0.000 claims abstract description 4
- 239000011368 organic material Substances 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 239000011347 resin Substances 0.000 abstract description 5
- 229920005989 resin Polymers 0.000 abstract description 5
- 238000007650 screen-printing Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000012856 packing Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は超音波診断装置に係り、特にそのセンサー部に
好適な複合材料を用いた超音波探触子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an ultrasonic diagnostic apparatus, and particularly to an ultrasonic probe using a suitable composite material in its sensor portion.
第１図（ｂ）は、従来の機械走査方式の探触子の一例で
ある。これには第１図（ａ）に示す予め凹面に形成され
た振動子１が用いられる。まず上下面に市（領１０２，
１０３を有する凹面振動子１０１に信号線１０４をハン
ダ付などで電極付１ｏ５し、支持台１０６に接着された
音波吸収体（バンキング材）１０７に１０１’ｅ接着し
、７−スａ−ｉ ｏ ｓ ２ｔｆｆｌ付１０９し、タン
グステン粉末などを混合した樹脂を接着後、機械研磨、
あるいはスペーサを用いてタングステン粉末など全混合
した樹脂分流し込むとｂうような方法によシ、振動子前
面に音響整合１４１１０ ’に形成している。このとき
従来では、凹面振動子としてＰＺＴやＰｂＴｊＯ３など
の無機圧電材料が用いられているため、あらかじめ金型
など才用い焼成して所定形状の振動子を作らねばならな
かった。したがって非常に手間がかかシ、また焼成時の
変形のため所疋形状に仕上けることも困難で８つだ。こ
のように、従来の無機圧電材料では、凹面あるいは凸面
などの任意の形状の探触子を（（４成することには種々
の困難が伴なった。FIG. 1(b) is an example of a conventional mechanical scanning type probe. For this purpose, a vibrator 1 shown in FIG. 1(a), which is previously formed into a concave surface, is used. First, the city (territory 102,
Electrodes are attached to the signal line 104 by soldering or the like to the concave vibrator 101 having 103, and 101'e is adhered to the sound wave absorber (banking material) 107 adhered to the support base 106, and 7-s ai o 109 with s2tffl attached, and after gluing resin mixed with tungsten powder etc., mechanical polishing,
Alternatively, an acoustic matching 14110' is formed on the front surface of the vibrator by using a spacer and pouring a fully mixed resin such as tungsten powder. Conventionally, inorganic piezoelectric materials such as PZT and PbTjO3 have been used as the concave vibrator, so the vibrator in a predetermined shape had to be made in advance by firing using a mold or the like. Therefore, it is extremely time-consuming and difficult to finish in the desired shape due to deformation during firing. As described above, with conventional inorganic piezoelectric materials, various difficulties were encountered in forming a probe with an arbitrary shape such as a concave or convex surface.
さらに、上記従来の探触子では撮動子の音響インピーダ
ンスが高いので、これを１氏下させるために撮動子１０
１に多数の切断溝を設け、これに有機換金充填した伯青
造とすることが考えられる。ところがこのような多数の
切断溝は平行な方向に切シ込むのは容易でも撮動子１０
１の曲率半径を通る方向に切ｐ込むことは困難である。Furthermore, in the conventional probe described above, the acoustic impedance of the camera element is high, so in order to lower this by 1 degree, the camera element
It is conceivable to provide Hakuseizo with a large number of cutting grooves in 1 and fill them with organic conversion. However, although it is easy to cut such a large number of cutting grooves in parallel directions, the camera element 10
It is difficult to cut in a direction passing through a radius of curvature of 1.
よって切断された個々の振動子は＋ｌ＆々に形状すなわ
ち境界条件が異な９、全体として所望パターンの超音波
ビームが１蓮られないとの欠点を有する。Therefore, the cut individual transducers have different shapes, that is, boundary conditions9, and the disadvantage is that an ultrasonic beam of a desired pattern cannot be produced as a whole.
本発明の目的は、音響インピーダンスが低く、かつ任意
の曲面に形成しても探触子全体から所望の超音波ビーム
が得られる超音波探触子を提供することにある。An object of the present invention is to provide an ultrasonic probe that has low acoustic impedance and can obtain a desired ultrasonic beam from the entire probe even when formed into an arbitrary curved surface.
本発明の他の目的は、任意の曲面を持つ高性能の探触子
を爾イｎ度に、かつ容易に得る製造方法を提供するＫあ
る。Another object of the present invention is to provide a method of manufacturing a high-performance probe having an arbitrary curved surface in a new and easy manner.
本発明で対象としている超音波複合材料の構成を第２図
に示す。２０１はｐｚ’ｒｓるいはＰｂＴｉＯ３などの
柱状圧電体であり、２０２はシリコンゴムなどの樹脂で
ある。FIG. 2 shows the structure of the ultrasonic composite material targeted by the present invention. 201 is a columnar piezoelectric material such as pz'rs or PbTiO3, and 202 is a resin such as silicone rubber.
この複合材料の加工方法を第３図に示す。第３図（ａ）
の平板状の圧４体３０１ｉ、、加熱により軟らかくなる
接着剤（ワックス）３０２で切断用台３０３に仮接着す
る。次に（ｂ）のようにマトリックス状に切断して多数
の切断溝３０４を設は柱状圧電体３０５ｆ：作る。次に
（Ｃ）に示すように切断溝に樹脂３０６を充填硬化させ
た後、切断用台からはがすと第２図の複合材料が得られ
る。この形式の複合材料は、用いる振動子材質、切＠溝
幅、切断間隔、切断溝に充填する有機物の性質などを変
えることで、種々の性質を持つ複合羽村を形成すること
がｐＪ’ｊ＋旨である。すなわち、音響インピーダンス
が１戊く、かつｔｌｌ ｌＡ＋＞ｉ個結合係数が高いと
いう超音波探触子材料として好適な１生質を持ち、さら
に有機物として軟らかい材料を用いることでフレキシブ
ルな複合材料を実現することが可能でめる。The method for processing this composite material is shown in FIG. Figure 3(a)
The flat plate-shaped pressure body 301i is temporarily adhered to the cutting table 303 with an adhesive (wax) 302 that becomes soft when heated. Next, as shown in (b), a large number of cutting grooves 304 are formed by cutting into a matrix shape to form a columnar piezoelectric body 305f. Next, as shown in (C), the cutting grooves are filled with resin 306 and cured, and then removed from the cutting table to obtain the composite material shown in FIG. 2. With this type of composite material, it is possible to form composite hamura with various properties by changing the vibrator material used, the width of the cut @ groove, the cutting interval, the properties of the organic material filled in the cut groove, etc. It is. In other words, it has properties suitable as an ultrasonic probe material, such as an acoustic impedance of 1 and a high coupling coefficient of tll lA+>i, and furthermore, by using a soft organic material, a flexible composite material is realized. It is possible to do so.
本発明は、このような複合材料を任意の曲面に整形して
探触子を得るもので、同一形状の多数の柱状圧電体が任
意の曲面上に配列されることにより、高１生能の探触子
が得られる。The present invention obtains a probe by shaping such a composite material into an arbitrary curved surface, and by arranging a large number of columnar piezoelectric bodies of the same shape on an arbitrary curved surface, it is possible to obtain a probe with high productivity. A probe is obtained.
以下、本発明の一実施例を第４図により説明する。この
汐りでは、第１図のような円形の凹面探触子を作る場せ
金示す。まず（ａ）のように内診の複合材料４０１を作
る。これは第２図で示した方法により得ることができる
。または第２図のように矩形で３うれば、端を切シ離す
ことで円に近くできる。An embodiment of the present invention will be described below with reference to FIG. This paper shows a mock-up for making a circular concave probe as shown in Figure 1. First, a composite material 401 for internal examination is prepared as shown in (a). This can be obtained by the method shown in FIG. Alternatively, if you make 3 rectangles as shown in Figure 2, you can make it more like a circle by cutting off the ends.
また第３図３０１として円形の振動子を用いれば、円形
の複合制料を得ることが可能である。ここで４０２はＰ
ＺＴ、ＰｂＴｉ０ａなどの無機圧電材料より成る柱状圧
電体４０３は切断溝に充填されたフレキシブルな有機物
でろる。次に断面図第４図（ｂ）に示すように、所塑の
凹面と同一の曲率半径の球４０４に、熱で軟らかくなる
耐脂（ワックスなど）４０５で４０１をづ産着する。４
０１はフレキシブルである泥めどのような曲面にも接着
することかり能である。次にスクリーン印刷１，４着な
どによりｔに極４０６を形成する。次に信号線４０７を
導電ペーストなどで４０４と接続し、断面図（Ｃ）に示
すようにバンキング材４０８を形成する。このとき４０
７は４０８を形成するときに用いられた接着剤で固定さ
れている。次にノＪ１熱して４０４を取シ去り、４０１
の前面４０９を洗浄すれば第４図（ｄ）の状態となる。Furthermore, if a circular vibrator is used as 301 in FIG. 3, it is possible to obtain a circular composite control. Here 402 is P
The columnar piezoelectric body 403 made of an inorganic piezoelectric material such as ZT or PbTi0a is filled with a flexible organic substance filled in the cutting groove. Next, as shown in the cross-sectional view of FIG. 4(b), a ball 401 having the same radius of curvature as the concave surface of the desired plastic is covered with a greaseproof material (such as wax) 405 that becomes soft with heat. 4
01 is flexible and can be bonded to any curved surface. Next, a pole 406 is formed at t by screen printing 1st and 4th coats. Next, the signal line 407 is connected to the signal line 404 using a conductive paste or the like, and a banking material 408 is formed as shown in the cross-sectional view (C). At this time 40
7 is fixed with the adhesive used when forming 408. Next, heat J1, remove 404, and remove 401.
If the front surface 409 of the front surface 409 is cleaned, the state shown in FIG. 4(d) will be obtained.
次に１所面図第４図（ｄ）に示すように４０９にスクリ
ーン印刷、蒸着などの方法によシ准極４１０を形成する
。４１０はこの例ではアース側市価となる。次にアース
線４１１と４１０を接続する。しかしこの１までは４１
０がはがれる可能性が太きい。そこで４１０を保護する
効果を持つ）摸４１２を前面に形成する。このようにし
て第４図（ｆ）Ｖこ示す凹面探触子が作られる。Next, as shown in FIG. 4(d), a quasi electrode 410 is formed at 409 by a method such as screen printing or vapor deposition. In this example, 410 is the market price on the ground side. Next, ground wires 411 and 410 are connected. But up to this one it was 41
There is a high possibility that 0 will come off. Therefore, a pattern 412 (which has the effect of protecting 410) is formed on the front surface. In this way, the concave probe shown in FIG. 4(f)V is produced.
同じようにして凸面の探触子を作ることも可能である。It is also possible to make a convex probe in the same way.
そのときは、４０−４の球の代シに、凹面の舌ｔ＋［＋
いれば良い。このようにフレキシブルな複合拐料を用い
ることで、どのような形状の探触子も作ることが可能で
ある。In that case, the concave tongue t+[+
It's fine if you have it. By using such flexible composite materials, probes of any shape can be made.
また円形の凹面探触子を作る場合、第４図（ａ）のよう
に円形の複合材料から始めて行ったが、４０１が第２図
のような矩形の複合材料でめってもかまわない。すなわ
ち、１１ｇ４図（２）におけるように、４０４に接着し
た後、スクリーン印刷、蒸着などにより円形の＋ｔ＋１
＜を形成することも可能である。In addition, when making a circular concave probe, we started with a circular composite material as shown in FIG. 4(a), but 401 may be a rectangular composite material as shown in FIG. 2. That is, as shown in Figure 11g4 (2), after adhering to 404, a circular +t+1 is formed by screen printing, vapor deposition, etc.
It is also possible to form <.
第５図ｔま、円形の電極を形成する際の実施例を、複合
材料の真上から示している。すなわち５０１は無機圧電
材料、５０２はフレキシブルな有機物である。このとき
、柱状圧電体の中心５０３が有１幾物の中心５０４を中
心として円形の電極を形成するととが望ましい。な−Ｗ
なら５０３を中心にすｔしば５０５，５０４ｆ、中心に
すれば５０６というようにほぼ対象な１ａ極を形成する
ことが可能であり、したがって、超音波ビームの対象性
がほぼ保たれる。一方、それ以外の点たとえば５０７で
あれば５０８のようになシ非対象な電極となるため、超
音波ビームも非対象になり、探触子としての性能が悪く
なる。さらに、スクリーン印刷、蒸着などの方法によシ
、複合材料に同心円状の電極を形成すれば、複数成極リ
ングの探触子も作ることが可能である。なおアース側の
電極は、くい違−が生じないように反対側の直棒パター
ンよｐ大きく形成することが望ましい。FIG. 5T shows an example of forming a circular electrode from directly above the composite material. That is, 501 is an inorganic piezoelectric material, and 502 is a flexible organic material. At this time, it is preferable to form a circular electrode with the center 503 of the columnar piezoelectric body as the center and the center 504 of the shape. Na-W
Then, it is possible to form substantially symmetrical poles 1a such as 505, 504f if 503 is the center, and 506 if the center is 503, and therefore the symmetry of the ultrasonic beam is almost maintained. On the other hand, if the other point is 507, for example, the electrode becomes asymmetrical like 508, so the ultrasonic beam also becomes asymmetrical, and the performance as a probe deteriorates. Furthermore, if concentric electrodes are formed on a composite material by a method such as screen printing or vapor deposition, a probe with multiple polarization rings can be made. Note that it is desirable that the electrode on the ground side be formed larger by p than the straight bar pattern on the opposite side so as to avoid any discrepancy.
さらにこの方法を発展させれば、どのような電極形状を
有する探触子を作ることも可能である。If this method is further developed, it is possible to create probes with any electrode shape.
第４図（ｂ） 、 （Ｃ）において４０６のように４極
を形成した後、バンキング材を接着したが、このときの
バンキング材との接着を接着性のある導成ペーストで行
うことも可能であう、このときは作業がより簡単になる
。In Fig. 4(b) and (C), after forming four poles as shown in 406, the banking material was bonded, but it is also possible to bond the banking material at this time with a conductive paste with adhesive properties. Well, in this case the work becomes easier.
また、このままでは上下の電極が短絡する可能性がある
。その場合には複合材料の側面に絶縁物を形成すれば良
い。第６図はその列であシ、複合材料４０１全球４０４
にワックスなど４０５で接着した後、側面に絶縁物６０
１を形成した後、電極４０６を作った状態ヲ示している
。このようにすることで、上下面の短絡などを防止する
ことが可能である。Furthermore, if this continues, there is a possibility that the upper and lower electrodes will be short-circuited. In that case, an insulator may be formed on the side surface of the composite material. Figure 6 shows the rows of composite materials 401 and global 404.
After gluing with wax etc. 405, insulator 60 is attached to the side.
The figure shows a state in which an electrode 406 is formed after the electrode 406 is formed. By doing so, it is possible to prevent short circuits between the upper and lower surfaces.
〔発明の効果〕
以上のように、本発明によれば、凹面、凸面などの任意
の形状の尚性能の探触子が得られる。また、平面の台上
で形成したフレキシブルな複合圧１匹材料を鎌から任意
の曲面に整形することにより、形状積度の高い探触子を
容易に製造することができ、その工学的価値は多大であ
る。[Effects of the Invention] As described above, according to the present invention, a probe having an arbitrary shape such as a concave surface or a convex surface and still having high performance can be obtained. In addition, by shaping a flexible compound pressure single piece material formed on a flat table into an arbitrary curved surface using a sickle, it is possible to easily manufacture a probe with a high shape and area, and its engineering value is It's a huge amount.
第１図は従来の無機圧電材料による探触子の加工方法、
第２図は本発明に用いる複合材料、第３図は複合材料の
り０工方法、第４図は複合材料による凹面探触子の加工
方法、第５図は複合材料探触子の畦極形成法、第６図は
複合材料探触子の信号′電極とアース電極との短絡を防
ぐ方法を示す。
４０１・・・複合材料、４０２・・・無機圧電材料、４
０３１０．有機物、４０４・・・保持台、４０５・・・
ワックス、４０６・・・信号電極、４０７・・・信号線
、４０８・・・ノ（ンキング材、４１０・・・アース電
極、４１１・・・アー／
ス線、４１２・・・膜、５０１・・・無機圧電材料、５
０２第１ 図
（久）
猪２ 日
第 ３ 図
（皮）
第 ４− 超
（ａ）
（ｄ）
；ｆｌ ５ 口
１ 区
４０ノ
ｖ４−Figure 1 shows the conventional processing method for a probe using inorganic piezoelectric materials.
Fig. 2 shows the composite material used in the present invention, Fig. 3 shows the composite material glue-free method, Fig. 4 shows the processing method for a concave probe using the composite material, and Fig. 5 shows the ridge formation of the composite material probe. Figure 6 shows a method for preventing short circuits between the signal electrode and the ground electrode of a composite material probe. 401... Composite material, 402... Inorganic piezoelectric material, 4
0310. Organic matter, 404... Holding stand, 405...
Wax, 406...Signal electrode, 407...Signal line, 408...Ninking material, 410...Earth electrode, 411...Earth wire, 412...Membrane, 501...・Inorganic piezoelectric material, 5
02 1st figure (ku) Boar 2nd day 3rd figure (skin) 4th - Super (a) (d); fl 5 mouth 1 ward 40 no v4-
Claims (1)
、該圧間隙に充填された有機物とを含む複合圧成材料が
所定の曲面に沿って形成され、該複数の柱状圧’４体の
ノ底面及び上面にそれぞれ共通の第１．第２の電極が設
けられている超音波探触子。 ２、前記複合圧電体の上面に前記第１の電極を覆うよう
に保護材が形成されている特許請求の範囲第１項に記載
の超音波探触子。 ３、前記複合圧電体の底面に音波吸収体が形成されてい
る特許請求の範囲第１項に記載の超音波探触子。 ４、 複数の柱状圧電体の間隙に有機物が充填された可
撓性の板状複合圧心材を形成する第１の工程と、該板状
複合圧電材を所定の曲面に沿って整形する第２の工程と
金含む超音波探触子の製造方法。[Claims] 1. A composite pressure-formed material including a plurality of columnar piezoelectric bodies arranged with gaps between them and an organic material filled in the piezoelectric gaps is formed along a predetermined curved surface, A common first. An ultrasound probe provided with a second electrode. 2. The ultrasonic probe according to claim 1, wherein a protective material is formed on the upper surface of the composite piezoelectric body so as to cover the first electrode. 3. The ultrasonic probe according to claim 1, wherein a sound wave absorber is formed on the bottom surface of the composite piezoelectric body. 4. A first step of forming a flexible plate-shaped composite piezoelectric material in which the gaps between a plurality of columnar piezoelectric bodies are filled with organic matter, and a second step of shaping the plate-shaped composite piezoelectric material along a predetermined curved surface. process and manufacturing method for ultrasonic probes containing gold.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58192415A JPS6085700A (en) | 1983-10-17 | 1983-10-17 | Ultrasonic probe and its manufacturing method |
| DE19843437862 DE3437862A1 (en) | 1983-10-17 | 1984-10-16 | ULTRASONIC TRANSDUCER AND METHOD FOR THE PRODUCTION THEREOF |
| US06/661,928 US4683396A (en) | 1983-10-17 | 1984-10-17 | Composite ultrasonic transducers and methods for making same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58192415A JPS6085700A (en) | 1983-10-17 | 1983-10-17 | Ultrasonic probe and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6085700A true JPS6085700A (en) | 1985-05-15 |
| JPH0521399B2 JPH0521399B2 (en) | 1993-03-24 |
Family
ID=16290938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58192415A Granted JPS6085700A (en) | 1983-10-17 | 1983-10-17 | Ultrasonic probe and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6085700A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62247700A (en) * | 1986-04-19 | 1987-10-28 | Hitachi Metals Ltd | Piezoelectric speaker |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149615A (en) * | 1978-05-17 | 1979-11-24 | Oki Electric Ind Co Ltd | Production of ultrasonic oscillator of curved arrangement type |
| JPS55151891A (en) * | 1979-05-16 | 1980-11-26 | Toray Ind Inc | Scan-type ultrasonic transducer using high molecular piezoelectric film |
| JPS5726986A (en) * | 1980-06-06 | 1982-02-13 | Siemens Ag | Ultrasonic wave converter and method of producing same |
| JPS5822046A (en) * | 1981-08-03 | 1983-02-09 | 株式会社日立メディコ | Ultrasonic probe |
| JPS5854939A (en) * | 1981-09-28 | 1983-04-01 | 松下電器産業株式会社 | Ultrasonic probe and production thereof |
| JPS58120397A (en) * | 1982-01-13 | 1983-07-18 | Hitachi Medical Corp | Production of ultrasonic probe |
-
1983
- 1983-10-17 JP JP58192415A patent/JPS6085700A/en active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149615A (en) * | 1978-05-17 | 1979-11-24 | Oki Electric Ind Co Ltd | Production of ultrasonic oscillator of curved arrangement type |
| JPS55151891A (en) * | 1979-05-16 | 1980-11-26 | Toray Ind Inc | Scan-type ultrasonic transducer using high molecular piezoelectric film |
| JPS5726986A (en) * | 1980-06-06 | 1982-02-13 | Siemens Ag | Ultrasonic wave converter and method of producing same |
| JPS5822046A (en) * | 1981-08-03 | 1983-02-09 | 株式会社日立メディコ | Ultrasonic probe |
| JPS5854939A (en) * | 1981-09-28 | 1983-04-01 | 松下電器産業株式会社 | Ultrasonic probe and production thereof |
| JPS58120397A (en) * | 1982-01-13 | 1983-07-18 | Hitachi Medical Corp | Production of ultrasonic probe |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62247700A (en) * | 1986-04-19 | 1987-10-28 | Hitachi Metals Ltd | Piezoelectric speaker |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521399B2 (en) | 1993-03-24 |
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