JPS6153562A - Ultrasonic probe - Google Patents

Ultrasonic probe

Info

Publication number
JPS6153562A
JPS6153562A JP17497984A JP17497984A JPS6153562A JP S6153562 A JPS6153562 A JP S6153562A JP 17497984 A JP17497984 A JP 17497984A JP 17497984 A JP17497984 A JP 17497984A JP S6153562 A JPS6153562 A JP S6153562A
Authority
JP
Japan
Prior art keywords
wavelength
width
grating
ultrasonic probe
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17497984A
Other languages
Japanese (ja)
Inventor
Chitose Nakatani
中谷　千歳
Hiroyuki Takeuchi
裕之 竹内
Kageyoshi Katakura
景義 片倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MEDEIKO KK
Hitachi Ltd
Original Assignee
MEDEIKO KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MEDEIKO KK, Hitachi Ltd filed Critical MEDEIKO KK
Priority to JP17497984A priority Critical patent/JPS6153562A/en
Priority to US06/758,029 priority patent/US4658176A/en
Priority to DE19853526488 priority patent/DE3526488A1/en
Publication of JPS6153562A publication Critical patent/JPS6153562A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To obtain an ultrasonic probe excellent in the performance with a limited grating rope, by setting the sum of the width of a columnar piezo-electric body composing a compound piezoelectric body and the width of an organic part to fill a gap therein at no more than one wavelength. CONSTITUTION:An ultrasonic probe 302 is made up of a compound piezo-electric material 301 which is composed so that the sum of the width of a columnar piezo-electric material 303 and that of an organic part to fill a gap therein will be no more than one wavelength of an ultrasonic wave. Common electrodes are formed on the top and undersurface of the material 301 respectively to apply an electrical signal thereto through respective leads. An observation shaft 305 is positioned at a distance 307 from the center 306 of material 301 in an x-y plane and is at an angle 308 deg. to the y axis. The center shaft 309 of the probe 302 aligns the z axis. The level of a grating rope is evaluated from the array of the material 303 and geometric relationship of the observation shaft 305. The grating rope can be reduced by setting the range of the interval between elements less than one wavelength.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は超音波診断装置に係り、特にそのセンサ一部に
好適な複合材料を用いた超音波探触子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an ultrasonic diagnostic apparatus, and particularly to an ultrasonic probe using a suitable composite material for a portion of its sensor.

〔発明の背景〕[Background of the invention]

本発明で対象としている超音波複合材料の＋１１１成を
第１図に示す６１０１はＰＺＴなどの柱状圧電体であり
、１０２はシリコンゴムなどの樹脂である。The +111 composition of the ultrasonic composite material targeted by the present invention is shown in FIG. 1, and 6101 is a columnar piezoelectric material such as PZT, and 102 is a resin such as silicone rubber.

この複合材料の加工方法を第２図に示す、第２図（ａ）
の平板状の圧電体２０１を、加熱により軟らかくなる接
着剤（ワックス）２０２で切断用台２０３に仮接着する
。次に（ｂ）のようにマトリックス状に切断して多数の
切断溝２０４を設は柱状圧電体２０５を作る。次に（ｃ
）に示すように切断溝に樹脂２０６を充填硬化させた後
、切断用台からはがすと第１図の複合材料が得られる。The processing method for this composite material is shown in Figure 2 (a).
A flat piezoelectric body 201 is temporarily bonded to a cutting table 203 with an adhesive (wax) 202 that becomes soft when heated. Next, as shown in FIG. 3(b), a large number of cutting grooves 204 are formed by cutting into a matrix shape to form a columnar piezoelectric body 205. Then (c
) As shown in FIG. 1, the resin 206 is filled into the cutting groove and cured, and then removed from the cutting table to obtain the composite material shown in FIG.

この形式の複合材料は、切断ｉＩり幅、切断間隔、切断
溝に充填する有機物の性質などを変えることで、種々の
性質を持つ複合材料を形成することが可能である。すな
わち、音響インピーダンスが低く、かつ電気機械結合係
数が高いという超音波探触子材料として好適な性質を持
ち、さらに有機物として軟かい材料を用いることでフレ
キシブルな複合材料を実現することが可能である。With this type of composite material, it is possible to form composite materials with various properties by changing the cutting width, the cutting interval, the properties of the organic substance filled in the cutting grooves, etc. In other words, it has low acoustic impedance and high electromechanical coupling coefficient, making it suitable as an ultrasonic probe material, and by using a soft organic material, it is possible to create a flexible composite material. .

このように複合材料には種々の特長があるが、このまま
では切断に起因するグレーティングローブが生じるので
、性能のよい探触子を構成することが困難であった。Although composite materials have various features as described above, grating lobes are generated due to cutting, making it difficult to construct a probe with good performance.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、グレーティングローブの小さい性能の
優れた複合圧電材料超音波探触子を提供することにある
。An object of the present invention is to provide an excellent composite piezoelectric material ultrasonic probe with small grating lobes and excellent performance.

〔発明の概要〕[Summary of the invention]

本発明は、温合圧電体を構成する柱状圧電体の幅とその
間隙をうめる有機物部分の幅との和が１波長以下となる
ようにして上記グレーティングローブを小さくしたもの
である。In the present invention, the grating lobe is made smaller by making the sum of the width of the columnar piezoelectric material constituting the heated piezoelectric material and the width of the organic material portion filling the gap equal to or less than one wavelength.

なお、複数の探触子素子をアレイ状に配列した電子走査
型探触子のグレーティングローブについてはすでに種々
検討され、素子間隔が１波長以下であることが望ましい
ことが示されている。Incidentally, various studies have already been made regarding the grating lobe of an electronic scanning probe in which a plurality of probe elements are arranged in an array, and it has been shown that it is desirable that the element spacing be one wavelength or less.

複合圧電材料においても電子走査型の場合と同じように
切断に起因するグレーティングローブが発生ずることを
本発明者らは見い出し、さらに検討を行った結果、素子
間隔が１波長以下にすれば複合圧電材料においてもグレ
ーティングローブを抑えることがｉｊｆ能であることが
わかったのである。The present inventors discovered that grating lobes caused by cutting occur in composite piezoelectric materials in the same way as in the case of electronic scanning type.As a result of further investigation, composite piezoelectric It was discovered that the material also has the ability to suppress grating lobes.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第３．４図により説明する。 An embodiment of the present invention will be described below with reference to FIG. 3.4.

簡単のため、複合圧電材料による四面探触子の場合を示
す。第３図は、複合圧電材料３０１にて構成された探触
子３０２　（３０３，３０４はそれぞれ柱状圧電材料、
バッキング材である。）と指向性を測定するためのａ？
ＩＩＩＩ軸３０５との幾何学的関係を示している。３０
５はｘ−ｙ平面内で、３０１の中心３０６から距離３０
７の位置にあり、ｙ軸と３０８の角度をなしている。な
お、３０２の中心軸３０９はＺ軸と一致し、３０１の上
下面には、それぞれ共通ｉ′ｌｔ極が形成され、各々の
リード線を介して電気信号が印加される。For simplicity, the case of a four-sided probe made of a composite piezoelectric material is shown. FIG. 3 shows a probe 302 made of a composite piezoelectric material 301 (303 and 304 are columnar piezoelectric materials,
It is a backing material. ) and a? for measuring directivity.
The geometrical relationship with the III axis 305 is shown. 30
5 is the distance 30 from the center 306 of 301 in the x-y plane
7, making an angle of 308 with the y-axis. Note that the central axis 309 of 302 coincides with the Z axis, and common i'lt poles are formed on the upper and lower surfaces of 301, respectively, and an electric signal is applied through each lead wire.

このとき３０３の配列と３０５の幾何学的関係から、３
０５がｙ軸あるいはｙ軸と一致するとき最もグレーティ
ングローブのレベルが大きくなる。At this time, from the arrangement of 303 and the geometrical relationship of 305, 3
05 coincides with the y-axis or the y-axis, the level of the grating lobe becomes the highest.

したがって３０４がｙ軸あるいはｙ軸のときについて検
討すれば、グレーティングローブのレベルを簡易的に評
価することが可能である。Therefore, by considering the case where 304 is the y-axis or the y-axis, it is possible to easily evaluate the level of the grating lobe.

第４図は、そのときのグレーティングローブを示してい
る。４０１，４０２，４０３，４０４はそれぞれ素子間
隔（すなわち複合圧電材料の素子幅と切断溝の幅との和
）が１．６波長、１．５波長、１．２波長、　１波長の
場合を示している。１波長のときはグレーティングロー
ブが一７０ｄＢ以下となっている。なお１波長より小さ
い場合、グレーティングローブはこのグラフ上にはほと
んど現われないほど小さいものとなる。このように素子
間隔が１波長以下であることが、複合材料で構成される
探触子にとって重要な要件となる。FIG. 4 shows the grating lobes at that time. 401, 402, 403, and 404 indicate cases where the element spacing (that is, the sum of the element width of the composite piezoelectric material and the width of the cutting groove) is 1.6 wavelength, 1.5 wavelength, 1.2 wavelength, and 1 wavelength, respectively. ing. When one wavelength is used, the grating lobe is 170 dB or less. Note that when the wavelength is smaller than one wavelength, the grating lobe is so small that it hardly appears on this graph. In this way, an element spacing of one wavelength or less is an important requirement for a probe made of a composite material.

以上、本実施例によればグレーティングローブの小さい
複合圧電材料超音波探触子を構成することが可能となる
。As described above, according to this embodiment, it is possible to construct a composite piezoelectric material ultrasonic probe with small grating lobes.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、複合材料超音波探触子のグレーティン
グローブのレベルを一７０ｄＢ以下にすることができ、
複合圧電材料の種々の特徴を生かした性能の良い探触子
を構成する上で非常に有効である。According to the present invention, the level of the grating lobe of the composite material ultrasonic probe can be reduced to -70 dB or less,
It is very effective in constructing a high-performance probe that takes advantage of the various characteristics of composite piezoelectric materials.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の対象とする複合材料、第２図はその加
工方法、第３図はグレーティングローブの測定図、第４
図はグレーティングローブの検討結果を示す。 ３０１・・・複合材料、３ｏ２・・・探触子、３０３・
・・柱状圧電材料、３０５・・観測角、４０１，４０２
゜４０３．４０４・・・グレーティングローブ。Fig. 1 shows the composite material that is the subject of the present invention, Fig. 2 shows its processing method, Fig. 3 shows a measurement diagram of grating lobes, and Fig. 4
The figure shows the results of the grating lobe study. 301... Composite material, 3o2... Probe, 303.
...Columnar piezoelectric material, 305...Observation angle, 401,402
゜403.404...Grating lobe.

Claims (1)

【特許請求の範囲】[Claims] １、互いに間隙をおいて配列された複数の柱状圧電体と
、該間隙に充填された有機物とを含む複合圧電材料にお
いて、該柱状圧電体幅と該間隙幅の和で規定される間隔
を、複合圧電材料の基本周波数と音波の伝播媒体の音速
によつて決まる波長以下にした複合圧電材料を用いて構
成したことを特徴とする超音波探触子。1. In a composite piezoelectric material including a plurality of columnar piezoelectric bodies arranged with gaps between them and an organic substance filled in the gap, the interval defined by the sum of the width of the columnar piezoelectric bodies and the gap width, An ultrasonic probe characterized in that it is constructed using a composite piezoelectric material whose wavelength is determined by the fundamental frequency of the composite piezoelectric material and the sound speed of a sound wave propagation medium.
JP17497984A 1984-07-25 1984-08-24 Ultrasonic probe Pending JPS6153562A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP17497984A JPS6153562A (en) 1984-08-24 1984-08-24 Ultrasonic probe
US06/758,029 US4658176A (en) 1984-07-25 1985-07-23 Ultrasonic transducer using piezoelectric composite
DE19853526488 DE3526488A1 (en) 1984-07-25 1985-07-24 ULTRASONIC CONVERTER WITH PIEZOELECTRIC COMPOSITE MATERIAL

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17497984A JPS6153562A (en) 1984-08-24 1984-08-24 Ultrasonic probe

Publications (1)

Publication Number Publication Date
JPS6153562A true JPS6153562A (en) 1986-03-17

Family

ID=15988093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17497984A Pending JPS6153562A (en) 1984-07-25 1984-08-24 Ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS6153562A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6364586B1 (en) 1999-09-02 2002-04-02 Piolax Inc. Multiple locking position clip with grommet and pin
US7288069B2 (en) 2000-02-07 2007-10-30 Kabushiki Kaisha Toshiba Ultrasonic probe and method of manufacturing the same
JP2008256719A (en) * 2002-10-31 2008-10-23 Hitachi-Ge Nuclear Energy Ltd Ultrasonic flaw detector
JP6265578B1 (en) * 2016-09-07 2018-01-24 株式会社アルバック Device, device manufacturing method, and array-type ultrasonic probe manufacturing method
WO2018047585A1 (en) * 2016-09-07 2018-03-15 株式会社アルバック Device, method for manufacture of devce, and method for manufacture of array-type ultrasound probe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5822046A (en) * 1981-08-03 1983-02-09 株式会社日立メディコ Ultrasonic probe
JPS5934176A (en) * 1982-08-20 1984-02-24 Yokogawa Hokushin Electric Corp Phased array vibrator driving system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5822046A (en) * 1981-08-03 1983-02-09 株式会社日立メディコ Ultrasonic probe
JPS5934176A (en) * 1982-08-20 1984-02-24 Yokogawa Hokushin Electric Corp Phased array vibrator driving system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6364586B1 (en) 1999-09-02 2002-04-02 Piolax Inc. Multiple locking position clip with grommet and pin
US7288069B2 (en) 2000-02-07 2007-10-30 Kabushiki Kaisha Toshiba Ultrasonic probe and method of manufacturing the same
JP2008256719A (en) * 2002-10-31 2008-10-23 Hitachi-Ge Nuclear Energy Ltd Ultrasonic flaw detector
EP1415731A3 (en) * 2002-10-31 2011-01-19 Hitachi-GE Nuclear Energy, Ltd. Ultrasonic array sensor, ultrasonic inspection instrument and ultrasonic inspection method
JP6265578B1 (en) * 2016-09-07 2018-01-24 株式会社アルバック Device, device manufacturing method, and array-type ultrasonic probe manufacturing method
WO2018047585A1 (en) * 2016-09-07 2018-03-15 株式会社アルバック Device, method for manufacture of devce, and method for manufacture of array-type ultrasound probe
US10568607B2 (en) 2016-09-07 2020-02-25 Ulvac, Inc. Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probe

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