JP2935550B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JP2935550B2 JP2935550B2 JP2232064A JP23206490A JP2935550B2 JP 2935550 B2 JP2935550 B2 JP 2935550B2 JP 2232064 A JP2232064 A JP 2232064A JP 23206490 A JP23206490 A JP 23206490A JP 2935550 B2 JP2935550 B2 JP 2935550B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- ultrasonic probe
- piezoelectric
- main surface
- piezoelectric plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は超音波探触子を利用分野とし、特に圧電板を
複合化して構成した超音波探触子に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an ultrasonic probe in the application field, and particularly relates to an ultrasonic probe formed by combining a piezoelectric plate.
（発明の背景） 超音波探触子は例えば医用関係の超音波診断装置に超
音波の法受波部として有用される。近年では、圧電板を
複合化するとともに、例えば同心円状電極を形成してア
ニュラ型としたものがある。BACKGROUND OF THE INVENTION An ultrasonic probe is useful, for example, in a medical ultrasonic diagnostic apparatus as an ultrasonic wave receiving unit. In recent years, there has been an annular type in which a piezoelectric plate is combined and, for example, concentric electrodes are formed.
（従来技術） 第５図及び第６図はこのような一従来例を説明する超
音波探触子の図である。(Prior Art) FIGS. 5 and 6 are views of an ultrasonic probe for explaining such a conventional example.
超音波探触子は、例えばPZT等の圧電板を作業板１上
に固着し、二次元上のｘ、ｙ方向に切断して複数の圧電
小片２に分割する。そして、各溝間に充填材３を埋設し
て一体化（複合化）した後、作業板１よりこれを取り外
す。次に、複合化した圧電小片２の一主面に、中央を円
状、その外側を環状とした同心円状電極４（ab）を、他
主面に共通電極５を形成する。そして、例えば同心円状
電極４に例えば遅延信号を印加して機械的にセクタ駆動
する。In the ultrasonic probe, for example, a piezoelectric plate such as PZT is fixed on the work plate 1, and cut into two-dimensional x and y directions to be divided into a plurality of piezoelectric pieces 2. After the filler 3 is embedded between the grooves and integrated (composite), the filler 3 is removed from the work plate 1. Next, a concentric electrode 4 (ab) having a circular center and an outer ring is formed on one main surface of the composite piezoelectric piece 2 and a common electrode 5 is formed on the other main surface. Then, for example, a delay signal is applied to, for example, the concentric electrode 4 to mechanically drive the sector.
（従来技術の問題点） しかしながら、上記構成の超音波探触子では、各圧電
小片２の複合化後、作業板１から除去する際、加熱して
溶剤を使用したり、機械的外力を加えたりする。また、
同心円状電極４（ab）の形成された振動部と両者間の非
振動部とは音響インピーダンスが同じであるので、信号
漏れ（クロストーク）を生じるこのようなことから、音
響的特性を損なうとともに、作業工程を多くしてその生
産性が悪くなる問題があった。(Problems of the Related Art) However, in the ultrasonic probe having the above-described configuration, when the piezoelectric pieces 2 are combined and removed from the work plate 1, the ultrasonic probe is heated to use a solvent or to apply a mechanical external force. Or Also,
Since the vibrating portion formed with the concentric electrodes 4 (ab) and the non-vibrating portion between the two have the same acoustic impedance, signal leakage (crosstalk) occurs, which impairs acoustic characteristics and In addition, there is a problem that the number of work steps is increased and the productivity is deteriorated.
（発明の目的） 本発明は、作業性を良好として音響的特性に優れた超
音波探触子を提供することを目的とする。(Object of the Invention) It is an object of the present invention to provide an ultrasonic probe having good workability and excellent acoustic characteristics.
（解決手段） 本発明は、圧電板の一主面に信号導出入用電極となる
厚板状導体を形成し、前記圧電板上から前記厚板導体上
に達する切断溝を設けて、前記圧電板を複数に分割し、
前記切断溝に充填材を埋設して複合化するとともに、他
主面に共通電極を形成して構成したことを解決手段とす
る。以下、本発明の一実施例の製造過程を示して説明す
る。(Solution) According to the present invention, a thick plate-shaped conductor serving as a signal lead-out / input electrode is formed on one main surface of a piezoelectric plate, and a cutting groove extending from the piezoelectric plate to the thick plate conductor is provided. Divide the board into multiple,
A solution is that a filler is embedded in the cut groove to form a composite, and a common electrode is formed on the other main surface. Hereinafter, a manufacturing process of one embodiment of the present invention will be described.
（実施例） 第１図乃至第３図は本発明の一実施例の説明する製造
過程時の超音波探触子の図である。(Embodiment) FIGS. 1 to 3 are views of an ultrasonic probe during a manufacturing process according to an embodiment of the present invention.
圧電板６は、前述同様にPZTとし、両主面に図示しな
い電極を形成して分極されている。そして、この実施例
では、先ず、圧電板６の一主面に鋼板等からなる同心円
状の厚板導体７（ab）を導電性接着剤等により固着する
「第１図」。そして、厚板導体７（ab）間の空隙にエポ
キシ樹脂等の充填材８を埋設する。さらに、各厚板導体
７（ab）からリード線９（ab）を導出する「第２図」。
次に、圧電板６の一主面側（同心円状電極側）をバッキ
ング材10上に固着する。そして、圧電板６の他主面上か
ら厚板導体７（ab）に達する切断溝11を２次元方向に設
ける。このとき、厚電板６は複数の圧電小片に12分割さ
れる。そして、切断溝11に前述同様の充填材８を埋設す
る「第３図」。次に、圧電板６（圧電小片12）の他主面
を例えば低温蒸着により図示しない共通金属膜を形成す
る。そして、共通金属膜にリード線を接続する（未図
示）を等しい超音波探触子を構成する。The piezoelectric plate 6 is made of PZT as described above, and is polarized by forming electrodes (not shown) on both main surfaces. In this embodiment, first, a concentric thick plate conductor 7 (ab) made of a steel plate or the like is fixed to one main surface of the piezoelectric plate 6 with a conductive adhesive or the like (FIG. 1). Then, a filler 8 such as an epoxy resin is buried in a gap between the thick plate conductors 7 (ab). Further, FIG. 2 derives a lead wire 9 (ab) from each thick plate conductor 7 (ab).
Next, one main surface side (concentric electrode side) of the piezoelectric plate 6 is fixed on the backing material 10. Then, a cutting groove 11 reaching the thick plate conductor 7 (ab) from the other main surface of the piezoelectric plate 6 is provided in a two-dimensional direction. At this time, the thick electric plate 6 is divided into twelve piezoelectric pieces. Then, a filler 8 similar to that described above is embedded in the cut groove 11 (FIG. 3). Next, a common metal film (not shown) is formed on the other main surface of the piezoelectric plate 6 (piezoelectric small piece 12) by, for example, low-temperature evaporation. Then, an ultrasonic probe for connecting a lead wire (not shown) to the common metal film is constituted.
このようなものでは、厚板導体７（ab）に達する切断
溝11を設けて圧電小片12に分割したので、厚板導体７
（ab）は分離することなく同心円状の電気的な接続状態
を維持する。したがって、厚板導体をそのまま同心円状
電極として使用できる。このようなことから、充填材８
を埋設した複合化後に、新たに同心円状電極を形成する
必要がないので、従来例のように作業板上から除去する
作業を不要とする。これに伴い、加熱及び溶剤の使用
や、機械的外力の付加もなくなる。また、振動部と非振
動部とは音響インピーダンスが異なるのでクロストーク
を良好とする。したがって、このようなものでは振動特
性を維持して作業性を向上する。In such a device, since the cutting groove 11 reaching the thick plate conductor 7 (ab) is provided and divided into the piezoelectric small pieces 12, the thick plate conductor 7 (ab) is divided.
(Ab) maintains concentric electrical connection without separation. Therefore, the thick plate conductor can be used as it is as the concentric electrode. Therefore, the filler 8
Since there is no need to form a new concentric electrode after compounding the embedded structure, it is not necessary to remove the work from the work plate as in the conventional example. Accordingly, heating, use of a solvent, and addition of a mechanical external force are also eliminated. Also, since the vibrating part and the non-vibrating part have different acoustic impedances, good crosstalk is achieved. Therefore, in such a case, the workability is improved while maintaining the vibration characteristics.
（他の実施例） なお、上記実施例では、圧電板を平板状として説明し
たが、例えば第４図に示したように厚板導体に曲率をも
たせ、凹面等の局面状に配置構成してもよい。また、圧
電板は方形式、電極は同心円状としたが、圧電板を円状
としてもよいし、電極を円環ではない単に環状としても
よい。また、切断溝11等に充填材を埋設したが、単に空
隙としたままでもよい。そして、アニュラ型を例とした
が、例えばマトリクス型、配列型であっても同様に適用
できるものである。(Other Embodiments) In the above embodiments, the piezoelectric plate is described as a flat plate. However, for example, as shown in FIG. 4, a thick plate conductor is provided with a curvature, and is arranged and configured in a state of a concave surface or the like. Is also good. Further, although the piezoelectric plate has a square shape and the electrodes are concentric, the piezoelectric plate may have a circular shape, or the electrodes may have a simple ring shape instead of a ring shape. Further, the filler is buried in the cutting groove 11 or the like, but may be simply left as a gap. Although the annular type is described as an example, a matrix type or an array type can be similarly applied.
（発明の効果） 本発明は、圧電板の一主面に信号導出入用電極となる
厚板状導体を形成し、前記圧電板上から前記厚板導体上
に達する切断溝を設けて、前記厚電板を複数に分割し、
前記切断溝に充填材を埋設して複合化するとともに、他
主面に共通電極を形成したので、作業性を良好として音
響的特性に優れた超音波探触子を提供できる。(Effect of the Invention) According to the present invention, a thick plate-shaped conductor serving as a signal lead-in / out electrode is formed on one main surface of a piezoelectric plate, and a cutting groove extending from above the piezoelectric plate to above the thick plate conductor is provided. Divide the thick electric plate into multiple,
Since the filler is embedded in the cut groove to form a composite and the common electrode is formed on the other main surface, it is possible to provide an ultrasonic probe having good workability and excellent acoustic characteristics.
第１図乃至第４図は本発明の一実施例を説明するための
工程図で、第１図（ａ）は同心円状電極を形成した圧電
板の平面図、第１図（ｂ）は同断面図、第２図は同心円
状電極間に充填材を埋設した断面図、第３図は超音波探
触子の断面図である。 第４図は本発明の他の実施例でを説明する超音波探触子
の断面図である。 第５図は従来例を説明する複合圧電板の図、第６図
（ａ）は圧電板の上面図、同図（ｂ）は裏面図である。1 to 4 are process diagrams for explaining an embodiment of the present invention. FIG. 1 (a) is a plan view of a piezoelectric plate having concentric electrodes formed thereon, and FIG. 1 (b) is a plan view thereof. FIG. 2 is a cross-sectional view in which a filler is buried between concentric electrodes, and FIG. 3 is a cross-sectional view of an ultrasonic probe. FIG. 4 is a sectional view of an ultrasonic probe for explaining another embodiment of the present invention. FIG. 5 is a view of a composite piezoelectric plate illustrating a conventional example, FIG. 6 (a) is a top view of the piezoelectric plate, and FIG. 6 (b) is a rear view.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H04R 17/00 H01L 41/22 G01N 29/24 A61B 8/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 6 , DB name) H04R 17/00 H01L 41/22 G01N 29/24 A61B 8/00
Claims (1)
厚板状導体を形成し、前記圧電板上から前記厚板導体上
に達する切断溝を設けて、前記圧電板を複数に分割し、
前記切断溝に充填材を埋設して複合化するとともに、他
主面に共通電極を形成して構成したことを特徴とする超
音波探触子。1. A thick plate-like conductor serving as a signal lead-in / out electrode is formed on one main surface of a piezoelectric plate, and a cut groove extending from above the piezoelectric plate to above the thick plate conductor is provided. Divided into
An ultrasonic probe, wherein a composite is formed by burying a filler in the cut groove, and a common electrode is formed on the other main surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2232064A JP2935550B2 (en) | 1990-08-30 | 1990-08-30 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2232064A JP2935550B2 (en) | 1990-08-30 | 1990-08-30 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04111598A JPH04111598A (en) | 1992-04-13 |
| JP2935550B2 true JP2935550B2 (en) | 1999-08-16 |
Family
ID=16933418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2232064A Expired - Fee Related JP2935550B2 (en) | 1990-08-30 | 1990-08-30 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2935550B2 (en) |
-
1990
- 1990-08-30 JP JP2232064A patent/JP2935550B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04111598A (en) | 1992-04-13 |
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