JPS6083387A - アレー圧電変換器 - Google Patents

アレー圧電変換器

Info

Publication number
JPS6083387A
JPS6083387A JP58190730A JP19073083A JPS6083387A JP S6083387 A JPS6083387 A JP S6083387A JP 58190730 A JP58190730 A JP 58190730A JP 19073083 A JP19073083 A JP 19073083A JP S6083387 A JPS6083387 A JP S6083387A
Authority
JP
Japan
Prior art keywords
thin film
single crystal
lead titanate
electrode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58190730A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576793B2 (OSRAM
Inventor
Toshio Kobayashi
俊雄 小林
Keiko Kushida
恵子 櫛田
Hiroyuki Takeuchi
裕之 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58190730A priority Critical patent/JPS6083387A/ja
Publication of JPS6083387A publication Critical patent/JPS6083387A/ja
Publication of JPH0576793B2 publication Critical patent/JPH0576793B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
JP58190730A 1983-10-14 1983-10-14 アレー圧電変換器 Granted JPS6083387A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58190730A JPS6083387A (ja) 1983-10-14 1983-10-14 アレー圧電変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58190730A JPS6083387A (ja) 1983-10-14 1983-10-14 アレー圧電変換器

Publications (2)

Publication Number Publication Date
JPS6083387A true JPS6083387A (ja) 1985-05-11
JPH0576793B2 JPH0576793B2 (OSRAM) 1993-10-25

Family

ID=16262835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58190730A Granted JPS6083387A (ja) 1983-10-14 1983-10-14 アレー圧電変換器

Country Status (1)

Country Link
JP (1) JPS6083387A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS633505A (ja) * 1986-06-23 1988-01-08 Hitachi Ltd 圧電変換器及びその製造方法
JP2001298220A (ja) * 2000-04-17 2001-10-26 Matsushita Electric Ind Co Ltd 圧電駆動体及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113713A (en) * 1976-03-22 1977-09-24 Hitachi Ltd Array type ultra-high frequency sound oscillator
JPS58186105A (ja) * 1982-04-26 1983-10-31 松下電器産業株式会社 強誘電体薄膜素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113713A (en) * 1976-03-22 1977-09-24 Hitachi Ltd Array type ultra-high frequency sound oscillator
JPS58186105A (ja) * 1982-04-26 1983-10-31 松下電器産業株式会社 強誘電体薄膜素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS633505A (ja) * 1986-06-23 1988-01-08 Hitachi Ltd 圧電変換器及びその製造方法
JP2001298220A (ja) * 2000-04-17 2001-10-26 Matsushita Electric Ind Co Ltd 圧電駆動体及びその製造方法

Also Published As

Publication number Publication date
JPH0576793B2 (OSRAM) 1993-10-25

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