JPS6080238A - Package type circuit element inspection apparatus - Google Patents

Abstract

PURPOSE:To easily connect elements to the inspection circuit by affixing an accommodation body in the supply side accommodating many holding panels holding flat package type circuit elements on the X-Y table and providing a plurality of positioning members and inspection positioning members to the carrying apparatus while shifting it to the accommodation body in the accommodation side affixed on the X-Y table by means of the carrying apparatus. CONSTITUTION:Many holding panels 20 accommodating flat package type circuit elements 60 are accommodated in the accommodation body 10 in the supply side and it is then affixed on the X-Y table 30. The element 60 is caught one by one with a drawing means 50 and is transferred to the accommodation body 70 in the accommodation side of the same structure by the carrying apparatus 140. With such constitution, a plurality of positioning members 80, 90, 110, 120, 130 and inspection positioning member 100 are provided to the apparatus 140, the attitudes of elements 60 are ordered during transfer and the connection to the inspection circuit not illustrated is established. Thereafter, according to the result of inspection, the defective elements are accommodated in the defective element accomodating area 190.

Description

[Detailed description of the invention] The present invention relates to a testing device for packaged circuit elements.

In order to manufacture circuit elements such as ICs and LSIs with excellent quality assurance and economical efficiency, accurate and rapid inspection is important. However, packaged circuit elements with high packaging density and a large number of terminals, especially flat packaged circuit elements (FPE), are often difficult to handle, and conventionally, it has not always been possible to efficiently There was no equipment available to perform the test. This is because, despite the strict requirement for positioning accuracy between packaged circuit elements and test circuits, there is no testing equipment that can accurately position packaged circuit elements before supplying them to the test circuit. This is because the.

In particular, there are no standards for flat package type circuit elements, making handling of the circuit elements even more difficult.

An object of the present invention is to provide a packaged circuit element that can easily and accurately position the packaged circuit element when the packaged circuit element is connected to a test circuit and tested without requiring one person's effort. The purpose is to provide inspection equipment.

Therefore, the present invention provides a packaged circuit element testing apparatus that connects a testing circuit to each of a plurality of terminals of a packaged circuit element positioned at a predetermined testing position to test the packaged circuit element. and a preparation positioning member that positions and holds the packaged circuit element in a predetermined range that is wider than the accurate positioning range by the test positioning member prior to the test positioning member.

are arranged at a predetermined interval apart, and suction chambers for removably attaching and holding the package type circuit element are arranged at intervals equal to the arrangement interval, and the package is reciprocated through the interval by a reciprocating means. A conveying device is provided to sequentially convey the packaged circuit elements at the intervals, and the packaged circuit elements are first positioned using the preparation positioning member in a wider range than the positioning range at the inspection position. Then, the inspection positioning member performs accurate positioning, or in other words, the inspection positioning member and the preparatory positioning member preceding the inspection positioning member perform accurate positioning little by little while conveying the object. This is what we are trying to achieve.

An embodiment of the present invention will be described below with reference to the drawings.

Fig. ff51 shows the overall configuration of an embodiment of the packaged circuit element inspection apparatus according to the present invention, with the left side in the figure being the supply side and the right side being the discharge side. A circuit element holding board storage body 1o is arranged on the supply side, and this circuit element holding board storage body 1o is in contact with the circuit element holding board storage body 10 in which a plurality of circuit element holding boards 20 are stored. The arranged X-Y table 30 is equipped with a fixing means 4o,
This fixing means 40 allows the circuit element holding board 2o to be fixed on the xy table 30. Further, the movement of the circuit element holding plate 2o from the circuit element holding plate storage body 1o to the XY table 30 is carried out by a pull-out means 50. The circuit element holding board storage body 10 fixed on the X-Y table 30 is movable along with the X-Y table 3o as appropriate along two directions (X and Y directions) orthogonal to each other, and the circuit element holding board storage body 10 is fixed on the X-Y table 30. One of the flat package type package circuit elements 6o held in a plurality of arrays in the board storage body 10 is positioned at a specific position.

packaged circuit element 6 positioned at the specific position;
0 is removably held by the handler 70 and is adapted to be transferred to the first preparatory positioning member 8o. On the inspection position side (discharge side) of the preparation positioning member 80 of ff1l is the preparation positioning member 90 of t52. Inspection positioning member i.

1. First discharge side positioning member 110. Discharge side positioning member 120 of ff12. and the third discharge side positioning member 110 are arranged in a straight line in accordance with the described order and spaced apart from each other by equal predetermined intervals. On the other hand, each of these positioning members 80 , 90 .

100, 110, 120, 13017) A transport device 12140 is provided on the upper side in the figure. This conveyance device 1
40 reciprocates along the arrangement direction by a distance equal to the predetermined interval while detachably holding the packaged circuit element 60, and moves the packaged circuit element 60 to the first position.
This is a device that sequentially conveys the paper from the preparation positioning member 80 to the third discharge side positioning member 110.

A discharge side X-Y table 150 configured similarly to the X-Y table 30 is arranged on the discharge side of this inspection device, and a circuit element holding board is placed and fixed on this X-Y table 150. The packaged circuit element 60 is returned onto the package 20 by a handler 160 on the discharge side.

Further, a circuit element holding board storage body 170 on the ejection side is provided adjacent to the XY table 150. This circuit element holding board storage body 170 is constructed in the same manner as the circuit element holding board storage body lO, and the circuit element retention board 20 on the is returned to the circuit element holding board storage body 170.

Further on the discharge side of the third discharge side positioning member 110, there is a rejected product storage section 190 at an interval equal to the predetermined interval.
is located. Here, the package type circuit element 60 positioned and held on the inspection positioning member 100 is configured to be inspected by connecting each of its terminals to each inspection terminal of the inspection circuit 200 and energizing it. Passed products are stored in the circuit element holding board housing 170 on the unloading side, while rejected products are stored in the rejected product storage section 190, that is, they are judged as 1 pass/fail. .

FIG. 2 shows the positioning members 80, 90, 100.11.
0, 120, 130 and transport device 140 are shown. In this figure, the positioning members 80, 90, 1
00. llo, 120, and 130 are arranged in a straight line at equal intervals (at a constant pitch) on the upper end surface of a base J81 horizontally fixed at a predetermined height position of the base 26''2.

Of these, the inspection positioning member 100 has a holding hole 182, as shown enlarged in FIG. This holding hole 182 has a main body 6 of the circuit element 60.
0A is inserted, the peripheral edge of the hole 182 serves as a terminal holding portion 182A, and this end holding portion 182A
The terminal 60B of the circuit element 6o is held on top. Further, the second positioning member 100 is equipped with a heater 191, and the circuit element 60 can be inspected while being heated by the heater 191.

Inspection positioning member 100 to the right of this holding hole 182
is placed on an elevating plate 184 (see FIG. 2.3) via a pedestal 183. The vertical plate 184 is normally placed at the same height as the base 181, but during inspection, the vertical plate 184 is raised by an inspection lifting means (not shown) provided on the lower side of the vertical plate 184. 1
Each terminal of the holding hole-shaped circuit element 60 is supplied to the test circuit 200 (see FIG. 1) provided at a predetermined height position on the upper side of the test circuit 84 . Once connected, a test current is applied and a test is performed.

First preparation positioning member 80 placed on base 181
The second preparation positioning member 90 is formed in substantially the same manner as the inspection position determining member 100, and has holding holes m 192 and 193 for holding the packaged circuit element 60, respectively.
Possibility 1: tail, t52 not tP = positioning member 90
As shown in FIG. In the hole portion 192,
As shown in FIG. 5, the preparation position 2 determining member 9 of i2
It is formed larger than the holding hole 193 of No. 0 by a predetermined range. Therefore, as the packaged circuit element 60 is sequentially transferred from the first preparatory positioning member 80 to the second preparatory positioning member 90 to the test positioning member 100, the packaged circuit element 60 is transferred to the test positioning member 100.
Terminal holding portions 192A and 193A are also provided at the peripheral edges of the holding holes 192 and 193, respectively. Also,
A heater 191 is arranged at the bottom side of each hole 192, 193, so that the circuit element 60 is heated before reaching the inspection position.

On the other hand, f provided on the discharge side of the inspection positioning member 100
iS1 to third discharge side positioning member 110°120.1
30 are constructed in substantially the same manner as the inspection positioning member 100, and each has holding holes 194, 195, and 196, but the package type circuit element 60 is held in these holding holes 194 to 19G. 4. is a packaged circuit element 60 that has already been tested. There is little need for accurate positioning in the holding hole 1 of the inspection positioning member lOO.
It is formed slightly larger than 82.

These positioning members 80, 90, 100, 110.12
The conveyance device 140 that sequentially moves the packaged circuit elements 60 between 0.0 and 130 degrees has a conveyance member 201 made of a long round shaft material, and this conveyance member 201 is connected to the positions and the determining members 80, 90, 100. .110, 120, and 130, and is supported on the base 181 through bearings 202 provided at predetermined intervals so as to be able to reciprocate in the axial direction and to rotate in the axial center. . Further, this conveying member 201 is axially reversed (rotated) by a rotating means 210, and is reciprocated in the axial direction by a seven-stage reciprocating stage 220.

The conveyance member 201 has a predetermined interval σ along its longitudinal direction.
A plurality of suction arms 231 are attached to the. These suction arms 231 are attached to the clamping pieces 2 as shown in FIG.
32 along the direction perpendicular to the direction 611 of the conveying member 201. Further, on the lower end surface side of the tip of each suction arm 231, there is a suction cup 233 extending downward in the figure.
are installed respectively. The suction cup 233 has a bellows rubber tube that can be expanded and contracted and a compression coil spring that surrounds the bellows rubber tube, and is configured to be expandable and contractible and to have restoring force. In addition, an air flow path 234 is provided in the suction arm 231, and one end side communicates with the suction cup 233 and the other end side or the base end side of the suction arm 231 (right side in FIG. 6) opens. This air flow path 234 is connected to a negative pressure source such as a suction pump by a resin tube or the like that is connected to this air flow path 234 via a tube attachment pipe 235, and when the negative pressure source is operated, each suction cup 233 A packaged circuit element 60 is removably attracted to each of them. Furthermore, the spacing between the suction cups 233 at the tip of each suction arm 231 is determined by the positioning members 80, 90, 100.
, 110, 120, and 130.

The rotating means 210 is shown in FIGS. 7 and 8. In these figures, the rotation means 210 has a rotation drive motor 241, and this rotation drive motor 241 is connected to the mounting plate 2.
It is attached to the lower end surface side of the base fi 181 via 42. The output shaft of the motor 241 is vertical, and one end of a camshaft 244 is connected to this output shaft via a gear set 243. The camshaft 244 has bearings 2 at both ends.
45, it is vertically supported by the -1 plate 242 so as to be freely rotatable, and a rotating cam 246 is attached at a predetermined position in the middle thereof.

The rotating piece cam 246 is an eccentric cam, and an L-shaped rotating cam follower 248 is attached to the cam surface via an abutting roller 247.
One end of the two is in contact with each other. This rotating piece cam follower 2
48 is rotatably supported by the support shaft 251 of the cam follower dial plate 249 at its corner. In addition, a mounting shaft 2 is provided at a predetermined position on one side of this rotational cam follower 248.
A rotatable piece 253 is rotatably attached via 52.

One end of a compression coil spring 254 is attached to the other end of the rotating cam follower 248, and this compression coil spring 2
The other end of 54 is connected to base plate 181, which is a fixed side, via spring mounting plate 255. Therefore, the rotational cam follower 248 is supported by the spring mounting plate 255.
It is always biased to rotate counterclockwise in FIG. 8 with rotation center 1 as the rotation center. On the other hand, the rotating piece 253 and the rotating cam follower 248 are connected by a compression coil spring 256, so that the tip side of the one-turning cam follower 248 and the tip side of the rotating piece 253 are biased toward each other. ing.

These cam followers 2 are urged in the direction of approaching each other.
48 and the rotating piece 253 have bearing rollers 25 at their image ends, respectively.
7 is rotatably mounted, and between these bearing rollers 257 is a vertically moving shaft 26 made of a round shaft of a predetermined length.
1 is being held down. As shown in FIG.
When the transport member 201 moves up and down, the axis center is reversed (rotated).
It is supposed to be done. Further, the vertical movement shaft 261 is movable in the longitudinal direction while being held between the pair of bearing rollers 257. Here, when the rotation cam 24B is rotated by the rotation drive motor 241, the rotation cam follower 248 configured to come into contact with the cam surface of the rotation cam 246 connects the rotation cam follower 248 and the rotation piece. The vertically moving shaft 261 sandwiched between the vertically moving shaft 261 and the vertically moving shaft 253 moves up and down, and the conveying member 201 rotates about the shaft. In addition, the cam shaft 244 has a rotation angle of the cam 1lib 244, in other words, a rotation angle of the rotation cam 246, and in other words, a rotation angle of the conveying member 20.
A rotation angle detector 263 for detecting the rotation angle of 1 is provided.

The reciprocating means 220 is shown in FIGS. 9-11.

In these figures, a reciprocating means base 271 is fixed at a predetermined height position on the base 26, and a reciprocating drive motor 273 is mounted on a mounting plate 272 erected on the reciprocating means base 271. Fixed. A pulley 274 is attached to the output shaft of the reciprocating drive motor 273, and a driving belt 275 wound around the boot 9274 is attached to the output shaft of the reciprocating drive motor 273.
It is wound around a pulley 277 attached to one end of 76. Both ends of the reciprocating rotating shaft 276 are supported by the mounting plate 272 via oil receivers 278, respectively, so as to be rotatable along the vertical direction.

The upper end of the reciprocating rotary shaft 276 is provided with a rotation angle detector 279 for detecting the rotation angle position of the reciprocating rotary shaft 276, and the base end of the swing lever 282 is connected to the lower end via a mounting portion 281. Fixed. An engagement roller 283 is attached to the tip of this swing lever 282,
The engagement roller 283 is slidably inserted into an engagement groove 285 formed on the upper end surface of the slider 284.

The slider 284 is attached to one side of a slider box 286, and this slider box 286 is a round shaft member fixed on the reciprocating means base 271 via a mounting base 287 along the longitudinal direction of the conveying member 201. The slider guide rail 288 is slidably guided along the longitudinal direction. Therefore, when the swing lever 282 swings around the reciprocating rotation shaft 276, the slider 284 and the slider box 28
6 reciprocates i while being guided by the slider guide rail 288
! I! is configured to operate. In addition.

As shown in FIG. 2, the slider pin 286 and the rotary piece 253 are connected by a long compression coil spring 289, and thereby the engagement roller 283 and the engagement groove 28
5 is prevented from wobbling.

Furthermore, one end of the conveying member 201 is attached to the distal end side of the slider 284 so that it cannot be moved in position and can rotate around its axis.
When the slider 284 is reciprocated along the slider guide rail 288, the conveyance member 201 is also reciprocated at the same time. In addition, Section 2.9
Reference numeral 291 in the figure indicates the swing angle of the swing lever 282 according to rule 1.
It is a stopper.

According to this embodiment, the fixed interval (fixed pitch)
The simple configuration of positioning members 80, 90, and 100 that sequentially move the circuit elements 60 with high accuracy and a phase shifter 2i 140 that moves the circuit elements 60 at regular pitches allows the height required for inspection to be adjusted. Accurate positioning can be easily achieved. Moreover, there is an advantage that no particularly highly precise configuration is required other than accurately arranging the positioning members 80, 90, and 100.

Furthermore, since it is not necessary to accurately position the circuit elements 6o when feeding them to the first sequential positioning member 80, U(
It is easy to achieve full automation and unmanned operation without installing particularly high-precision equipment on the ship.

Furthermore, the positioning member 110° 120 of the inspection circuit 200 is arranged symmetrically with the positioning member 80° 90 in front of the inspection circuit 200, and while the main parts are common, it is possible to judge pass/fail and to judge whether the product is acceptable. The structure also makes it easy to line up and collect.

Furthermore, even if the format, shape, etc. of the packaged circuit element 60 that is the object to be inspected is changed, the positioning member 8 can simply be changed.
By alternating 0,90,100.110 and 120, tests can be performed on different circuit elements without any other modification, and is highly applicable.

In addition, inspection can be performed under heating by the heater 191, and inspection modes can be expanded.

Further, the conveyance device 140 uses a suction cup 233 to hold the circuit element 6.
Since it is a method of adsorbing 0, from this point of view as well, it can be easily applied to circuit elements 6o of various types, and the circuit element 6o will not be damaged or soiled during transportation. Reference numeral 140 is of a reciprocating rotation type using a swing lever 282, and since it is also provided with a stopper 291, it is easy and reliable to perform a forward movement at a constant pitch.

In addition, in implementation, a structure may be adopted in which a plurality of identical positioning members are provided and the number of suction cups 233 is increased accordingly, so that a plurality of circuit elements 60 can be tested simultaneously.

Further, although the heater 191 is not necessarily required, if the heater 191 is provided on at least one of the positioning members 80, 90, and 100, the circuit element 6o can be inspected under heating. Also, although in the above embodiment two preparatory positioning members 80,90 are provided, only one preparatory positioning member may be provided, or alternatively three or more semi-in positioning members may be provided. Furthermore, although the packaged circuit element 6o is of a flat package type, it is not limited to this, and may be of other types such as a dual package type.

As described above, according to the present invention, there is provided a packaged circuit that allows easy and accurate positioning of a packaged circuit element when connecting a packaged open I18 element to a test circuit and testing the packaged circuit element without requiring any manual labor. A device testing device can be provided.

[Brief explanation of drawings]

FIG. 1 is a plan view showing a schematic overall configuration of an embodiment of a packaged circuit element testing apparatus according to the present invention, FIG. 2 is a plan view showing a conveying device 140 in the embodiment, and FIG. FIGS. 4 and 5 are enlarged sectional views showing the inspection positioning member 100 in the embodiment, FIGS. 4 and 5 are enlarged sectional views showing the first and second preparation positioning members, respectively, and FIG. FIG. 57 and FIG. 8 are a front view and a partially cutaway side view showing the rotating means 210 in the embodiment, respectively, and FIG. 9 and FIG. A plan view and a partially cut-away side view showing the reciprocating means 220 in the embodiment, and a partially cut-away front view showing main parts of the reciprocating means 220 are shown in FIG. lO...Circuit element holding board storage body, 20...Circuit element holding board, 30...X-Y table, 40...Fixing means, 50...Drawer child support, 60...Package type circuit element, 70...handler, 80...jlQl preparation positioning member, 90...second preparation positioning member,
100... Inspection positioning member, 110... First discharge side positioning member, 120... Second discharge side positioning member, 130... Third discharge side positioning member, 140
... Conveyance device, 150 ... X-Y table, 160
... Handler, 170 ... Circuit element holding board storage body, 180 ... Return means, 190 ... Rejected product storage section, 200 ... Inspection circuit, 201 ... Transport member, 21
0... Rotating means, 220... Reciprocating means, 282...
- Swing lever, 284...Slider, 285...Engagement groove.

Claims (1)

[Scope of Claims] (1) In a packaged circuit device testing apparatus for testing a packaged circuit device by connecting a test circuit to each of a plurality of terminals of a packaged circuit device positioned at a predetermined testing position, A test positioning member for accurately positioning and holding the test position at a test position; and a preparation positioning member for positioning and holding the packaged circuit element in a posture within a predetermined range wider than the accurate positioning range by the test positioning member prior to the test positioning member. are arranged at a predetermined interval apart, and suction cups for removably suctioning and holding the packaged circuit element are arranged at an interval equal to the arrangement interval and are reciprocated through the interval by a reciprocating means. An inspection apparatus for a packaged circuit element, characterized in that it is provided with a conveyance device that sequentially conveys the packaged circuit elements at the intervals. (2. In Claim 1, further prior to the preparation positioning member, one or more preparation positioning members for holding the packaged circuit element in a posture within a wider predetermined range are disposed at a distance of the predetermined interval. established, while
An inspection apparatus for a packaged circuit element, wherein the conveyance member is provided with a number of suction cups corresponding to the number of the positioning members. (3) In claim 1 or 2, the reciprocating means has a distal end slidably engaged with an engagement groove fixed to the conveyance member. 1. An inspection device for packaged circuit elements, comprising: a swinging lever that reciprocates within a predetermined angle range. (4) The package type circuit according to any one of claims 1 to 3, wherein at least a part of the one positioning member is provided with a heater for heating the package type circuit element. Element inspection equipment.