JPS6079234A - イオン散乱分光装置 - Google Patents

イオン散乱分光装置

Info

Publication number
JPS6079234A
JPS6079234A JP58187393A JP18739383A JPS6079234A JP S6079234 A JPS6079234 A JP S6079234A JP 58187393 A JP58187393 A JP 58187393A JP 18739383 A JP18739383 A JP 18739383A JP S6079234 A JPS6079234 A JP S6079234A
Authority
JP
Japan
Prior art keywords
ions
ion
lens
helium
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58187393A
Other languages
English (en)
Japanese (ja)
Other versions
JPH046257B2 (enExample
Inventor
Akinori Mogami
最上　明矩
Yuji Sakai
境　悠治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58187393A priority Critical patent/JPS6079234A/ja
Publication of JPS6079234A publication Critical patent/JPS6079234A/ja
Publication of JPH046257B2 publication Critical patent/JPH046257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58187393A 1983-10-06 1983-10-06 イオン散乱分光装置 Granted JPS6079234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58187393A JPS6079234A (ja) 1983-10-06 1983-10-06 イオン散乱分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58187393A JPS6079234A (ja) 1983-10-06 1983-10-06 イオン散乱分光装置

Publications (2)

Publication Number Publication Date
JPS6079234A true JPS6079234A (ja) 1985-05-07
JPH046257B2 JPH046257B2 (enExample) 1992-02-05

Family

ID=16205236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58187393A Granted JPS6079234A (ja) 1983-10-06 1983-10-06 イオン散乱分光装置

Country Status (1)

Country Link
JP (1) JPS6079234A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002306A (ja) * 2008-06-20 2010-01-07 National Institute Of Advanced Industrial & Technology 中性粒子質量分析装置及び分析方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002306A (ja) * 2008-06-20 2010-01-07 National Institute Of Advanced Industrial & Technology 中性粒子質量分析装置及び分析方法

Also Published As

Publication number Publication date
JPH046257B2 (enExample) 1992-02-05

Similar Documents

Publication Publication Date Title
Carson et al. On-line chemical analysis of aerosols by rapid single-particle mass spectrometry
Ovsyannikov et al. Principles and operation of a new type of electron spectrometer–ArTOF
US5444242A (en) Scanning and high resolution electron spectroscopy and imaging
US5650616A (en) Apparatus and method for analyzing surface
JP2567736B2 (ja) イオン散乱分析装置
US4255656A (en) Apparatus for charged particle spectroscopy
JPH08240566A (ja) レーザ支援による粒子分析
US3840743A (en) Ion microanalyzer
JPH10208682A (ja) 粒子線結像装置、粒子線結像装置に設けられるスペクトロメータ、粒子線結像方法及び粒子線結像装置の使用方法
US5763875A (en) Method and apparatus for quantitative, non-resonant photoionization of neutral particles
JPS6079234A (ja) イオン散乱分光装置
JPH0627058A (ja) 電子分光方法とこれを用いた電子分光装置
JP3239427B2 (ja) イオン散乱分光装置
EP0295653B1 (en) High luminosity spherical analyzer for charged particles
US5336886A (en) Apparatus for measuring a diffraction pattern of electron beams having only elastic scattering electrons
JPS62113052A (ja) 元素分析方法
JP3055159B2 (ja) 中性粒子質量分析装置
Allali et al. Secondary emission of negative ions and electrons resulting from electronic sputtering of cesium salts: differences between halides and oxygenated salts
JPH01296555A (ja) 集束イオンビーム装置
JPH0581875B2 (enExample)
JP3079585B2 (ja) 中性粒子質量分析装置
JP3221066B2 (ja) 荷電粒子エネルギーアナライザ
US4818868A (en) Trochoidal analysis of scattered electrons in a merged electron-ion beam geometry
JPS6049546A (ja) 複合分析装置
JPH05290796A (ja) 表面分析装置