JPS6076027U - マイクロ波集積回路用キヤパシタ - Google Patents

マイクロ波集積回路用キヤパシタ

Info

Publication number
JPS6076027U
JPS6076027U JP16680883U JP16680883U JPS6076027U JP S6076027 U JPS6076027 U JP S6076027U JP 16680883 U JP16680883 U JP 16680883U JP 16680883 U JP16680883 U JP 16680883U JP S6076027 U JPS6076027 U JP S6076027U
Authority
JP
Japan
Prior art keywords
microwave integrated
layer metal
capacitor
metal film
integrated circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16680883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113405Y2 (enrdf_load_stackoverflow
Inventor
千明　俊雄
後藤　美輝男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16680883U priority Critical patent/JPS6076027U/ja
Publication of JPS6076027U publication Critical patent/JPS6076027U/ja
Application granted granted Critical
Publication of JPH0113405Y2 publication Critical patent/JPH0113405Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP16680883U 1983-10-27 1983-10-27 マイクロ波集積回路用キヤパシタ Granted JPS6076027U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16680883U JPS6076027U (ja) 1983-10-27 1983-10-27 マイクロ波集積回路用キヤパシタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16680883U JPS6076027U (ja) 1983-10-27 1983-10-27 マイクロ波集積回路用キヤパシタ

Publications (2)

Publication Number Publication Date
JPS6076027U true JPS6076027U (ja) 1985-05-28
JPH0113405Y2 JPH0113405Y2 (enrdf_load_stackoverflow) 1989-04-19

Family

ID=30365105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16680883U Granted JPS6076027U (ja) 1983-10-27 1983-10-27 マイクロ波集積回路用キヤパシタ

Country Status (1)

Country Link
JP (1) JPS6076027U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0113405Y2 (enrdf_load_stackoverflow) 1989-04-19

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