JPS6075459U - スパツタガンの水抜き装置 - Google Patents

スパツタガンの水抜き装置

Info

Publication number
JPS6075459U
JPS6075459U JP16709483U JP16709483U JPS6075459U JP S6075459 U JPS6075459 U JP S6075459U JP 16709483 U JP16709483 U JP 16709483U JP 16709483 U JP16709483 U JP 16709483U JP S6075459 U JPS6075459 U JP S6075459U
Authority
JP
Japan
Prior art keywords
pipe
water supply
draining device
supply pipe
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16709483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238930Y2 (pm
Inventor
吉門　大和
小野寺　博也
Original Assignee
株式会社徳田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社徳田製作所 filed Critical 株式会社徳田製作所
Priority to JP16709483U priority Critical patent/JPS6075459U/ja
Publication of JPS6075459U publication Critical patent/JPS6075459U/ja
Application granted granted Critical
Publication of JPH0238930Y2 publication Critical patent/JPH0238930Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16709483U 1983-10-28 1983-10-28 スパツタガンの水抜き装置 Granted JPS6075459U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16709483U JPS6075459U (ja) 1983-10-28 1983-10-28 スパツタガンの水抜き装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16709483U JPS6075459U (ja) 1983-10-28 1983-10-28 スパツタガンの水抜き装置

Publications (2)

Publication Number Publication Date
JPS6075459U true JPS6075459U (ja) 1985-05-27
JPH0238930Y2 JPH0238930Y2 (pm) 1990-10-19

Family

ID=30365655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16709483U Granted JPS6075459U (ja) 1983-10-28 1983-10-28 スパツタガンの水抜き装置

Country Status (1)

Country Link
JP (1) JPS6075459U (pm)

Also Published As

Publication number Publication date
JPH0238930Y2 (pm) 1990-10-19

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